JPS6441850A - Fluorescent x-ray analyzer - Google Patents

Fluorescent x-ray analyzer

Info

Publication number
JPS6441850A
JPS6441850A JP19858087A JP19858087A JPS6441850A JP S6441850 A JPS6441850 A JP S6441850A JP 19858087 A JP19858087 A JP 19858087A JP 19858087 A JP19858087 A JP 19858087A JP S6441850 A JPS6441850 A JP S6441850A
Authority
JP
Japan
Prior art keywords
measured
fluorescent
measurement
ray analyzer
etching device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19858087A
Other languages
Japanese (ja)
Inventor
Masanori Obata
Kenji Kishibe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP19858087A priority Critical patent/JPS6441850A/en
Publication of JPS6441850A publication Critical patent/JPS6441850A/en
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

PURPOSE:To measure the content of a light element from the surface to inside of an object to be measured, by a method wherein an etching device is attached to perform an etching processing for the surface of an object to be measured and a measurement is accomplished with the inside of the object being measured exposed to the surface thereof. CONSTITUTION:A reaction container 11 of an etching device A having an air intake port 12 and an exhaust port 13 is connected to a vacuum container 2 through a valve 14 and houses an electrode 16 connected to a high frequency power source 15 inside. In other words, in this fluorescent X-ray analyzer, an etching device is attached to the conventional type. With such an arrangement, a measurement is possible with the inside of an object 3 to be measured exposed to the surface thereof by performing an etching processing. This enables measurement of the content of a light element from the surface to inside of the object 3 being measured.
JP19858087A 1987-08-07 1987-08-07 Fluorescent x-ray analyzer Pending JPS6441850A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19858087A JPS6441850A (en) 1987-08-07 1987-08-07 Fluorescent x-ray analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19858087A JPS6441850A (en) 1987-08-07 1987-08-07 Fluorescent x-ray analyzer

Publications (1)

Publication Number Publication Date
JPS6441850A true JPS6441850A (en) 1989-02-14

Family

ID=16393540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19858087A Pending JPS6441850A (en) 1987-08-07 1987-08-07 Fluorescent x-ray analyzer

Country Status (1)

Country Link
JP (1) JPS6441850A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04107526U (en) * 1991-03-04 1992-09-17 株式会社大金製作所 Release device for pull type clutch

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04107526U (en) * 1991-03-04 1992-09-17 株式会社大金製作所 Release device for pull type clutch

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