JPS6448170U - - Google Patents
Info
- Publication number
- JPS6448170U JPS6448170U JP14273087U JP14273087U JPS6448170U JP S6448170 U JPS6448170 U JP S6448170U JP 14273087 U JP14273087 U JP 14273087U JP 14273087 U JP14273087 U JP 14273087U JP S6448170 U JPS6448170 U JP S6448170U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- spinner
- recess
- coating
- fitted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案に係る塗布装置の縦断面図、第
２図はスピンナーの平面図、第３図は第１図の要
部拡大図、第４図は従来装置による塗布液の流れ
を示す被処理物の平面図、第５図は第４図の―
線断面図である。
尚、図面中、１はケース、２はスピンナー、４
は凹部、５は溝部、６は溶剤供給路、Ｗは被処理
物である。
Fig. 1 is a longitudinal sectional view of the coating device according to the present invention, Fig. 2 is a plan view of the spinner, Fig. 3 is an enlarged view of the main part of Fig. 1, and Fig. 4 shows the flow of the coating liquid by the conventional device. A plan view of the object to be processed, Figure 5 is similar to Figure 4.
FIG. In addition, in the drawing, 1 is a case, 2 is a spinner, and 4 is a case.
5 is a recessed portion, 5 is a groove portion, 6 is a solvent supply path, and W is a processed object.
Claims (1)
にノズルから塗布液を滴下し、スピンナーによつ
て被処理物を回転させることで生じる遠心力で前
記滴下した塗布液を被処理物表面に広げるように
した塗布装置において、前記スピンナー上面には
被処理物を嵌め込む凹部を形成し、この凹部の外
形寸法を被処理物の外形寸法よりも若干大きくす
ることで被処理物を凹部に嵌め込んだ状態で被処
理物の周囲に溝部を形成するようにし、更にこの
溝部にスピンナーに形成した溶剤供給路を開口せ
しめたことを特徴とする塗布装置。 (2) 前記被処理物は角板状であることを特徴と
する実用新案登録請求の範囲第１項記載の塗布装
置。[Claims for Utility Model Registration] (1) A coating solution is dropped from a nozzle onto the surface of a plate-shaped workpiece placed on a spinner, and the drop is applied by centrifugal force generated by rotating the workpiece by the spinner. In the coating device, the coating liquid is spread over the surface of the workpiece, and the upper surface of the spinner is formed with a recess into which the workpiece is fitted, and the external dimensions of the recess are slightly larger than the external dimensions of the workpiece. A coating apparatus characterized in that a groove is formed around the object to be treated while the object is fitted into the recess, and a solvent supply path formed in a spinner is opened in the groove. (2) The coating apparatus according to claim 1, wherein the object to be treated is in the shape of a square plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14273087U JPH0450947Y2 (en) | 1987-09-18 | 1987-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14273087U JPH0450947Y2 (en) | 1987-09-18 | 1987-09-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6448170U true JPS6448170U (en) | 1989-03-24 |
| JPH0450947Y2 JPH0450947Y2 (en) | 1992-12-01 |
Family
ID=31408928
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14273087U Expired JPH0450947Y2 (en) | 1987-09-18 | 1987-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0450947Y2 (en) |
-
1987
- 1987-09-18 JP JP14273087U patent/JPH0450947Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0450947Y2 (en) | 1992-12-01 |