JPS6448862U - - Google Patents
Info
- Publication number
- JPS6448862U JPS6448862U JP14296187U JP14296187U JPS6448862U JP S6448862 U JPS6448862 U JP S6448862U JP 14296187 U JP14296187 U JP 14296187U JP 14296187 U JP14296187 U JP 14296187U JP S6448862 U JPS6448862 U JP S6448862U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- tip
- substance
- light source
- driven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 3
- 239000000523 sample Substances 0.000 claims 5
- 230000005641 tunneling Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
第１〜３図は本考案の実施例を示しており、第
１図は一部を切断して示す分解斜視図、第２図は
要部を取り出して示す斜視図、第３図は光学式顕
微鏡の視野を示す図、第４図はＳＴＭの原理を示
すブロツク図、第５図は第４図のＡ部の原子状態
を示す超拡大図である。
１：探針、１ａ：原子、１ｂ：実像、１ｃ：鏡
像、２：物質、２ａ：原子、３：Ｘ方向ピエゾ素
子、４：Ｙ方向ピエゾ素子、５：Ｚ方向ピエゾ素
子、６：ＸＹ走査回路、７：サーボ回路、８：メ
モリ、９：マイクロコンピユータ、１０：表示装
置、１１：トンネル電流増幅器、１２：本体、１
３：貫通孔、１４：マイクロメータヘツド、１５
：駆動軸、１６：ホルダ、１７：空間部、１８，
１９：傾斜孔、２０：光源、２１：光学式顕微鏡
、２２：突出部、２３：通孔、２４：試料台、２
５：切欠き。
Figures 1 to 3 show an embodiment of the present invention. Figure 1 is an exploded perspective view with a part cut away, Figure 2 is a perspective view of the main parts taken out, and Figure 3 is an optical type. FIG. 4 is a block diagram showing the principle of STM, and FIG. 5 is a super-enlarged view showing the atomic state of part A in FIG. 4. 1: Tip, 1a: Atom, 1b: Real image, 1c: Mirror image, 2: Substance, 2a: Atom, 3: X-direction piezo element, 4: Y-direction piezo element, 5: Z-direction piezo element, 6: XY scanning Circuit, 7: Servo circuit, 8: Memory, 9: Microcomputer, 10: Display device, 11: Tunnel current amplifier, 12: Main body, 1
3: Through hole, 14: Micrometer head, 15
: Drive shaft, 16: Holder, 17: Space, 18,
19: Inclined hole, 20: Light source, 21: Optical microscope, 22: Projection, 23: Through hole, 24: Sample stage, 2
5: Notch.
Claims (1)
つて三次元方向に駆動される探針を有する走査型
トンネル顕微鏡に、上記探針の先端及びこの探針
が対向する物質の表面を照射する光源と、探針の
先端及びこの探針が対向する物質の表面を視野に
納める光学式顕微鏡とを組み合わせて成る、光学
式顕微鏡付走査型トンネル顕微鏡。 A scanning tunneling microscope has a probe that is driven in three dimensions by piezo elements that are driven in each of the X, Y, and Z directions, and the tip of the probe and the surface of the substance that this probe faces are irradiated. A scanning tunneling microscope equipped with an optical microscope, which combines a light source with a light source and an optical microscope that brings into view the tip of a probe and the surface of the substance that the probe faces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14296187U JPS6448862U (en) | 1987-09-21 | 1987-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14296187U JPS6448862U (en) | 1987-09-21 | 1987-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6448862U true JPS6448862U (en) | 1989-03-27 |
Family
ID=31409352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14296187U Pending JPS6448862U (en) | 1987-09-21 | 1987-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6448862U (en) |
-
1987
- 1987-09-21 JP JP14296187U patent/JPS6448862U/ja active Pending
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