JPS6448860U

JPS6448860U -

Info

Publication number: JPS6448860U
Application number: JP14295987U
Authority: JP
Priority date: 1987-09-21
Filing date: 1987-09-21
Publication date: 1989-03-27

Description

[Brief explanation of the drawing]

第１〜２図は本考案の走査型トンネル顕微鏡用
探針の微動装置の実施例を示しており、第１図は
縦断面図、第２図は第１図の側方から見た部分縦
断面図、第３図Ａ〜Ｆは、この微動装置の作用を
順番に示す略図、第４図はこの微動装置の制御回
路図、第５図は探針先端部分の拡大図、第６図は
別の制御回路を示す回路図、第７図は微動装置の
動きにつれて変化する移動距離を示す線図、第８
図はＳＴＭの原理を示すブロツク図、第９図は第
８図のＡ部の原子状態を示す超拡大図である。１：探針、１ａ：原子、２：物質、２ａ：原子
、３：Ｘ方向ピエゾ素子、４：Ｙ方向ピエゾ素子
、５：Ｚ方向ピエゾ素子、６：ＸＹ走査回路、７
：サーボ回路、８：メモリ、９：マイクロコンピ
ユータ、１０：表示装置、１１：トンネル電流増
幅器、１２：本体、１３：案内孔、１４：第一の
移動軸、１５：第二の移動軸、１６：第一の圧電
素子、１７：第一の側孔、１８：第一の押圧片、
１９：空間部、２０：蓋体、２１：第二の圧電素
子、２２：第二の側孔、２３：第二の押圧片、２
４：空間部、２５：蓋体、２６：第三の圧電素子
、２７：パワーアンプ、２８：高圧電源、２９：
タイミングコントローラ、３０：電源、３１：指
令手段、３２：伝達杆、３３：タイミングコント
ローラ、３４：サーボ、３５：トンネル電流検出
器、３６：サーボ、３７：パワーアンプ。 Figures 1 and 2 show an embodiment of the fine movement device for a scanning tunneling microscope probe according to the present invention. 3A to 3F are schematic diagrams sequentially showing the functions of this fine adjustment device, FIG. 4 is a control circuit diagram of this fine adjustment device, FIG. 5 is an enlarged view of the tip of the probe, and FIG. A circuit diagram showing another control circuit, FIG. 7 is a diagram showing the moving distance that changes as the fine movement device moves, and FIG.
The figure is a block diagram showing the principle of STM, and FIG. 9 is a super enlarged view showing the atomic state of part A in FIG. 8. 1: Probe, 1a: Atom, 2: Substance, 2a: Atom, 3: X-direction piezo element, 4: Y-direction piezo element, 5: Z-direction piezo element, 6: XY scanning circuit, 7
: Servo circuit, 8: Memory, 9: Microcomputer, 10: Display device, 11: Tunnel current amplifier, 12: Main body, 13: Guide hole, 14: First movement axis, 15: Second movement axis, 16 : first piezoelectric element, 17: first side hole, 18: first pressing piece,
19: space, 20: lid, 21: second piezoelectric element, 22: second side hole, 23: second pressing piece, 2
4: Space, 25: Lid, 26: Third piezoelectric element, 27: Power amplifier, 28: High voltage power supply, 29:
timing controller, 30: power supply, 31: command means, 32: transmission rod, 33: timing controller, 34: servo, 35: tunnel current detector, 36: servo, 37: power amplifier.

Claims

[Scope of utility model registration request]

Both first and second moving shafts are fitted into a cylindrical guide hole provided in the main body so as to be movable in the length direction of the guide hole without rattling; a first piezoelectric element that connects the moving axes to each other and whose total length changes based on the application of a voltage; a first pressing piece fitted into the side hole so as to be freely movable near and far with respect to the first movement axis, and driven in the length direction of the first side hole by a second piezoelectric element; and the guide. A third piezoelectric element is fitted into a second side hole opened at a portion of the inner surface of the hole that is aligned with the outer circumferential surface of the second moving shaft, so as to be freely movable near and far with respect to the second moving shaft. and a second pressing piece driven in the length direction of the second side hole.
Fine movement device for the probe for scanning tunneling microscopes.