JPS6449258A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS6449258A JPS6449258A JP20686787A JP20686787A JPS6449258A JP S6449258 A JPS6449258 A JP S6449258A JP 20686787 A JP20686787 A JP 20686787A JP 20686787 A JP20686787 A JP 20686787A JP S6449258 A JPS6449258 A JP S6449258A
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- executed
- semiconductor device
- mesa
- etched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Lasers (AREA)
- Led Devices (AREA)
Abstract
PURPOSE:To obtain a semiconductor device of a high response speed by a method wherein all photolithographic operations of a semiconductor substrate are executed in a flat state and, after that, a mesa-type formation is carried out so that a microscopic process can be executed. CONSTITUTION:An insulating film 2 is formed on a semiconductor substrate 1. The insulating film 2 in a region to which an electric current is to flow is etched by a photolithographic operation; a window 5 is formed. An electrode 3 is formed on the whole surface. The insulating film 2 and the electrode 3 are etched, e.g., to be comb-shaped by another photolithographic operation. The substrate 1 is etched by making use of the insulating film 2 and the electrode 3 as masks; a mesa is formed. Because the photolithographic operation is executed prior to the formation of the mesa, a microscopic process can be executed. By this setup, a semiconductor device of a high response speed can thus be obtained.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20686787A JPS6449258A (en) | 1987-08-19 | 1987-08-19 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20686787A JPS6449258A (en) | 1987-08-19 | 1987-08-19 | Manufacture of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6449258A true JPS6449258A (en) | 1989-02-23 |
Family
ID=16530351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20686787A Pending JPS6449258A (en) | 1987-08-19 | 1987-08-19 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6449258A (en) |
-
1987
- 1987-08-19 JP JP20686787A patent/JPS6449258A/en active Pending
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