JPS645012A - Vapor growth equipment - Google Patents

Abstract

PURPOSE:To make the temperature distribution of a susceptor surface uniform, and grow stably a crystal, by making the thickness of the susceptor mounted on a casing surface gradually thin toward the central part, in order that the thermal conductivity may become small toward the central part. CONSTITUTION:In a casing made of quartz, the following are sealed: a heat- insulating material 4 to prevent the downward heat dissipation, a resistor heating element 1 made of tantalum, and electric power supplying terminals 2 to supply electric power to the resistor heating element 1. On the upper sur face of the casing 3, a susceptor 5 is mounted whose thickness becomes thin from the peripheral part toward the central part, and thereon a substrate 6 to be heated is mounted. As the shape of the susceptor 5 becomes thin in thick ness toward the central part, its thermal conductivity is small, so that the tem perature distribution for the substrate 6 to be heated becomes uniform. The same effect can be obtained by a method wherein the thermal conductivity is made small from the peripheral part toward the central part, by making the material of the susceptor 5 composite.