JPS6450577A - Manufacture of superconducting thin film - Google Patents

Manufacture of superconducting thin film

Info

Publication number
JPS6450577A
JPS6450577A JP62208630A JP20863087A JPS6450577A JP S6450577 A JPS6450577 A JP S6450577A JP 62208630 A JP62208630 A JP 62208630A JP 20863087 A JP20863087 A JP 20863087A JP S6450577 A JPS6450577 A JP S6450577A
Authority
JP
Japan
Prior art keywords
substrate
thin film
cuo
target
shall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62208630A
Other languages
Japanese (ja)
Inventor
Ichiro Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62208630A priority Critical patent/JPS6450577A/en
Publication of JPS6450577A publication Critical patent/JPS6450577A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

PURPOSE:To enable a superconducting thin film of low permittivity to be formed in parallel with a substrate surface by a method wherein a Y2O3-BaO-CuO superconductor is filmed meeting the specific requirements for filming speed and gas pressure and using MaO cleaved in a face 100 as the substrate. CONSTITUTION:A thin film of Y2O3-BaO-CuO oxide is formed on a magnesia single crystal substrate cleaved in a face 100 at the filming speed not exceeding 20Angstrom /min and the gas pressure exceeding 40mT to orient the crystalline direction in low electric resistance in parallel with the substrate. For example, said thin film is formed by RF magnetron sputtering process while a target is composed of T0.4Ba0.6CuO3-delta. The applicable target is manufactured by blending and mixing specified amount of Y3O3, BaCO3, CuO as materials and after baking them at 900 deg.C for 12 hours in the air, crushed and mixed with one another again to be pressed down at the pressure of 200kg/cm<2>. Furthermore, the sputtering gas shall be mixed with 90% argon and 10% oxygen; the distance between the substrate and the target shall be 8cm; and the substrate temperature shall be 600 deg.C.
JP62208630A 1987-08-21 1987-08-21 Manufacture of superconducting thin film Pending JPS6450577A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62208630A JPS6450577A (en) 1987-08-21 1987-08-21 Manufacture of superconducting thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62208630A JPS6450577A (en) 1987-08-21 1987-08-21 Manufacture of superconducting thin film

Publications (1)

Publication Number Publication Date
JPS6450577A true JPS6450577A (en) 1989-02-27

Family

ID=16559407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62208630A Pending JPS6450577A (en) 1987-08-21 1987-08-21 Manufacture of superconducting thin film

Country Status (1)

Country Link
JP (1) JPS6450577A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01188663A (en) * 1988-01-22 1989-07-27 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH01188662A (en) * 1988-01-22 1989-07-27 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH01188665A (en) * 1988-01-22 1989-07-27 Sumitomo Electric Ind Ltd Production of superconducting thin film
JP2003124534A (en) * 2001-10-12 2003-04-25 Fujitsu Ltd High temperature superconductor film, method of forming the same, and superconducting element

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01188663A (en) * 1988-01-22 1989-07-27 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH01188662A (en) * 1988-01-22 1989-07-27 Sumitomo Electric Ind Ltd Production of superconducting thin film
JPH01188665A (en) * 1988-01-22 1989-07-27 Sumitomo Electric Ind Ltd Production of superconducting thin film
JP2003124534A (en) * 2001-10-12 2003-04-25 Fujitsu Ltd High temperature superconductor film, method of forming the same, and superconducting element

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