JPS6455940U - - Google Patents

Info

Publication number
JPS6455940U
JPS6455940U JP15188387U JP15188387U JPS6455940U JP S6455940 U JPS6455940 U JP S6455940U JP 15188387 U JP15188387 U JP 15188387U JP 15188387 U JP15188387 U JP 15188387U JP S6455940 U JPS6455940 U JP S6455940U
Authority
JP
Japan
Prior art keywords
light emitting
light
receiving
photoresist
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15188387U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15188387U priority Critical patent/JPS6455940U/ja
Publication of JPS6455940U publication Critical patent/JPS6455940U/ja
Pending legal-status Critical Current

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Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Description

【図面の簡単な説明】
第１図ないし第３図は本考案の実施例を示し、
第１図はフオトレジスト感度測定装置の構成図、
第２図は同装置の光プローブの部分の斜視図、第
３図は測定結果の例を示す説明図、第４図は従来
のフオトレジスト感度測定装置の構成図、第５図
はウエハ上に形成されたフオトレジストの感度測
定のためにステツプ的に露光した状態を示す平面
図である。 １…フオトレジスト感度測定装置、２…レーザ
光源、６…投光用光フアイバ、８…受光用光フア
イバ、１０…投受光部、１６…受光素子。

Claims (1)

    【実用新案登録請求の範囲】
  1. 単心の投光用光フアイバの周囲に多数本の受光
    用光フアイバを一体同軸状に設けてなる投受光部
    を備え、この投受光部をフオトレジストの露光位
    置に対応する間隔でアレー状に配列固定する一方
    、前記各投光用光フアイバの他端は単一のレーザ
    光源に共通に接続し、かつ、前記受光用光フアイ
    バの他端は各投受光部ごとに個別の受光素子に導
    いていることを特徴とするフオトレジスト感度測
    定装置。
JP15188387U 1987-10-02 1987-10-02 Pending JPS6455940U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15188387U JPS6455940U (ja) 1987-10-02 1987-10-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15188387U JPS6455940U (ja) 1987-10-02 1987-10-02

Publications (1)

Publication Number Publication Date
JPS6455940U true JPS6455940U (ja) 1989-04-06

Family

ID=31426317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15188387U Pending JPS6455940U (ja) 1987-10-02 1987-10-02

Country Status (1)

Country Link
JP (1) JPS6455940U (ja)

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