JPS6456308A - Production of aluminum nitride powder having high purity - Google Patents

Production of aluminum nitride powder having high purity

Info

Publication number
JPS6456308A
JPS6456308A JP21419987A JP21419987A JPS6456308A JP S6456308 A JPS6456308 A JP S6456308A JP 21419987 A JP21419987 A JP 21419987A JP 21419987 A JP21419987 A JP 21419987A JP S6456308 A JPS6456308 A JP S6456308A
Authority
JP
Japan
Prior art keywords
aln
precursor
high purity
soln
powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21419987A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0466807B2 (fr
Inventor
Akira Yamane
Takeshi Nakamura
Shunsuke Mabuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tosoh Finechem Corp
Original Assignee
Tosoh Finechem Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tosoh Finechem Corp filed Critical Tosoh Finechem Corp
Priority to JP21419987A priority Critical patent/JPS6456308A/ja
Publication of JPS6456308A publication Critical patent/JPS6456308A/ja
Publication of JPH0466807B2 publication Critical patent/JPH0466807B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP21419987A 1987-08-28 1987-08-28 Production of aluminum nitride powder having high purity Granted JPS6456308A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21419987A JPS6456308A (en) 1987-08-28 1987-08-28 Production of aluminum nitride powder having high purity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21419987A JPS6456308A (en) 1987-08-28 1987-08-28 Production of aluminum nitride powder having high purity

Publications (2)

Publication Number Publication Date
JPS6456308A true JPS6456308A (en) 1989-03-03
JPH0466807B2 JPH0466807B2 (fr) 1992-10-26

Family

ID=16651871

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21419987A Granted JPS6456308A (en) 1987-08-28 1987-08-28 Production of aluminum nitride powder having high purity

Country Status (1)

Country Link
JP (1) JPS6456308A (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012029868A1 (fr) * 2010-09-03 2012-03-08 株式会社トクヤマ Poudre de nitrure d'aluminium à particules sphériques
JP2014094880A (ja) * 2012-10-11 2014-05-22 Ube Ind Ltd Al−N−H系化合物粉末及びその製造方法
US9090469B2 (en) 2010-09-28 2015-07-28 Tokuyama Corporation Method of producing a spherical aluminum nitride powder

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102842381B1 (ko) * 2023-06-01 2025-08-07 주식회사 알링크 질화알루미늄 제조방법

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012029868A1 (fr) * 2010-09-03 2012-03-08 株式会社トクヤマ Poudre de nitrure d'aluminium à particules sphériques
JP2012056774A (ja) * 2010-09-03 2012-03-22 Tokuyama Corp 球状窒化アルミニウム粉末
US9073755B2 (en) 2010-09-03 2015-07-07 Tokuyama Corporation Spherical aluminum nitride powder
US9090469B2 (en) 2010-09-28 2015-07-28 Tokuyama Corporation Method of producing a spherical aluminum nitride powder
JP2014094880A (ja) * 2012-10-11 2014-05-22 Ube Ind Ltd Al−N−H系化合物粉末及びその製造方法

Also Published As

Publication number Publication date
JPH0466807B2 (fr) 1992-10-26

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