JPS6457637U - - Google Patents
Info
- Publication number
- JPS6457637U JPS6457637U JP1987150233U JP15023387U JPS6457637U JP S6457637 U JPS6457637 U JP S6457637U JP 1987150233 U JP1987150233 U JP 1987150233U JP 15023387 U JP15023387 U JP 15023387U JP S6457637 U JPS6457637 U JP S6457637U
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- quartz tube
- substrate
- heat sink
- stopper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987150233U JPH034028Y2 (2) | 1987-09-30 | 1987-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987150233U JPH034028Y2 (2) | 1987-09-30 | 1987-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6457637U true JPS6457637U (2) | 1989-04-10 |
| JPH034028Y2 JPH034028Y2 (2) | 1991-02-01 |
Family
ID=31423190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987150233U Expired JPH034028Y2 (2) | 1987-09-30 | 1987-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH034028Y2 (2) |
-
1987
- 1987-09-30 JP JP1987150233U patent/JPH034028Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH034028Y2 (2) | 1991-02-01 |
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