JPS6465257A - Method for controlling amount of evaporation in vacuum deposition device - Google Patents

Method for controlling amount of evaporation in vacuum deposition device

Info

Publication number
JPS6465257A
JPS6465257A JP22196587A JP22196587A JPS6465257A JP S6465257 A JPS6465257 A JP S6465257A JP 22196587 A JP22196587 A JP 22196587A JP 22196587 A JP22196587 A JP 22196587A JP S6465257 A JPS6465257 A JP S6465257A
Authority
JP
Japan
Prior art keywords
evaporation
amount
heater power
value
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22196587A
Other languages
English (en)
Inventor
Mitsuhiro Abe
Shiro Suzuki
Shigemi Menda
Toshiaki Hanada
Yoshinobu Kurisu
Seiichi Nagameguri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Nippon Steel Nisshin Co Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Nisshin Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd, Nisshin Steel Co Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP22196587A priority Critical patent/JPS6465257A/ja
Publication of JPS6465257A publication Critical patent/JPS6465257A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP22196587A 1987-09-07 1987-09-07 Method for controlling amount of evaporation in vacuum deposition device Pending JPS6465257A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22196587A JPS6465257A (en) 1987-09-07 1987-09-07 Method for controlling amount of evaporation in vacuum deposition device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22196587A JPS6465257A (en) 1987-09-07 1987-09-07 Method for controlling amount of evaporation in vacuum deposition device

Publications (1)

Publication Number Publication Date
JPS6465257A true JPS6465257A (en) 1989-03-10

Family

ID=16774938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22196587A Pending JPS6465257A (en) 1987-09-07 1987-09-07 Method for controlling amount of evaporation in vacuum deposition device

Country Status (1)

Country Link
JP (1) JPS6465257A (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60251273A (ja) * 1984-05-28 1985-12-11 Mitsubishi Heavy Ind Ltd 真空蒸発装置の蒸発量制御方法
JPS648265A (en) * 1987-06-30 1989-01-12 Mitsubishi Heavy Ind Ltd Method for controlling evaporation rate of vacuum deposition device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60251273A (ja) * 1984-05-28 1985-12-11 Mitsubishi Heavy Ind Ltd 真空蒸発装置の蒸発量制御方法
JPS648265A (en) * 1987-06-30 1989-01-12 Mitsubishi Heavy Ind Ltd Method for controlling evaporation rate of vacuum deposition device

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