JPS6472532A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS6472532A
JPS6472532A JP62228270A JP22827087A JPS6472532A JP S6472532 A JPS6472532 A JP S6472532A JP 62228270 A JP62228270 A JP 62228270A JP 22827087 A JP22827087 A JP 22827087A JP S6472532 A JPS6472532 A JP S6472532A
Authority
JP
Japan
Prior art keywords
film
passivation film
si3n4
contact
final passivation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62228270A
Other languages
English (en)
Inventor
Toshio Yanagi
Atsushi Sawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New Japan Radio Co Ltd
Original Assignee
New Japan Radio Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by New Japan Radio Co Ltd filed Critical New Japan Radio Co Ltd
Priority to JP62228270A priority Critical patent/JPS6472532A/ja
Publication of JPS6472532A publication Critical patent/JPS6472532A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP62228270A 1987-09-14 1987-09-14 Manufacture of semiconductor device Pending JPS6472532A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62228270A JPS6472532A (en) 1987-09-14 1987-09-14 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62228270A JPS6472532A (en) 1987-09-14 1987-09-14 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS6472532A true JPS6472532A (en) 1989-03-17

Family

ID=16873841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62228270A Pending JPS6472532A (en) 1987-09-14 1987-09-14 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6472532A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998024121A1 (de) * 1996-11-29 1998-06-04 Siemens Aktiengesellschaft Halbleiterchip und wafer mit schutzschicht, insbesondere aus keramik

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998024121A1 (de) * 1996-11-29 1998-06-04 Siemens Aktiengesellschaft Halbleiterchip und wafer mit schutzschicht, insbesondere aus keramik

Similar Documents

Publication Publication Date Title
KR900000817B1 (en) Semiconductor ic device manufacturing method
EP0288052A3 (en) Semiconductor device comprising a substrate, and production method thereof
JPS6437840A (en) Manufacture of semiconductor device with planar structure
IE822564L (en) Fabrication a semiconductor device having a phosphosilicate glass layer
EP0399881A3 (en) Semiconductor device having two conductor layers and production method thereof
JPS6472532A (en) Manufacture of semiconductor device
KR910003783A (ko) 반도체장치 및 그 제조방법
JPS6410222A (en) Substrate for thin film passive element
JPS5513904A (en) Semiconductor device and its manufacturing method
JPS55138859A (en) Multilayer wiring type semiconductor device
JPS5785246A (en) Semiconductor device
KR880014690A (ko) 상부측 기판 접촉부를 갖고 있는 cmos 집적회로 및 이의 제조방법
JPS56137648A (en) Manufacture of semiconductor device
JPS57199224A (en) Semiconductor device
JPS546775A (en) Semiconductor device featuring stepped electrode structure
JPS5263685A (en) Production of semiconductor device
JPS6428827A (en) Manufacture of semiconductor device
JPS57104241A (en) Semiconductor device
JPS57160156A (en) Semiconductor device
JPS5694672A (en) Manufacture of silicon semiconductor element
JPS5739540A (en) Semiconductor device
JPS57117253A (en) Manufacture of semiconductor device
JPS5776866A (en) Manufacture of semiconductor device
JPS5211864A (en) Semiconductor device
JPS5732653A (en) Manufacture of semiconductor device