JPS6472985A - Apparatus for producing semiconductor single crystal - Google Patents

Apparatus for producing semiconductor single crystal

Info

Publication number
JPS6472985A
JPS6472985A JP22861287A JP22861287A JPS6472985A JP S6472985 A JPS6472985 A JP S6472985A JP 22861287 A JP22861287 A JP 22861287A JP 22861287 A JP22861287 A JP 22861287A JP S6472985 A JPS6472985 A JP S6472985A
Authority
JP
Japan
Prior art keywords
crucible
single crystal
transportation
supporting base
reinforcing material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22861287A
Other languages
Japanese (ja)
Other versions
JP2579951B2 (en
Inventor
Hiromoto Fujita
Katsuyoshi Fukuda
Joshi Nishio
Kazutaka Terajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62228612A priority Critical patent/JP2579951B2/en
Publication of JPS6472985A publication Critical patent/JPS6472985A/en
Application granted granted Critical
Publication of JP2579951B2 publication Critical patent/JP2579951B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE:To prevent the failure, etc., of a crucible during the transportation thereof and to obtain a large-sized single crystal with good workability by fastening the crucible by means of a furnace member enclosing the crucible to integrate the crucible and further, providing holding parts for transportation to the furnace member. CONSTITUTION:The crucible 11 and a supporting base 12 which supports the crucible 11 are fastened and integrated by a reinforcing material 13 and thread working and further, the holding parts for transportation, for example, two holes 13' are provided to the crucible. A raw material is housed into such crucible 11 and the crucible is disposed in a high-pressure vessel 14. After the inside of the vessel is pressurized by gaseous Ar, the crucible 11 is heated by a heater 15 which coaxially encloses the crucible. A raw material 16 is thus obtd. A seed crystal 17 is then lowered and is held in contact with he melt 16; thereafter, the seed crystal 17 is pulled up while the crystal is kept rotated by which the single crystal is obtd. The supporting base 12 which houses the crucible 11 and is assembled with the reinforcing material 13 is taken in this state out of the high-pressure vessel 14 after the end of the production of the single crystal. The content remaining in the crucible 11 is taken out and the reinforcing material 13 is removed. The crucible 11 is taken out of the supporting base 12 and is cleaned.
JP62228612A 1987-09-14 1987-09-14 Semiconductor single crystal manufacturing equipment Expired - Lifetime JP2579951B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62228612A JP2579951B2 (en) 1987-09-14 1987-09-14 Semiconductor single crystal manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62228612A JP2579951B2 (en) 1987-09-14 1987-09-14 Semiconductor single crystal manufacturing equipment

Publications (2)

Publication Number Publication Date
JPS6472985A true JPS6472985A (en) 1989-03-17
JP2579951B2 JP2579951B2 (en) 1997-02-12

Family

ID=16879075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62228612A Expired - Lifetime JP2579951B2 (en) 1987-09-14 1987-09-14 Semiconductor single crystal manufacturing equipment

Country Status (1)

Country Link
JP (1) JP2579951B2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5327199A (en) * 1992-08-20 1994-07-05 Ricoh Company, Ltd. Developing device for a color image forming apparatus
US5372090A (en) * 1991-09-12 1994-12-13 Ringsdorff-Werke Gmbh Multipart support crucible and method for producing the same
JP2009056495A (en) * 2007-08-31 2009-03-19 Koyo Giken:Kk Spot welding electrode
US8248014B2 (en) 2004-05-06 2012-08-21 Mechoshade Systems, Inc. Automated shade control system
US8525462B2 (en) 2005-03-08 2013-09-03 Mechoshade Systems, Inc. Automated shade control method and system
US8723467B2 (en) 2004-05-06 2014-05-13 Mechoshade Systems, Inc. Automated shade control in connection with electrochromic glass
US8836263B2 (en) 2004-05-06 2014-09-16 Mechoshade Systems, Inc. Automated shade control in connection with electrochromic glass

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6021900A (en) * 1983-07-19 1985-02-04 Agency Of Ind Science & Technol Apparatus for preparing compound semiconductor single crystal

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6021900A (en) * 1983-07-19 1985-02-04 Agency Of Ind Science & Technol Apparatus for preparing compound semiconductor single crystal

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5372090A (en) * 1991-09-12 1994-12-13 Ringsdorff-Werke Gmbh Multipart support crucible and method for producing the same
US5327199A (en) * 1992-08-20 1994-07-05 Ricoh Company, Ltd. Developing device for a color image forming apparatus
US8248014B2 (en) 2004-05-06 2012-08-21 Mechoshade Systems, Inc. Automated shade control system
US8432117B2 (en) 2004-05-06 2013-04-30 Mechoshade Systems, Inc. Automated shade control system
US8587242B2 (en) 2004-05-06 2013-11-19 Mechoshade Systems, Inc. Automated shade control system
US8723467B2 (en) 2004-05-06 2014-05-13 Mechoshade Systems, Inc. Automated shade control in connection with electrochromic glass
US8836263B2 (en) 2004-05-06 2014-09-16 Mechoshade Systems, Inc. Automated shade control in connection with electrochromic glass
US8525462B2 (en) 2005-03-08 2013-09-03 Mechoshade Systems, Inc. Automated shade control method and system
JP2009056495A (en) * 2007-08-31 2009-03-19 Koyo Giken:Kk Spot welding electrode

Also Published As

Publication number Publication date
JP2579951B2 (en) 1997-02-12

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