JPS64746A - Forming method of wiring - Google Patents

Forming method of wiring

Info

Publication number: JPS64746A
Authority: JP; Japan
Prior art keywords: wirings; around; shaped; anew; sidewalls
Prior art date: 1987-06-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP15569587A

Other languages

English (en)

Other versions

JPH01746A (ja

Inventor

Mikio Ota

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Seiko Epson Corp

Original Assignee

Seiko Epson Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-06-23

Filing date

1987-06-23

Publication date

1989-01-05

1987-06-23 Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp

1987-06-23 Priority to JP15569587A priority Critical patent/JPS64746A/ja

1989-01-05 Publication of JPH01746A publication Critical patent/JPH01746A/ja

1989-01-05 Publication of JPS64746A publication Critical patent/JPS64746A/ja

Status Pending legal-status Critical Current

Links

238000000034 method Methods 0.000 title abstract 3
239000004020 conductor Substances 0.000 abstract 4
238000007493 shaping process Methods 0.000 abstract 2
238000013508 migration Methods 0.000 abstract 1
238000001259 photo etching Methods 0.000 abstract 1

Landscapes

Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

JP15569587A 1987-06-23 1987-06-23 Forming method of wiring Pending JPS64746A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP15569587A JPS64746A (en)	1987-06-23	1987-06-23	Forming method of wiring

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP15569587A JPS64746A (en)	1987-06-23	1987-06-23	Forming method of wiring

Publications (2)

Publication Number	Publication Date
JPH01746A JPH01746A (ja)	1989-01-05
JPS64746A true JPS64746A (en)	1989-01-05

Family

ID=15611512

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP15569587A Pending JPS64746A (en)	1987-06-23	1987-06-23	Forming method of wiring

Country Status (1)

Country	Link
JP (1)	JPS64746A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2003051546A (ja) *	2001-08-03	2003-02-21	Sony Corp	半導体装置及び半導体の製造方法

1987
- 1987-06-23 JP JP15569587A patent/JPS64746A/ja active Pending

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2003051546A (ja) *	2001-08-03	2003-02-21	Sony Corp	半導体装置及び半導体の製造方法

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