JPS64761A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number: JPS64761A
Authority: JP; Japan
Prior art keywords: side wall; gate electrode; metal; source; metal silicide
Prior art date: 1987-06-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP15569387A

Other languages

English (en)

Other versions

JPH01761A (ja

Inventor

Makio Goto

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Seiko Epson Corp

Original Assignee

Seiko Epson Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-06-23

Filing date

1987-06-23

Publication date

1989-01-05

1987-06-23 Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp

1987-06-23 Priority to JP15569387A priority Critical patent/JPS64761A/ja

1989-01-05 Publication of JPH01761A publication Critical patent/JPH01761A/ja

1989-01-05 Publication of JPS64761A publication Critical patent/JPS64761A/ja

Status Pending legal-status Critical Current

Links

239000004065 semiconductor Substances 0.000 title abstract 4
239000002184 metal Substances 0.000 abstract 5
FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical group [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 abstract 5
229910021332 silicide Inorganic materials 0.000 abstract 3
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 2
229910052593 corundum Inorganic materials 0.000 abstract 2
229910001845 yogo sapphire Inorganic materials 0.000 abstract 2
239000012535 impurity Substances 0.000 abstract 1
150000002500 ions Chemical class 0.000 abstract 1
239000000126 substance Substances 0.000 abstract 1
239000000758 substrate Substances 0.000 abstract 1

Landscapes

Electrodes Of Semiconductors (AREA)

JP15569387A 1987-06-23 1987-06-23 Semiconductor device Pending JPS64761A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP15569387A JPS64761A (en)	1987-06-23	1987-06-23	Semiconductor device

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP15569387A JPS64761A (en)	1987-06-23	1987-06-23	Semiconductor device

Publications (2)

Publication Number	Publication Date
JPH01761A JPH01761A (ja)	1989-01-05
JPS64761A true JPS64761A (en)	1989-01-05

Family

ID=15611476

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP15569387A Pending JPS64761A (en)	1987-06-23	1987-06-23	Semiconductor device

Country Status (1)

Country	Link
JP (1)	JPS64761A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5521411A (en) *	1991-12-31	1996-05-28	Sgs-Thomson Microelectronics, Inc.	Transistor spacer etch pinpoint structure
US5698883A (en) *	1989-10-09	1997-12-16	Kabushiki Kaisha Toshiba	MOS field effect transistor and method for manufacturing the same
US6724051B1 (en) *	2000-10-05	2004-04-20	Advanced Micro Devices, Inc.	Nickel silicide process using non-reactive spacer
US7428811B2 (en)	2003-11-26	2008-09-30	Isuzu Motors Limited	Torque converter

1987
- 1987-06-23 JP JP15569387A patent/JPS64761A/ja active Pending

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5698883A (en) *	1989-10-09	1997-12-16	Kabushiki Kaisha Toshiba	MOS field effect transistor and method for manufacturing the same
US5521411A (en) *	1991-12-31	1996-05-28	Sgs-Thomson Microelectronics, Inc.	Transistor spacer etch pinpoint structure
US6724051B1 (en) *	2000-10-05	2004-04-20	Advanced Micro Devices, Inc.	Nickel silicide process using non-reactive spacer
US7428811B2 (en)	2003-11-26	2008-09-30	Isuzu Motors Limited	Torque converter

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