JPS6480036A - Device for fixing material to be treated - Google Patents

Device for fixing material to be treated

Info

Publication number
JPS6480036A
JPS6480036A JP62236915A JP23691587A JPS6480036A JP S6480036 A JPS6480036 A JP S6480036A JP 62236915 A JP62236915 A JP 62236915A JP 23691587 A JP23691587 A JP 23691587A JP S6480036 A JPS6480036 A JP S6480036A
Authority
JP
Japan
Prior art keywords
reference piece
treated
movable reference
treating stage
sticking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62236915A
Other languages
Japanese (ja)
Other versions
JP2554894B2 (en
Inventor
Akira Iwase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP62236915A priority Critical patent/JP2554894B2/en
Publication of JPS6480036A publication Critical patent/JPS6480036A/en
Application granted granted Critical
Publication of JP2554894B2 publication Critical patent/JP2554894B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To set materials to be treated of various sizes on a treating stage, by establishing a spacing of a reference piece which holds a part nearby an edge part of each material to be treated by operating a drive device. CONSTITUTION:Both motors 15 are operated simultaneously so as to allow the position of a movable reference piece 12 to be in accord with the size of a material 5 to be treated and pole nuts 14 are moved by rotating both pole screws 13 to displace the movable reference piece 12. In such a case, as a pneumatic source is connected to slots 22 for sticking by vacuum suction at the lower face of the movable reference piece 12, the resultant action of its pneumatic force permits a fluid bearing to be formed between the movable reference piece 12 and a treating stage 1. The amount of movement of the movable reference piece 12, that is, its position is determined by an instruction value given to the motors 15 and it stops at a position determined according to the size of the material 5 to be treated. Then, the slots 22 for sticking by vacuum suction are connected to a vacuum source and then the material 5 to be treated is set out after making the movable reference piece 12 come closely into contact and also fixing to the upper face of the treating stage 1.
JP62236915A 1987-09-21 1987-09-21 Fixing device for processed material Expired - Fee Related JP2554894B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62236915A JP2554894B2 (en) 1987-09-21 1987-09-21 Fixing device for processed material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62236915A JP2554894B2 (en) 1987-09-21 1987-09-21 Fixing device for processed material

Publications (2)

Publication Number Publication Date
JPS6480036A true JPS6480036A (en) 1989-03-24
JP2554894B2 JP2554894B2 (en) 1996-11-20

Family

ID=17007637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62236915A Expired - Fee Related JP2554894B2 (en) 1987-09-21 1987-09-21 Fixing device for processed material

Country Status (1)

Country Link
JP (1) JP2554894B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001196303A (en) * 1999-12-03 2001-07-19 Asm Lithography Bv Lithograph projection device
JP2008142797A (en) * 2006-12-06 2008-06-26 Shinko Electric Ind Co Ltd Work positioning device
CN111722475A (en) * 2019-03-22 2020-09-29 上海微电子装备（集团）股份有限公司 Adjusting component and fine adjustment device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63186442A (en) * 1987-01-29 1988-08-02 Toshiba Corp Jig for work transfer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63186442A (en) * 1987-01-29 1988-08-02 Toshiba Corp Jig for work transfer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001196303A (en) * 1999-12-03 2001-07-19 Asm Lithography Bv Lithograph projection device
USRE41307E1 (en) 1999-12-03 2010-05-04 Asml Netherlands B.V. Mask for clamping apparatus, e.g. for a lithographic apparatus
JP2008142797A (en) * 2006-12-06 2008-06-26 Shinko Electric Ind Co Ltd Work positioning device
CN111722475A (en) * 2019-03-22 2020-09-29 上海微电子装备（集团）股份有限公司 Adjusting component and fine adjustment device
CN111722475B (en) * 2019-03-22 2021-11-23 上海微电子装备（集团）股份有限公司 Adjusting component and fine adjustment device

Also Published As

Publication number Publication date
JP2554894B2 (en) 1996-11-20

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Legal Events

Date Code Title Description
S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees