JPS6480041A - Semiconductor integrated circuit device - Google Patents

Semiconductor integrated circuit device

Info

Publication number
JPS6480041A
JPS6480041A JP62235901A JP23590187A JPS6480041A JP S6480041 A JPS6480041 A JP S6480041A JP 62235901 A JP62235901 A JP 62235901A JP 23590187 A JP23590187 A JP 23590187A JP S6480041 A JPS6480041 A JP S6480041A
Authority
JP
Japan
Prior art keywords
wiring
layer
aluminum wiring
integrated circuit
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62235901A
Other languages
Japanese (ja)
Other versions
JP2653444B2 (en
Inventor
Yasushi Takahashi
Nobumi Matsuura
Yoshihisa Koyama
Masaya Muranaka
Masataka Kimura
Kazuyuki Miyazawa
Masamichi Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Solutions Technology Ltd
Original Assignee
Hitachi ULSI Engineering Corp
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi ULSI Engineering Corp, Hitachi Ltd filed Critical Hitachi ULSI Engineering Corp
Priority to JP62235901A priority Critical patent/JP2653444B2/en
Priority to KR1019880011147A priority patent/KR0130776B1/en
Publication of JPS6480041A publication Critical patent/JPS6480041A/en
Priority to US07/616,705 priority patent/US5151772A/en
Application granted granted Critical
Publication of JP2653444B2 publication Critical patent/JP2653444B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE:To prevent the disconnection of aluminum wiring at the second layer in a part which is stepped because of aluminum wiring at the first layer, by causing the thickness of aluminum wiring at the first layer to be thinner than that of aluminum wiring at the second layer. CONSTITUTION:Aluminum wiring Al 1 at the first layer is mounted on a layer insulation film 3 and aluminum wiring Al 2 at the second layer is mounted on the layer insulation film 4. In such a case, this device allows the thickness of wiring Al 1 to be thinner than that of wiring of Al 2. Then, a stepped part which is caused by wiring Al 1 at the base surface of wiring Al 2 becomes small. Thus, this situation serves the purpose of improving the step coverage of wiring Al 2 at the stepped part and accordingly, preventing the disconnection of wiring Al 2 at the stepped part.
JP62235901A 1987-09-19 1987-09-19 Semiconductor integrated circuit device Expired - Lifetime JP2653444B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP62235901A JP2653444B2 (en) 1987-09-19 1987-09-19 Semiconductor integrated circuit device
KR1019880011147A KR0130776B1 (en) 1987-09-19 1988-08-31 Semiconductor integrated circuit device
US07/616,705 US5151772A (en) 1987-09-19 1990-11-20 Semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62235901A JP2653444B2 (en) 1987-09-19 1987-09-19 Semiconductor integrated circuit device

Publications (2)

Publication Number Publication Date
JPS6480041A true JPS6480041A (en) 1989-03-24
JP2653444B2 JP2653444B2 (en) 1997-09-17

Family

ID=16992913

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62235901A Expired - Lifetime JP2653444B2 (en) 1987-09-19 1987-09-19 Semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JP2653444B2 (en)

Also Published As

Publication number Publication date
JP2653444B2 (en) 1997-09-17

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