JPS6480072A - Manufacture of image senser integrating tft - Google Patents
Manufacture of image senser integrating tftInfo
- Publication number
- JPS6480072A JPS6480072A JP62237894A JP23789487A JPS6480072A JP S6480072 A JPS6480072 A JP S6480072A JP 62237894 A JP62237894 A JP 62237894A JP 23789487 A JP23789487 A JP 23789487A JP S6480072 A JPS6480072 A JP S6480072A
- Authority
- JP
- Japan
- Prior art keywords
- tft
- senser
- image senser
- patterned
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 239000010408 film Substances 0.000 abstract 3
- 239000010410 layer Substances 0.000 abstract 3
- 238000000034 method Methods 0.000 abstract 2
- 239000011229 interlayer Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Thin Film Transistor (AREA)
Abstract
PURPOSE:To perform a part of manufacturing process of image senser and TFT simultaneously while reducing the resistance of a gate electrode by a method wherein the shielding layer of an image senser and the gate electrode of a thin film transistor are formed simultaneously. CONSTITUTION:An active layer 2 is formed and patterned on a transparent insulating substrate 1 and then a gate oxide film 3 is formed. After forming the oxide film 3, the surface is channel-doped to VTH control a TFT and then Cr is deposited on overall surface to be patterned. At this time, shielding layers 4' of image senser part and a gate electrode 4 of the TFT are formed simultaneously. Later, a source.drain 5 is formed. Next, an interlayer insulating film 6 is formed to be patterned and etched away for making a contact hole. Finally, a metallic electrode 7 is formed and then senser forming process is performed to manufacture an image senser integrating TFT.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62237894A JPS6480072A (en) | 1987-09-21 | 1987-09-21 | Manufacture of image senser integrating tft |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62237894A JPS6480072A (en) | 1987-09-21 | 1987-09-21 | Manufacture of image senser integrating tft |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6480072A true JPS6480072A (en) | 1989-03-24 |
Family
ID=17022000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62237894A Pending JPS6480072A (en) | 1987-09-21 | 1987-09-21 | Manufacture of image senser integrating tft |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6480072A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6600172B1 (en) | 1999-11-26 | 2003-07-29 | Nec Corporation | Image sensor and method of fabricating the same |
| JP2013110291A (en) * | 2011-11-22 | 2013-06-06 | Japan Display Central Co Ltd | Thin film transistor circuit board and method of manufacturing the same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62171154A (en) * | 1986-01-24 | 1987-07-28 | Canon Inc | Photosensor |
-
1987
- 1987-09-21 JP JP62237894A patent/JPS6480072A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62171154A (en) * | 1986-01-24 | 1987-07-28 | Canon Inc | Photosensor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6600172B1 (en) | 1999-11-26 | 2003-07-29 | Nec Corporation | Image sensor and method of fabricating the same |
| JP2013110291A (en) * | 2011-11-22 | 2013-06-06 | Japan Display Central Co Ltd | Thin film transistor circuit board and method of manufacturing the same |
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