JPS6480076A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS6480076A JPS6480076A JP23682487A JP23682487A JPS6480076A JP S6480076 A JPS6480076 A JP S6480076A JP 23682487 A JP23682487 A JP 23682487A JP 23682487 A JP23682487 A JP 23682487A JP S6480076 A JPS6480076 A JP S6480076A
- Authority
- JP
- Japan
- Prior art keywords
- film
- deposited
- drain regions
- substrate
- intermediate insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 238000005530 etching Methods 0.000 abstract 3
- 239000000463 material Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 230000015556 catabolic process Effects 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Landscapes
- Insulated Gate Type Field-Effect Transistor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23682487A JPS6480076A (en) | 1987-09-21 | 1987-09-21 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23682487A JPS6480076A (en) | 1987-09-21 | 1987-09-21 | Manufacture of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6480076A true JPS6480076A (en) | 1989-03-24 |
Family
ID=17006327
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23682487A Pending JPS6480076A (en) | 1987-09-21 | 1987-09-21 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6480076A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008514019A (ja) * | 2004-09-21 | 2008-05-01 | フリースケール セミコンダクター インコーポレイテッド | 半導体デバイス及び同デバイスを形成する方法 |
-
1987
- 1987-09-21 JP JP23682487A patent/JPS6480076A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008514019A (ja) * | 2004-09-21 | 2008-05-01 | フリースケール セミコンダクター インコーポレイテッド | 半導体デバイス及び同デバイスを形成する方法 |
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