JPS6480896A - Instrument for measuring two-dimensional distribution of radiation - Google Patents

Instrument for measuring two-dimensional distribution of radiation

Info

Publication number
JPS6480896A
JPS6480896A JP62240186A JP24018687A JPS6480896A JP S6480896 A JPS6480896 A JP S6480896A JP 62240186 A JP62240186 A JP 62240186A JP 24018687 A JP24018687 A JP 24018687A JP S6480896 A JPS6480896 A JP S6480896A
Authority
JP
Japan
Prior art keywords
radiation
substrate
dimensional distribution
detecting element
areas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62240186A
Other languages
English (en)
Other versions
JPH0820519B2 (ja
Inventor
Susumu Adachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP62240186A priority Critical patent/JPH0820519B2/ja
Publication of JPS6480896A publication Critical patent/JPS6480896A/ja
Publication of JPH0820519B2 publication Critical patent/JPH0820519B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Radiation (AREA)
  • Light Receiving Elements (AREA)
JP62240186A 1987-09-24 1987-09-24 放射線２次元分布測定装置 Expired - Lifetime JPH0820519B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62240186A JPH0820519B2 (ja) 1987-09-24 1987-09-24 放射線２次元分布測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62240186A JPH0820519B2 (ja) 1987-09-24 1987-09-24 放射線２次元分布測定装置

Publications (2)

Publication Number Publication Date
JPS6480896A true JPS6480896A (en) 1989-03-27
JPH0820519B2 JPH0820519B2 (ja) 1996-03-04

Family

ID=17055744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62240186A Expired - Lifetime JPH0820519B2 (ja) 1987-09-24 1987-09-24 放射線２次元分布測定装置

Country Status (1)

Country Link
JP (1) JPH0820519B2 (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60218968A (ja) * 1984-04-16 1985-11-01 Canon Inc 光学的読取装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60218968A (ja) * 1984-04-16 1985-11-01 Canon Inc 光学的読取装置

Also Published As

Publication number Publication date
JPH0820519B2 (ja) 1996-03-04

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