JPS6483390A - Laser beam machine - Google Patents

Laser beam machine

Info

Publication number
JPS6483390A
JPS6483390A JP62239563A JP23956387A JPS6483390A JP S6483390 A JPS6483390 A JP S6483390A JP 62239563 A JP62239563 A JP 62239563A JP 23956387 A JP23956387 A JP 23956387A JP S6483390 A JPS6483390 A JP S6483390A
Authority
JP
Japan
Prior art keywords
working
laser light
fuse
worked
recognition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62239563A
Other languages
English (en)
Inventor
Naoto Sakagami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62239563A priority Critical patent/JPS6483390A/ja
Publication of JPS6483390A publication Critical patent/JPS6483390A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
JP62239563A 1987-09-24 1987-09-24 Laser beam machine Pending JPS6483390A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62239563A JPS6483390A (en) 1987-09-24 1987-09-24 Laser beam machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62239563A JPS6483390A (en) 1987-09-24 1987-09-24 Laser beam machine

Publications (1)

Publication Number Publication Date
JPS6483390A true JPS6483390A (en) 1989-03-29

Family

ID=17046661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62239563A Pending JPS6483390A (en) 1987-09-24 1987-09-24 Laser beam machine

Country Status (1)

Country Link
JP (1) JPS6483390A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03193284A (ja) * 1989-12-22 1991-08-23 Advantest Corp レーザ切断判定方法
JPH0563222A (ja) * 1991-09-03 1993-03-12 Sanyo Electric Co Ltd 光起電力装置の製造装置
US5763853A (en) * 1994-04-20 1998-06-09 Hitachi Construction Machinery Co., Ltd. Laser processing apparatus, laser processing method and dam bar processing method
JP2007309710A (ja) * 2006-05-17 2007-11-29 Enshu Ltd 微細周期性溝の観測方法とその観測装置、微細周期性溝の加工観測方法とその加工観測装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57137089A (en) * 1981-02-17 1982-08-24 Toshiba Corp Control method for welding state
JPS61286081A (ja) * 1985-06-13 1986-12-16 Toshiba Corp レ−ザ−溶接方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57137089A (en) * 1981-02-17 1982-08-24 Toshiba Corp Control method for welding state
JPS61286081A (ja) * 1985-06-13 1986-12-16 Toshiba Corp レ−ザ−溶接方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03193284A (ja) * 1989-12-22 1991-08-23 Advantest Corp レーザ切断判定方法
JPH0563222A (ja) * 1991-09-03 1993-03-12 Sanyo Electric Co Ltd 光起電力装置の製造装置
US5763853A (en) * 1994-04-20 1998-06-09 Hitachi Construction Machinery Co., Ltd. Laser processing apparatus, laser processing method and dam bar processing method
JP2007309710A (ja) * 2006-05-17 2007-11-29 Enshu Ltd 微細周期性溝の観測方法とその観測装置、微細周期性溝の加工観測方法とその加工観測装置

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