JPS6489340A - Method and apparatus for surface treatment - Google Patents

Method and apparatus for surface treatment

Info

Publication number: JPS6489340A
Authority: JP; Japan
Prior art keywords: film; sample; generated; oxide film; spontaneous oxide
Prior art date: 1987-09-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP24359787A

Other languages

English (en)

Other versions

JPH0719773B2 (ja

Inventor

Eiji Igawa

Hidekazu Okabayashi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

NEC Corp

Original Assignee

NEC Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-09-30

Filing date

1987-09-30

Publication date

1989-04-03

1987-09-30 Application filed by NEC Corp filed Critical NEC Corp

1987-09-30 Priority to JP24359787A priority Critical patent/JPH0719773B2/ja

1989-04-03 Publication of JPS6489340A publication Critical patent/JPS6489340A/ja

1995-03-06 Publication of JPH0719773B2 publication Critical patent/JPH0719773B2/ja

2010-03-06 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

238000000034 method Methods 0.000 title 1
238000004381 surface treatment Methods 0.000 title 1
230000002269 spontaneous effect Effects 0.000 abstract 3
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 2
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 2
229910052782 aluminium Inorganic materials 0.000 abstract 2
229910052799 carbon Inorganic materials 0.000 abstract 2
230000003647 oxidation Effects 0.000 abstract 2
238000007254 oxidation reaction Methods 0.000 abstract 2
229920000642 polymer Polymers 0.000 abstract 2
VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 abstract 2
AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 abstract 1
238000007599 discharging Methods 0.000 abstract 1
150000008282 halocarbons Chemical class 0.000 abstract 1
230000001681 protective effect Effects 0.000 abstract 1

Landscapes

Formation Of Insulating Films (AREA)
Local Oxidation Of Silicon (AREA)
Drying Of Semiconductors (AREA)
Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

JP24359787A 1987-09-30 1987-09-30 表面処理方法およびその装置 Expired - Lifetime JPH0719773B2 (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP24359787A JPH0719773B2 (ja)	1987-09-30	1987-09-30	表面処理方法およびその装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP24359787A JPH0719773B2 (ja)	1987-09-30	1987-09-30	表面処理方法およびその装置

Publications (2)

Publication Number	Publication Date
JPS6489340A true JPS6489340A (en)	1989-04-03
JPH0719773B2 JPH0719773B2 (ja)	1995-03-06

Family

ID=17106183

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP24359787A Expired - Lifetime JPH0719773B2 (ja)	1987-09-30	1987-09-30	表面処理方法およびその装置

Country Status (1)

Country	Link
JP (1)	JPH0719773B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH06169018A (ja) *	1992-11-30	1994-06-14	Nec Corp	半導体装置の製造方法

1987
- 1987-09-30 JP JP24359787A patent/JPH0719773B2/ja not_active Expired - Lifetime

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH06169018A (ja) *	1992-11-30	1994-06-14	Nec Corp	半導体装置の製造方法

Also Published As

Publication number	Publication date
JPH0719773B2 (ja)	1995-03-06

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