JPS6489364A - Manufacture of bipolar semiconductor integrated circuit device - Google Patents

Manufacture of bipolar semiconductor integrated circuit device

Info

Publication number: JPS6489364A
Authority: JP; Japan
Prior art keywords: layer; type; collector; emitter; oxide film
Prior art date: 1987-09-29
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP62244741A

Other languages

English (en)

Other versions

JPH061785B2 (ja

Inventor

Katsunori Tsuda

Shogo Kamiya

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Sharp Corp

Original Assignee

Sharp Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-09-29

Filing date

1987-09-29

Publication date

1989-04-03

1987-09-29 Application filed by Sharp Corp filed Critical Sharp Corp

1987-09-29 Priority to JP62244741A priority Critical patent/JPH061785B2/ja

1989-04-03 Publication of JPS6489364A publication Critical patent/JPS6489364A/ja

1994-01-05 Publication of JPH061785B2 publication Critical patent/JPH061785B2/ja

2009-01-05 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

239000004065 semiconductor Substances 0.000 title abstract 2
238000004519 manufacturing process Methods 0.000 title 1
150000004767 nitrides Chemical class 0.000 abstract 2
238000005530 etching Methods 0.000 abstract 1
238000002955 isolation Methods 0.000 abstract 1
230000000717 retained effect Effects 0.000 abstract 1
239000000758 substrate Substances 0.000 abstract 1

Landscapes

Bipolar Transistors (AREA)
Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

JP62244741A 1987-09-29 1987-09-29 バイポーラ型半導体集積回路装置の製造方法 Expired - Lifetime JPH061785B2 (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP62244741A JPH061785B2 (ja)	1987-09-29	1987-09-29	バイポーラ型半導体集積回路装置の製造方法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP62244741A JPH061785B2 (ja)	1987-09-29	1987-09-29	バイポーラ型半導体集積回路装置の製造方法

Publications (2)

Publication Number	Publication Date
JPS6489364A true JPS6489364A (en)	1989-04-03
JPH061785B2 JPH061785B2 (ja)	1994-01-05

Family

ID=17123201

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP62244741A Expired - Lifetime JPH061785B2 (ja)	1987-09-29	1987-09-29	バイポーラ型半導体集積回路装置の製造方法

Country Status (1)

Country	Link
JP (1)	JPH061785B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH03126228A (ja) *	1989-10-12	1991-05-29	Nec Corp	半導体集積回路装置の製造方法
US10080999B2 (en)	2014-01-17	2018-09-25	Ttp Labtech Ltd.	Sample vessel agitation apparatus and method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6021568A (ja) *	1983-07-15	1985-02-02	Hitachi Ltd	半導体装置の製造方法

1987
- 1987-09-29 JP JP62244741A patent/JPH061785B2/ja not_active Expired - Lifetime

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6021568A (ja) *	1983-07-15	1985-02-02	Hitachi Ltd	半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH03126228A (ja) *	1989-10-12	1991-05-29	Nec Corp	半導体集積回路装置の製造方法
US10080999B2 (en)	2014-01-17	2018-09-25	Ttp Labtech Ltd.	Sample vessel agitation apparatus and method

Also Published As

Publication number	Publication date
JPH061785B2 (ja)	1994-01-05

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Legal Events

Date

Code

Title

Description

2007-09-29

EXPY

Cancellation because of completion of term

2007-12-05

FPAY

Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080105

Year of fee payment: 14