JPWO2024252672A1 - - Google Patents

Info

Publication number
JPWO2024252672A1
JPWO2024252672A1 JP2025525915A JP2025525915A JPWO2024252672A1 JP WO2024252672 A1 JPWO2024252672 A1 JP WO2024252672A1 JP 2025525915 A JP2025525915 A JP 2025525915A JP 2025525915 A JP2025525915 A JP 2025525915A JP WO2024252672 A1 JPWO2024252672 A1 JP WO2024252672A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025525915A
Other versions
JPWO2024252672A5 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2024252672A1 publication Critical patent/JPWO2024252672A1/ja
Publication of JPWO2024252672A5 publication Critical patent/JPWO2024252672A5/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1921Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by substrate supports
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1922Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by the construction of the closed carrier
JP2025525915A 2023-06-09 2023-06-09 Pending JPWO2024252672A1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/021559 WO2024252672A1 (ja) 2023-06-09 2023-06-09 基板収納容器

Publications (2)

Publication Number Publication Date
JPWO2024252672A1 true JPWO2024252672A1 (ja) 2024-12-12
JPWO2024252672A5 JPWO2024252672A5 (ja) 2026-04-06

Family

ID=93795858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025525915A Pending JPWO2024252672A1 (ja) 2023-06-09 2023-06-09

Country Status (5)

Country Link
JP (1) JPWO2024252672A1 (ja)
KR (1) KR20260020094A (ja)
CN (1) CN121100400A (ja)
TW (1) TW202448781A (ja)
WO (1) WO2024252672A1 (ja)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH062272Y2 (ja) * 1988-02-25 1994-01-19 信越ポリマー株式会社 ウェーハ容器の上部緩衝板
JP3938293B2 (ja) * 2001-05-30 2007-06-27 信越ポリマー株式会社 精密基板収納容器及びその押さえ部材
JP5072067B2 (ja) * 2006-11-27 2012-11-14 信越ポリマー株式会社 基板収納容器
KR102354123B1 (ko) * 2017-04-05 2022-01-21 미라이얼 가부시키가이샤 기판 수납 용기

Also Published As

Publication number Publication date
TW202448781A (zh) 2024-12-16
WO2024252672A1 (ja) 2024-12-12
CN121100400A (zh) 2025-12-09
KR20260020094A (ko) 2026-02-10

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Legal Events

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A521 Request for written amendment filed

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Effective date: 20251202