KR101035552B1 - 솔라웨이퍼 카세트 - Google Patents

솔라웨이퍼 카세트 Download PDF

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Publication number
KR101035552B1
KR101035552B1 KR1020110026153A KR20110026153A KR101035552B1 KR 101035552 B1 KR101035552 B1 KR 101035552B1 KR 1020110026153 A KR1020110026153 A KR 1020110026153A KR 20110026153 A KR20110026153 A KR 20110026153A KR 101035552 B1 KR101035552 B1 KR 101035552B1
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KR
South Korea
Prior art keywords
assembly
wafer cassette
protrusion
solar wafer
pinhole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020110026153A
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English (en)
Korean (ko)
Inventor
이강성
천준환
Original Assignee
(주)상아프론테크
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Publication date
Application filed by (주)상아프론테크 filed Critical (주)상아프론테크
Priority to KR1020110026153A priority Critical patent/KR101035552B1/ko
Application granted granted Critical
Publication of KR101035552B1 publication Critical patent/KR101035552B1/ko
Priority to PCT/KR2012/000410 priority patent/WO2012128459A2/fr
Priority to JP2013558775A priority patent/JP5671160B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/12—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00—Individual photovoltaic cells, e.g. solar cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/13—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
KR1020110026153A 2011-03-24 2011-03-24 솔라웨이퍼 카세트 Active KR101035552B1 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020110026153A KR101035552B1 (ko) 2011-03-24 2011-03-24 솔라웨이퍼 카세트
PCT/KR2012/000410 WO2012128459A2 (fr) 2011-03-24 2012-01-18 Cassette de plaquettes solaires
JP2013558775A JP5671160B2 (ja) 2011-03-24 2012-01-18 太陽電池ウェーハカセット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020110026153A KR101035552B1 (ko) 2011-03-24 2011-03-24 솔라웨이퍼 카세트

Publications (1)

Publication Number Publication Date
KR101035552B1 true KR101035552B1 (ko) 2011-05-23

Family

ID=44366278

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110026153A Active KR101035552B1 (ko) 2011-03-24 2011-03-24 솔라웨이퍼 카세트

Country Status (3)

Country Link
JP (1) JP5671160B2 (fr)
KR (1) KR101035552B1 (fr)
WO (1) WO2012128459A2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012174432A3 (fr) * 2011-06-15 2013-05-23 Entegris, Inc. Support de traitement de cellules solaires
KR20190052296A (ko) * 2017-11-08 2019-05-16 주식회사 월덱스 상압소결 실리콘 카바이드 웨이퍼 캐리어 및 결합구조와 그 결합방법
CN110444497A (zh) * 2019-08-12 2019-11-12 常州皓晟精密机械有限公司 一种太阳能光伏电池片、硅片承载盒

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104368560A (zh) * 2014-11-05 2015-02-25 东晶锐康晶体（成都）有限公司 一种大片晶片提篮
KR101564605B1 (ko) 2015-01-22 2015-11-02 (주)상아프론테크 웨이퍼 보관용 카세트
US9972740B2 (en) 2015-06-07 2018-05-15 Tesla, Inc. Chemical vapor deposition tool and process for fabrication of photovoltaic structures
US9748434B1 (en) 2016-05-24 2017-08-29 Tesla, Inc. Systems, method and apparatus for curing conductive paste
US9954136B2 (en) 2016-08-03 2018-04-24 Tesla, Inc. Cassette optimized for an inline annealing system
US10115856B2 (en) 2016-10-31 2018-10-30 Tesla, Inc. System and method for curing conductive paste using induction heating
DE102017204910B4 (de) * 2017-03-23 2018-10-04 Singulus Technologies Ag Trägerkassette und Trägerkassettenstapel
CN112151428B (zh) * 2020-09-28 2024-11-01 北京市塑料研究所 硅片承载装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08107080A (ja) * 1994-09-30 1996-04-23 Toshiba Ceramics Co Ltd 縦型ウェ−ハボ−ト
JP2004134800A (ja) 2002-10-09 2004-04-30 Foxsemicon Intergated Technology Inc 基板支持用スロット棒および基板用カセット
JP2007324219A (ja) 2006-05-30 2007-12-13 Covalent Materials Corp 縦型ウエハボート
KR20100106132A (ko) * 2009-03-23 2010-10-01 엠파워(주) 웨이퍼 케리어

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07115123A (ja) * 1993-10-15 1995-05-02 Micro Gijutsu Kenkyusho:Kk 基板収納用ラック
JPH09213645A (ja) * 1996-01-29 1997-08-15 Sumitomo Sitix Corp ウェーハ支持装置及びその製造方法
JPH09293685A (ja) * 1996-02-28 1997-11-11 Asahi Glass Co Ltd 縦型ウエハボート
JPH09266177A (ja) * 1996-03-28 1997-10-07 Tekunisuko:Kk ウェーハボート
JP3479201B2 (ja) * 1997-03-28 2003-12-15 東芝セラミックス株式会社 組立式ウエハ用ボート及びその取付治具
US6056123A (en) * 1997-12-10 2000-05-02 Novus Corporation Semiconductor wafer carrier having the same composition as the wafers
JP3798136B2 (ja) * 1997-12-24 2006-07-19 信越石英株式会社 基盤熱処理用支持治具
JP2000040667A (ja) * 1998-07-21 2000-02-08 Toshiba Ceramics Co Ltd ウエハボート
JP3544481B2 (ja) * 1998-11-25 2004-07-21 東芝セラミックス株式会社 半導体製造用炭化珪素質組立ウェーハボート
JP4328468B2 (ja) * 1999-04-15 2009-09-09 インテグレイティッド マテリアルズ インク ウェーハ処理用シリコン固定具の製造方法
JP2000323423A (ja) * 1999-05-13 2000-11-24 Kokusai Electric Co Ltd ウェハ保持用ボート
US6378538B1 (en) * 1999-12-13 2002-04-30 Advanced Micro Devices, Inc. Durable, multi-piece rotor for spray acid tools
KR100410982B1 (ko) * 2001-01-18 2003-12-18 삼성전자주식회사 반도체 제조장치용 보트
US6811040B2 (en) * 2001-07-16 2004-11-02 Rohm And Haas Company Wafer holding apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08107080A (ja) * 1994-09-30 1996-04-23 Toshiba Ceramics Co Ltd 縦型ウェ−ハボ−ト
JP2004134800A (ja) 2002-10-09 2004-04-30 Foxsemicon Intergated Technology Inc 基板支持用スロット棒および基板用カセット
JP2007324219A (ja) 2006-05-30 2007-12-13 Covalent Materials Corp 縦型ウエハボート
KR20100106132A (ko) * 2009-03-23 2010-10-01 엠파워(주) 웨이퍼 케리어

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012174432A3 (fr) * 2011-06-15 2013-05-23 Entegris, Inc. Support de traitement de cellules solaires
KR20190052296A (ko) * 2017-11-08 2019-05-16 주식회사 월덱스 상압소결 실리콘 카바이드 웨이퍼 캐리어 및 결합구조와 그 결합방법
KR102038750B1 (ko) 2017-11-08 2019-11-26 주식회사 월덱스 상압소결 실리콘 카바이드 웨이퍼 캐리어 및 결합구조와 그 결합방법
CN110444497A (zh) * 2019-08-12 2019-11-12 常州皓晟精密机械有限公司 一种太阳能光伏电池片、硅片承载盒
CN110444497B (zh) * 2019-08-12 2021-08-20 常州皓晟精密机械有限公司 一种太阳能光伏电池片、硅片承载盒

Also Published As

Publication number Publication date
WO2012128459A3 (fr) 2012-11-15
JP2014509788A (ja) 2014-04-21
WO2012128459A2 (fr) 2012-09-27
JP5671160B2 (ja) 2015-02-18

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