WO2012128459A2 - Cassette de plaquettes solaires - Google Patents
Cassette de plaquettes solaires Download PDFInfo
- Publication number
- WO2012128459A2 WO2012128459A2 PCT/KR2012/000410 KR2012000410W WO2012128459A2 WO 2012128459 A2 WO2012128459 A2 WO 2012128459A2 KR 2012000410 W KR2012000410 W KR 2012000410W WO 2012128459 A2 WO2012128459 A2 WO 2012128459A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- assembly
- wafer cassette
- protrusion
- pinhole
- solar wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/12—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/13—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Definitions
- the present invention relates to the field of solar wafer cassettes.
- the structure of removing the edge portion by the fastening hole, the tool insertion groove, etc. that existed on the outer surface of the end plate prevents a phenomenon in which foreign substances are generated while the upper surface of the pedestal is cut by the edge portion of the end plate. It is related to a solar wafer cassette.
- the solar wafer cassette is a protective device for protecting the solar wafer from disturbance.
- FIG. 1 is a perspective view showing the configuration of a conventional solar wafer cassette.
- the conventional solar wafer cassette 1 includes a pair of end plates 3 disposed to face each other at a predetermined interval, and the pair of end plates 3 are provided.
- a plurality of support bars 5 are arranged horizontally between end portions thereof, which are assembled to the end plate 3 to support side and bottom surfaces of the solar wafer w.
- FIG. 3 and 4 are cross-sectional views of FIG. 2, in particular, FIG. 3 is a cross-sectional view before assembly, and FIG. 4 is a cross-sectional view after assembly.
- the end plate 3 is formed with a stepped fastening hole 30, and the support Both ends of the bar (5) is composed of a tanned bolt 50, and the fastening cap 6 is fastened to the tanned bolt 50 is configured.
- the tanning bolt 50 of the support bar 5 is inserted from the inside of the end plate 3 toward the fastening hole 30, and the outside of the end plate 3 (
- the tanned bolt 50 and the fastening cap 6 are assembled by screwing each other to have a shape as shown in FIG. 3.
- the present invention has been made to solve the conventional problems as described above, the main object of the present invention, by smoothly improving the outer surface by removing the fastening hole and the tool insertion groove that existed on the outer surface of the end plate.
- the present invention provides a solar wafer cassette capable of solving a problem in which foreign matter occurs even when the outer surface and the base are rubbed.
- Another object of the present invention is to provide a solar wafer cassette which improves the coupling structure between the end plate and the support bar in parallel with the smooth improvement of the outer surface of the end plate.
- the solar wafer cassette according to the present invention the first end, the second end plate, the first end and the second end plate, which are arranged to face at a predetermined interval between the first and second end plate is fixedly installed
- a solar wafer cassette comprising a plurality of support bars supporting side and bottom surfaces of a plurality of solar wafers to be accommodated, the assembly slots for assembling the respective support bars on an inner surface of at least one of the first and second end plates. Is formed, the entrance and exit openings and guide openings are formed on the outside and the inside of the assembly slot, respectively, the engaging jaw is formed on the inner edge of the guide opening, the end of the entry slot corresponding to the assembly slot of each support bar Stepped assembly block is inserted into the assembly slot through the opening.
- a semi-circular first pinhole is formed at at least one end of the upper and lower ends of the entry and exit side of the locking jaw, and the first and second pinholes of the assembly block face the first pinhole.
- a semicircular second pinhole is formed to be symmetrical with the first pinhole, and a hook-type fixing pin is press-fitted into the first and second pinholes so that the assembly block is fixed to the assembly slot.
- the support bar of the solar wafer cassette according to the present invention is composed of a core material and a surface covering the surface of the core material, at least one end of the core material is formed in the shaft diameter portion smaller than the other parts, the assembly
- the block has a shaft hole into which the shaft diameter portion of the core is inserted, and a first protrusion and a second protrusion are formed at inner and outer ends of the surface, respectively, between the first protrusion and the second protrusion.
- a recess corresponding to the locking jaw is formed, and the first protrusion is covered by the surface material.
- the solar wafer cassette according to the present invention the first end, the second end plate, the first end and the second end plate, which are disposed to face at a predetermined interval between the first and second end plate is fixedly installed between A solar wafer cassette comprising a plurality of support bars supporting side and bottom surfaces of a plurality of solar wafers to be accommodated, wherein the assembly slots for assembling the respective support bars on an inner surface of at least one of the first and second end plates.
- the entrance and exit opening and guide opening is formed on the outside and inside of the assembly slot, respectively, the end of the guide opening is formed with a locking jaw, the end corresponding to the assembly slot of each of the supporting bar the assembly slot It has a short length compared to the stepped assembly block is provided into the assembly slot through the entry and exit opening, A stepped closing block is inserted into the entry and exit opening to close the entry and exit opening.
- a semi-circular first pinhole is formed at at least one end of an upper and lower end of an entrance opening side of the locking jaw, and the first pinhole is formed at an end facing the first pinhole of the closing block.
- a semi-circular second pinhole is formed to be symmetrical with a hook-type fixing pin is pressed into the first and second pinholes so that the closing block is fixed to the assembly slot.
- the support bar of the solar wafer cassette is composed of a core material and a surface covering the surface of the core material, wherein at least one end of the core material is formed with a shaft diameter smaller in diameter than other parts, and the assembly block is And a shaft hole into which the shaft diameter portion of the core is inserted in a central portion thereof, and a first protrusion and a second protrusion are respectively formed at inner and outer ends of the surface, and the locking portion is disposed between the first protrusion and the second protrusion.
- a recess corresponding to the jaw is formed, and the first protrusion is covered by the surface material.
- the present invention there is no loosening phenomenon of the fastening cap by removing the fastening cap of the screw fastening method that was an existing component, and furthermore, as the fastening cap loosening phenomenon is eliminated, it is possible to strengthen the coupling force between the end plate and the support bar.
- the present invention the assembling structure of the end plate and the support bar is simple, it is possible to reduce the assembly labor and dismantling labor.
- FIG. 1 is a perspective view of an example of a conventional solar wafer cassette.
- FIG. 2 is a perspective view when moving the conventional solar wafer cassette.
- FIG. 3 is a cross-sectional view of FIG. 2, in particular, before assembly of the support bar and the end plate.
- FIG. 4 is a cross-sectional view after assembly of FIG. 2.
- FIG. 5 is a perspective view of main parts of a solar wafer cassette according to the present invention.
- FIG. 6 is a view showing the integration process of the support bar and the assembly block in the solar wafer cassette according to the present invention.
- FIG. 7 is a configuration diagram of a horizontal wafer assembly block in the solar wafer cassette according to the present invention.
- FIG. 8A is a cross-sectional view taken along the line of FIG. 5, showing a state before assembly of the support bar and the closing block for the end plate.
- FIG. 8A is a cross-sectional view taken along the line of FIG. 5, showing a state before assembly of the support bar and the closing block for the end plate.
- FIG. 8B is a cross-sectional view taken along the line of FIG. 5, in which the support bar is assembled to the end plate.
- FIG. 8C is a cross-sectional view taken along the line of FIG. 5, in which the support bar and the closing block are assembled to the end plate.
- FIG. 9 is a perspective view showing another embodiment of a solar wafer cassette according to the present invention.
- assembly slot 111a entrance and exit opening
- first pinhole 120 second end plate
- first protrusion 143 second protrusion
- FIG. 5 is a perspective view of a solar wafer cassette according to the present invention, in which the assembly structure of the present invention is applied to only one side.
- the solar wafer cassette 100 of the present invention includes first and second end plates 110 and 120 (second end plate is shown in FIG. 9) in the form of a square panel facing each other at a predetermined interval. It is composed of a plurality of (6) support bars 130 for supporting the side and bottom of a plurality of solar wafers (not shown) that are received between the first and second end plates (110, 120). This configuration is the same as before.
- the present invention based on this configuration has smoothly improved the outer surface of at least one of the first and second end plates 110 and 120 described above, and the end plate and the support bar 130 in accordance with the improved shape of the end plate.
- the joint structure of liver was also improved in parallel.
- first end plate for convenience
- the assembly slot 111 is configured to be inserted into the assembly block 140 provided at one end of the support bar 130.
- the number of the assembly slot 111 should also be composed of a total of six.
- the arrangement positions of the assembly slots 111 are disposed at each of the two end portions of the first end plate 110, respectively, and two are arranged at the bottom thereof to constitute a total of six.
- the assembling slot 111 is provided with an opening and closing opening 111a and a guide opening 111b on the outer side (the edge direction of the end plate) and the inner side (the inner surface direction of the end plate).
- a locking step 111c is formed at an inner edge of the guide opening 111b (an edge located in the inner surface direction of the end plate). The locking step 111c prevents the assembly block 140 introduced into the assembly slot 111 from being separated into the first end plate 110.
- the assembly block 140 may be integrally installed at any one end (one end) of the support bar 130 as shown in FIG.
- the assembly block 140 may have a structure of the support bar 130 and the assembly block 140 to be integrally installed on the support bar 130 as follows.
- the support bar 130 is composed of a core material 131, and a surface material 132 to cover the surface of the core material 131, at least one end of the core material 131 is another part
- the shaft diameter portion 131a having a smaller diameter is formed.
- the assembly block 140 has a shaft hole 141 is bored so that the shaft diameter portion 131a of the core material 131 can be inserted into the central portion thereof.
- a first protrusion 142 is formed at an inner end of the surface
- a second protrusion 143 is formed at an outer end of the surface
- the assembly is formed between the first protrusion 142 and the second protrusion 143.
- a recess 144 corresponding to the locking step 111c of the slot 111 is formed.
- the first protrusion 142 is coated by the top surface 132 and coated when the top surface 132 is injected.
- the assembly block 140 is integrated with the support bar 130.
- the assembly block 140 may be forcibly fitted into the assembly slot 111, but for more stable assembling, in the case of a horizontal type ( ⁇ ⁇ ⁇ ) as shown in Figure 7, the opening and closing opening of the locking step (111c)
- a semicircular first pinhole 111d is formed at at least one end of the upper or lower side of the side, and is symmetrical with the first pinhole 111d at an end portion facing the first pinhole 111d of the assembly block 140.
- the semicircular second pinhole 145 is formed, and the assembly type block 140 is formed by pressing the hook-type fixing pin 150 into the circular pinholes formed by the first and second pinholes 111d and 145. It was to be firmly fixed to this assembly slot (111).
- the assembly block 140 when the assembly block 140 is a transverse ( ⁇ ⁇ ⁇ ) as shown in Figure 5 may be additionally installed a closing block (160). That is, as shown in Figures 8a to 8c, the transverse length of the cross-type assembly block 140 is shorter than the length of the assembly slot 111, so that an empty space occurs to the entrance and exit opening side of the assembly slot 111, By inserting the closing block 160 in this space it can be prevented that the assembly block 111 is separated from the entrance and exit opening (111a).
- the closing block 160 may be forcibly fitted into the assembly slot 111, but as shown in FIG. 5 for more stable assembling, the upper or lower end of the entrance / exit opening 111a side of the locking step 111c.
- a semicircular second semicircular shape formed at least at one end and having a semicircular first pinhole 111d and symmetrical with the first pinhole 111d at an end portion facing the first pinhole 111d of the closing block 160.
- the support bar 130 and the closing block 160 for assembling to the first end plate 110 are prepared.
- the closing block 160 is inserted into the rear of the already assembled assembly block 111, that is, the entrance / exit opening 111b side of the assembly slot 111. Then, the first pinhole 111d formed in the assembly slot 111 and the second pinhole 161 formed in the closing block 160 are combined to provide a circular pinhole.
- FIG. 9 is a perspective view showing another embodiment of a solar wafer cassette according to the present invention.
- the solar wafer cassette 100 of FIG. 9 smoothly improves the outer surfaces of both the first and second end plates 110 and 120, and fits each end to the improved shape of the first and second end plates 110 and 120.
- the coupling structure between the plates 110 and 120 and the support bar 130 is also improved in parallel.
- the coupling structure and the coupling process between the end plates 110 and 120 and the support bar 130 are the same as in FIG.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Abstract
La présente invention a trait à une cassette de plaquettes solaires. La cassette de plaquettes solaires inclut : des première et seconde plaques d'extrémité qui sont disposées de manière à être en face l'une de l'autre, une distance prédéterminée étant fixée entre ces dernières ; et une pluralité de barres de support qui sont disposées de façon fixe sur les deux extrémités des première et seconde plaques d'extrémité de manière à supporter les surfaces latérales et les surfaces inférieures de la pluralité de plaquettes solaires qui sont reçues entre les première et seconde plaques d'extrémité. Une fente d'assemblage (111) permettant d'assembler chacune des barres de support (130) est formée dans une surface intérieure d'au moins une plaque d'extrémité parmi les première et seconde plaques d'extrémité (110, 120). De même, une ouverture d'accès (111a) et une ouverture de guidage (111b) sont formées dans la partie extérieure et dans la partie intérieure de la fente d'assemblage (111), respectivement. Un crochet (111c) est disposé sur un bord intérieur de l'ouverture de guidage (111b). Un bloc d'assemblage de type étagé (140) inséré dans la fente d'assemblage (111) à travers l'ouverture d'accès (111a) est disposé sur une extrémité correspondant à la fente d'assemblage (111) de chacune des barres de support (130).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013558775A JP5671160B2 (ja) | 2011-03-24 | 2012-01-18 | 太陽電池ウェーハカセット |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020110026153A KR101035552B1 (ko) | 2011-03-24 | 2011-03-24 | 솔라웨이퍼 카세트 |
| KR10-2011-0026153 | 2011-03-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO2012128459A2 true WO2012128459A2 (fr) | 2012-09-27 |
| WO2012128459A3 WO2012128459A3 (fr) | 2012-11-15 |
Family
ID=44366278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/KR2012/000410 Ceased WO2012128459A2 (fr) | 2011-03-24 | 2012-01-18 | Cassette de plaquettes solaires |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5671160B2 (fr) |
| KR (1) | KR101035552B1 (fr) |
| WO (1) | WO2012128459A2 (fr) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9748434B1 (en) | 2016-05-24 | 2017-08-29 | Tesla, Inc. | Systems, method and apparatus for curing conductive paste |
| US9954136B2 (en) | 2016-08-03 | 2018-04-24 | Tesla, Inc. | Cassette optimized for an inline annealing system |
| US9972740B2 (en) | 2015-06-07 | 2018-05-15 | Tesla, Inc. | Chemical vapor deposition tool and process for fabrication of photovoltaic structures |
| DE102017204910A1 (de) * | 2017-03-23 | 2018-09-27 | Singulus Technologies Ag | Trägerkassette und Trägerkassettenstapel |
| US10115856B2 (en) | 2016-10-31 | 2018-10-30 | Tesla, Inc. | System and method for curing conductive paste using induction heating |
| CN112151428A (zh) * | 2020-09-28 | 2020-12-29 | 北京市塑料研究所 | 硅片承载装置 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201305030A (zh) * | 2011-06-15 | 2013-02-01 | 安堤格里斯公司 | 太陽能電池製程載具 |
| CN104368560A (zh) * | 2014-11-05 | 2015-02-25 | 东晶锐康晶体(成都)有限公司 | 一种大片晶片提篮 |
| KR101564605B1 (ko) | 2015-01-22 | 2015-11-02 | (주)상아프론테크 | 웨이퍼 보관용 카세트 |
| KR102038750B1 (ko) * | 2017-11-08 | 2019-11-26 | 주식회사 월덱스 | 상압소결 실리콘 카바이드 웨이퍼 캐리어 및 결합구조와 그 결합방법 |
| CN110444497B (zh) * | 2019-08-12 | 2021-08-20 | 常州皓晟精密机械有限公司 | 一种太阳能光伏电池片、硅片承载盒 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH07115123A (ja) * | 1993-10-15 | 1995-05-02 | Micro Gijutsu Kenkyusho:Kk | 基板収納用ラック |
| JP3125968B2 (ja) * | 1994-09-30 | 2001-01-22 | 東芝セラミックス株式会社 | 縦型ウェ−ハボ−ト |
| JPH09213645A (ja) * | 1996-01-29 | 1997-08-15 | Sumitomo Sitix Corp | ウェーハ支持装置及びその製造方法 |
| JPH09293685A (ja) * | 1996-02-28 | 1997-11-11 | Asahi Glass Co Ltd | 縦型ウエハボート |
| JPH09266177A (ja) * | 1996-03-28 | 1997-10-07 | Tekunisuko:Kk | ウェーハボート |
| JP3479201B2 (ja) * | 1997-03-28 | 2003-12-15 | 東芝セラミックス株式会社 | 組立式ウエハ用ボート及びその取付治具 |
| US6056123A (en) * | 1997-12-10 | 2000-05-02 | Novus Corporation | Semiconductor wafer carrier having the same composition as the wafers |
| JP3798136B2 (ja) * | 1997-12-24 | 2006-07-19 | 信越石英株式会社 | 基盤熱処理用支持治具 |
| JP2000040667A (ja) * | 1998-07-21 | 2000-02-08 | Toshiba Ceramics Co Ltd | ウエハボート |
| JP3544481B2 (ja) * | 1998-11-25 | 2004-07-21 | 東芝セラミックス株式会社 | 半導体製造用炭化珪素質組立ウェーハボート |
| JP4328468B2 (ja) * | 1999-04-15 | 2009-09-09 | インテグレイティッド マテリアルズ インク | ウェーハ処理用シリコン固定具の製造方法 |
| JP2000323423A (ja) * | 1999-05-13 | 2000-11-24 | Kokusai Electric Co Ltd | ウェハ保持用ボート |
| US6378538B1 (en) * | 1999-12-13 | 2002-04-30 | Advanced Micro Devices, Inc. | Durable, multi-piece rotor for spray acid tools |
| KR100410982B1 (ko) * | 2001-01-18 | 2003-12-18 | 삼성전자주식회사 | 반도체 제조장치용 보트 |
| US6811040B2 (en) * | 2001-07-16 | 2004-11-02 | Rohm And Haas Company | Wafer holding apparatus |
| TW542218U (en) | 2002-10-09 | 2003-07-11 | Foxsemicon Intergated Technolo | Substrate supporting rod and substrate cassette using the same |
| JP4428714B2 (ja) | 2006-05-30 | 2010-03-10 | コバレントマテリアル株式会社 | 縦型ウエハボート |
| KR101124379B1 (ko) * | 2009-03-23 | 2012-03-15 | 엠파워(주) | 웨이퍼 케리어 |
-
2011
- 2011-03-24 KR KR1020110026153A patent/KR101035552B1/ko active Active
-
2012
- 2012-01-18 JP JP2013558775A patent/JP5671160B2/ja active Active
- 2012-01-18 WO PCT/KR2012/000410 patent/WO2012128459A2/fr not_active Ceased
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9972740B2 (en) | 2015-06-07 | 2018-05-15 | Tesla, Inc. | Chemical vapor deposition tool and process for fabrication of photovoltaic structures |
| US9748434B1 (en) | 2016-05-24 | 2017-08-29 | Tesla, Inc. | Systems, method and apparatus for curing conductive paste |
| US10074765B2 (en) | 2016-05-24 | 2018-09-11 | Tesla, Inc. | Systems, method and apparatus for curing conductive paste |
| US9954136B2 (en) | 2016-08-03 | 2018-04-24 | Tesla, Inc. | Cassette optimized for an inline annealing system |
| US10115856B2 (en) | 2016-10-31 | 2018-10-30 | Tesla, Inc. | System and method for curing conductive paste using induction heating |
| DE102017204910A1 (de) * | 2017-03-23 | 2018-09-27 | Singulus Technologies Ag | Trägerkassette und Trägerkassettenstapel |
| DE102017204910B4 (de) | 2017-03-23 | 2018-10-04 | Singulus Technologies Ag | Trägerkassette und Trägerkassettenstapel |
| CN112151428A (zh) * | 2020-09-28 | 2020-12-29 | 北京市塑料研究所 | 硅片承载装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2012128459A3 (fr) | 2012-11-15 |
| JP2014509788A (ja) | 2014-04-21 |
| JP5671160B2 (ja) | 2015-02-18 |
| KR101035552B1 (ko) | 2011-05-23 |
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