KR20090107564A - 패키지의 제조 방법, 패키지, 광 모듈 및 일체 성형용 금형 - Google Patents
패키지의 제조 방법, 패키지, 광 모듈 및 일체 성형용 금형 Download PDFInfo
- Publication number
- KR20090107564A KR20090107564A KR1020097018484A KR20097018484A KR20090107564A KR 20090107564 A KR20090107564 A KR 20090107564A KR 1020097018484 A KR1020097018484 A KR 1020097018484A KR 20097018484 A KR20097018484 A KR 20097018484A KR 20090107564 A KR20090107564 A KR 20090107564A
- Authority
- KR
- South Korea
- Prior art keywords
- package
- optical
- optical element
- lead frame
- mounting surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4202—Packages, e.g. shape, construction, internal or external details for coupling an active element with fibres without intermediate optical elements, e.g. fibres with plane ends, fibres with shaped ends, bundles
- G02B6/4203—Optical features
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/023—Mount members, e.g. sub-mount members
- H01S5/02325—Mechanically integrated components on mount members or optical micro-benches
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04M—TELEPHONIC COMMUNICATION
- H04M1/00—Substation equipment, e.g. for use by subscribers
- H04M1/02—Constructional features of telephone sets
- H04M1/0202—Portable telephone sets, e.g. cordless phones, mobile phones or bar type handsets
- H04M1/026—Details of the structure or mounting of specific components
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/50—Encapsulations or containers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/01—Manufacture or treatment
- H10W74/016—Manufacture or treatment using moulds
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Signal Processing (AREA)
- Optical Couplings Of Light Guides (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Abstract
Description
Claims (9)
- 광 전송로에 있어서의 광 신호의 입출사구를 포함하는 적어도 한쪽의 단부를 지지하는 지지부와, 광학 소자를 실장하는 리드 프레임을 갖는 패키지의 제조 방법이며,상기 지지부를 형성하는 오목부와, 리드 프레임에 있어서의 광학 소자 탑재면에 접촉하는 제1 볼록부와, 상기 광학 소자 탑재면의 이면과 접촉하는 제2 볼록부를 갖는 금형 내에, 리드 프레임을 세트하고,상기 금형에 수지를 충전하여, 패키지를 일체 성형하는 일체 성형 공정을 포함하는 것을 특징으로 하는, 패키지의 제조 방법.
- 제1항에 있어서, 상기 일체 성형 공정에서는, 상기 제2 볼록부의 상기 이면과의 접촉 면적이 상기 제1 볼록부의 상기 광학 소자 탑재면과의 접촉 면적보다도 작아진 금형을 이용하고 있는 것을 특징으로 하는, 패키지의 제조 방법.
- 제2항에 있어서, 상기 일체 성형 공정에서는, 상기 제2 볼록부가 테이퍼 형상으로 된 금형을 이용하고 있는 것을 특징으로 하는, 패키지의 제조 방법.
- 제1항 내지 제3항 중 어느 한 항에 있어서, 상기 일체 성형 공정 후에, 상기 제2 볼록부에 의해 형성된 상기 광학 소자 탑재면의 이면측의 개구부를, 수지로 메 우는 수지 매입 공정을 포함하는 것을 특징으로 하는, 패키지의 제조 방법.
- 제1항 내지 제3항 중 어느 한 항에 있어서, 상기 일체 성형 공정 후에, 상기 제2 볼록부에 의해 형성된 상기 광학 소자 탑재면의 이면측의 개구부에 도금 처리를 실시하는 도금 공정을 포함하는 것을 특징으로 하는, 패키지의 제조 방법.
- 제1항 내지 제5항 중 어느 한 항에 기재된 패키지의 제조 방법으로 제조된, 패키지.
- 제6항에 기재된 패키지에 광학 소자 및 광 전송로가 탑재된 것을 특징으로 하는, 광 모듈.
- 제7항에 있어서, 상기 개구부가 검사용 단자인 것을 특징으로 하는, 광 모듈.
- 광 전송로에 있어서의 광 신호의 입출사구를 포함하는 적어도 한쪽의 단부를 지지하는 지지부와, 광학 소자를 실장하는 리드 프레임을 갖는 패키지를 제조하기 위한 일체 성형용 금형이며,상기 지지부를 형성하는 오목부와, 리드 프레임에 있어서의 광학 소자 탑재면에 접촉하는 제1 볼록부와, 상기 광학 소자 탑재면의 이면과 접촉하는 제2 볼록 부를 갖는 것을 특징으로 하는, 일체 성형용 금형.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2007-061044 | 2007-03-09 | ||
| JP2007061044 | 2007-03-09 | ||
| PCT/JP2008/054188 WO2008111524A1 (ja) | 2007-03-09 | 2008-03-07 | パッケージの製造方法、パッケージ、光モジュール、及び一体成型用金型 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20090107564A true KR20090107564A (ko) | 2009-10-13 |
| KR101078518B1 KR101078518B1 (ko) | 2011-10-31 |
Family
ID=39759462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020097018484A Expired - Fee Related KR101078518B1 (ko) | 2007-03-09 | 2008-03-07 | 패키지의 제조 방법, 패키지, 광 모듈 및 일체 성형용 금형 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8218917B2 (ko) |
| EP (1) | EP2124252A4 (ko) |
| JP (1) | JP5170080B2 (ko) |
| KR (1) | KR101078518B1 (ko) |
| CN (1) | CN101627466B (ko) |
| WO (1) | WO2008111524A1 (ko) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8218917B2 (en) * | 2007-03-09 | 2012-07-10 | Omron Corporation | Package manufacturing method, package, optical module and die for integral molding |
| CN102057306A (zh) * | 2008-06-10 | 2011-05-11 | 住友电木株式会社 | 电子设备、便携电话机、挠性电缆、光波导形成体的制造方法 |
| US9094135B2 (en) | 2013-06-10 | 2015-07-28 | Freescale Semiconductor, Inc. | Die stack with optical TSVs |
| US9435952B2 (en) | 2013-06-10 | 2016-09-06 | Freescale Semiconductor, Inc. | Integration of a MEMS beam with optical waveguide and deflection in two dimensions |
| US10230458B2 (en) | 2013-06-10 | 2019-03-12 | Nxp Usa, Inc. | Optical die test interface with separate voltages for adjacent electrodes |
| US9442254B2 (en) | 2013-06-10 | 2016-09-13 | Freescale Semiconductor, Inc. | Method and apparatus for beam control with optical MEMS beam waveguide |
| US9810843B2 (en) | 2013-06-10 | 2017-11-07 | Nxp Usa, Inc. | Optical backplane mirror |
| US9261556B2 (en) | 2013-06-10 | 2016-02-16 | Freescale Semiconductor, Inc. | Optical wafer and die probe testing |
| US9766409B2 (en) | 2013-06-10 | 2017-09-19 | Nxp Usa, Inc. | Optical redundancy |
| US9091820B2 (en) | 2013-06-10 | 2015-07-28 | Freescale Semiconductor, Inc. | Communication system die stack |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3172553D1 (en) * | 1980-11-28 | 1985-11-07 | Toshiba Kk | Method for manufacturing a module for a fiber optic link |
| JPH03228356A (ja) * | 1990-02-02 | 1991-10-09 | Mitsubishi Electric Corp | Icパッケージ |
| DE69033400T2 (de) * | 1990-03-13 | 2000-05-11 | Sumitomo Electric Industries, Ltd. | Optisches Modul und Verfahren zu seiner Herstellung |
| CA2036727C (en) * | 1990-03-13 | 1998-12-22 | Hisao Go | Optical module including receptacle, and method of producing the same |
| CA2079964C (en) * | 1992-01-22 | 1997-12-16 | Mitsutoshi Kamakura | Apparatus and method for manufacturing optical module |
| JPH06151699A (ja) | 1992-11-06 | 1994-05-31 | Fuji Electric Co Ltd | 半導体装置 |
| JPH0677252U (ja) * | 1993-03-30 | 1994-10-28 | 住友金属工業株式会社 | Icパッケージ |
| JP2785770B2 (ja) * | 1995-10-19 | 1998-08-13 | 日本電気株式会社 | 樹脂封止半導体装置の製造方法およびその製造装置 |
| JP3570882B2 (ja) | 1997-03-13 | 2004-09-29 | 日本電信電話株式会社 | 光素子実装基板、該実装基板を用いた光モジュール、およびそれらの製造方法 |
| US5869883A (en) * | 1997-09-26 | 1999-02-09 | Stanley Wang, President Pantronix Corp. | Packaging of semiconductor circuit in pre-molded plastic package |
| JPH11111746A (ja) | 1997-10-07 | 1999-04-23 | Miyazaki Oki Electric Co Ltd | 半導体装置の製造方法及びその製造装置 |
| JP2001077248A (ja) * | 1999-09-01 | 2001-03-23 | Matsushita Electronics Industry Corp | 半導体装置およびその製造方法 |
| JP2001108870A (ja) * | 1999-10-06 | 2001-04-20 | Mitsubishi Electric Corp | 光デバイス及びその製造方法 |
| US6821027B2 (en) * | 2000-10-16 | 2004-11-23 | Opti Japan Corporation | Miniaturized parallel optical transmitter and receiver module |
| JP2003163303A (ja) * | 2001-11-27 | 2003-06-06 | Alps Electric Co Ltd | Ic実装用基板およびその製造方法 |
| JP2004200331A (ja) * | 2002-12-18 | 2004-07-15 | Renesas Technology Corp | 光通信装置 |
| JP2005197369A (ja) * | 2004-01-05 | 2005-07-21 | Toshiba Corp | 光半導体装置 |
| JP2005294736A (ja) * | 2004-04-05 | 2005-10-20 | Stanley Electric Co Ltd | 半導体発光装置の製造方法 |
| JP4608294B2 (ja) * | 2004-11-30 | 2011-01-12 | 日亜化学工業株式会社 | 樹脂成形体及び表面実装型発光装置並びにそれらの製造方法 |
| JP4478007B2 (ja) * | 2004-12-16 | 2010-06-09 | 日立オートモティブシステムズ株式会社 | 電子回路装置及びその製造方法 |
| US8218917B2 (en) * | 2007-03-09 | 2012-07-10 | Omron Corporation | Package manufacturing method, package, optical module and die for integral molding |
-
2008
- 2008-03-07 US US12/530,247 patent/US8218917B2/en not_active Expired - Fee Related
- 2008-03-07 JP JP2009504034A patent/JP5170080B2/ja not_active Expired - Fee Related
- 2008-03-07 EP EP08721606A patent/EP2124252A4/en not_active Withdrawn
- 2008-03-07 KR KR1020097018484A patent/KR101078518B1/ko not_active Expired - Fee Related
- 2008-03-07 CN CN2008800074559A patent/CN101627466B/zh not_active Expired - Fee Related
- 2008-03-07 WO PCT/JP2008/054188 patent/WO2008111524A1/ja not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| JP5170080B2 (ja) | 2013-03-27 |
| EP2124252A1 (en) | 2009-11-25 |
| CN101627466A (zh) | 2010-01-13 |
| US20100104240A1 (en) | 2010-04-29 |
| EP2124252A4 (en) | 2012-10-17 |
| US8218917B2 (en) | 2012-07-10 |
| JPWO2008111524A1 (ja) | 2010-06-24 |
| KR101078518B1 (ko) | 2011-10-31 |
| WO2008111524A1 (ja) | 2008-09-18 |
| CN101627466B (zh) | 2011-08-03 |
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