KR970077275A - 웨이퍼 백그라인딩 공정시의 실리콘 파티클 제거방법 - Google Patents

웨이퍼 백그라인딩 공정시의 실리콘 파티클 제거방법 Download PDF

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Publication number
KR970077275A
KR970077275A KR1019960017393A KR19960017393A KR970077275A KR 970077275 A KR970077275 A KR 970077275A KR 1019960017393 A KR1019960017393 A KR 1019960017393A KR 19960017393 A KR19960017393 A KR 19960017393A KR 970077275 A KR970077275 A KR 970077275A
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KR
South Korea
Prior art keywords
back grinding
grinding process
removal method
particle removal
silicon particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019960017393A
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English (en)
Inventor
박현
Original Assignee
김주용
현대전자산업 주식회사
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Publication date
Application filed by 김주용, 현대전자산업 주식회사 filed Critical 김주용
Priority to KR1019960017393A priority Critical patent/KR970077275A/ko
Publication of KR970077275A publication Critical patent/KR970077275A/ko
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices
    • H10P70/20—Cleaning during device manufacture

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  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

본 발명은 백 그라인딩시 발생되는 파티클의 제거를 위한 침전수로써 알콜을 사용하므로써, 경제적이면서 공정시간을 단축시킬 수 있고, 소자의 신뢰성도 향상시킬 수 있는 웨이퍼의 백 그라인딩 공정시의 실리콘 파티클 제거방법을 제공하는데 목적이 있다.
상기 목적을 달성하기 위한 본 발명은 실리콘 웨이퍼의 백 그라인딩 공정에 있어서, 상기 공정에 발생되는 파티클을 제거하기 위한 침전기의 제거수로써 알콜이 사용되는 것을 특징으로 한다.

Description

웨이퍼 백그라이인딩 공정시의 실리콘 파티클 제거방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 일반적인 웨이퍼 백 그라인더의 외부구성도.

Claims (1)

  1. 실리콘 웨이퍼의 백 그라인딩 공정에 있어서, 상기 공정에서 발생되는 파티클을 제거하기 위한 침전기의 제거수로써 알콜이 사용되는 것을 특징으로 하는 웨이퍼의 백 그라인딩 공정시의 실리콘 파티를 제거방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960017393A 1996-05-22 1996-05-22 웨이퍼 백그라인딩 공정시의 실리콘 파티클 제거방법 Withdrawn KR970077275A (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960017393A KR970077275A (ko) 1996-05-22 1996-05-22 웨이퍼 백그라인딩 공정시의 실리콘 파티클 제거방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960017393A KR970077275A (ko) 1996-05-22 1996-05-22 웨이퍼 백그라인딩 공정시의 실리콘 파티클 제거방법

Publications (1)

Publication Number Publication Date
KR970077275A true KR970077275A (ko) 1997-12-12

Family

ID=66219670

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960017393A Withdrawn KR970077275A (ko) 1996-05-22 1996-05-22 웨이퍼 백그라인딩 공정시의 실리콘 파티클 제거방법

Country Status (1)

Country Link
KR (1) KR970077275A (ko)

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