KR970077449A - 웨이퍼 카세트 - Google Patents

웨이퍼 카세트 Download PDF

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Publication number
KR970077449A
KR970077449A KR1019960015545A KR19960015545A KR970077449A KR 970077449 A KR970077449 A KR 970077449A KR 1019960015545 A KR1019960015545 A KR 1019960015545A KR 19960015545 A KR19960015545 A KR 19960015545A KR 970077449 A KR970077449 A KR 970077449A
Authority
KR
South Korea
Prior art keywords
wafer cassette
wafer
present
prevented
catch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019960015545A
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English (en)
Inventor
강만석
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960015545A priority Critical patent/KR970077449A/ko
Publication of KR970077449A publication Critical patent/KR970077449A/ko
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/14—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

본 발명은 웨이퍼 카세트에 관해 개시한다. 본 발명에 의한 웨이퍼 카세트는 상부를 고정시키기 위한 수단으로써 캡을 구비한다.
따라서 본 발명에 의한 웨이퍼 카세트를 이용하면, 웨이퍼 카세트는 정위치를 유지할 수 있고 로봇 암은 웨이퍼를 정확히 캐치할 수 있게 되어 헛 동작이 없어진다. 뿐만 아니라 공정이 순조롭게 진행되고 웨이퍼의 캐치미스를 방지할 수 있으므로 그에 따른 웨이퍼의 깨어짐이나 긁힘등에 의한 오염입자 발생등을 미연에 방지할 수 있다.

Description

웨이퍼 카세트
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제3도는 본 발명의 실시예에 의한 웨이퍼 카세트 캡과 웨이퍼 카세트 및 카세트 스테이션을 나타내는 사시도이다.

Claims (2)

  1. 상부를 고정시키는 수단을 구비하는 것을 특징으로 하는 웨이퍼 카세트.
  2. 제1항에 있어서, 상기 수단은 상기 웨이퍼 카세트의 상부를 덮을 수 있는 캡인 것을 특징으로 하는 웨이퍼 카세트.
    ※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.
KR1019960015545A 1996-05-11 1996-05-11 웨이퍼 카세트 Withdrawn KR970077449A (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960015545A KR970077449A (ko) 1996-05-11 1996-05-11 웨이퍼 카세트

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960015545A KR970077449A (ko) 1996-05-11 1996-05-11 웨이퍼 카세트

Publications (1)

Publication Number Publication Date
KR970077449A true KR970077449A (ko) 1997-12-12

Family

ID=66219411

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960015545A Withdrawn KR970077449A (ko) 1996-05-11 1996-05-11 웨이퍼 카세트

Country Status (1)

Country Link
KR (1) KR970077449A (ko)

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