LT2019028A - Skaidrių medžiagų apdirbimo būdas ir įrenginys - Google Patents

Skaidrių medžiagų apdirbimo būdas ir įrenginys

Info

Publication number
LT2019028A
LT2019028A LT2019028A LT2019028A LT2019028A LT 2019028 A LT2019028 A LT 2019028A LT 2019028 A LT2019028 A LT 2019028A LT 2019028 A LT2019028 A LT 2019028A LT 2019028 A LT2019028 A LT 2019028A
Authority
LT
Lithuania
Prior art keywords
zones
damages
distribution
affected
processing
Prior art date
Application number
LT2019028A
Other languages
English (en)
Other versions
LT6791B (lt
Inventor
Mindaugas MIKUTIS
Orestas ULČINAS
Titas GERTUS
Antanas URBAS
Original Assignee
Uab "Altechna R&D"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Uab "Altechna R&D" filed Critical Uab "Altechna R&D"
Priority to LT2019028A priority Critical patent/LT6791B/lt
Priority to KR1020217041040A priority patent/KR102890510B1/ko
Priority to JP2021568330A priority patent/JP7640090B2/ja
Priority to US17/610,861 priority patent/US12420356B2/en
Priority to PCT/IB2020/054549 priority patent/WO2020230064A1/en
Priority to CN202080036224.1A priority patent/CN113825585B/zh
Priority to EP20726244.5A priority patent/EP3969219B1/en
Publication of LT2019028A publication Critical patent/LT2019028A/lt
Publication of LT6791B publication Critical patent/LT6791B/lt

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1 ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0093—Working by laser beam, e.g. welding, cutting or boring combined with mechanical machining or metal-working covered by other subclasses than B23K
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multi-focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0736—Shaping the laser spot into an oval shape, e.g. elliptic shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special environment or atmosphere, e.g. in an enclosure
    • B23K26/122—Working by laser beam, e.g. welding, cutting or boring in a special environment or atmosphere, e.g. in an enclosure in a liquid, e.g. underwater
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/0222—Scoring using a focussed radiation beam, e.g. laser
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/04—Cutting or splitting in curves, especially for making spectacle lenses
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic materials other than metals or composite materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic materials other than metals or composite materials
    • B23K2103/54—Glass

Landscapes

  • Optics & Photonics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Laser Beam Processing (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

Išradimas yra susijęs su skaidrių medžiagų apdirbimo būdais, naudojančiais ultratrumpuosius lazerio impulsus. Medžiagų, žymia dalimi skaidrių lazerio spinduliuotei, apdirbimo būdas apima necentrosimetrinio nedifraguojančio pluošto suformavimą optiniame elemente, kuriame yra bent dvi dvejopalūžių struktūrų sritys, kai kiekvienoje tų sričių Pancharantnam'o-Berry fazė kinta pagal tai sričiai būdingą dėsnį. Praėjusios elementą šviesos energijos, fazės bei poliarizacijos skirstinių forma kinta, priklausomai nuo krentančios į elementą šviesos parametrų. Pluošto energijos skirstinys sukuriamas artutinai tolygus šviesos plitimo kryptimi. Lazerio impulso energija parenkama taip, kad ruošinyje sufokusuoto pagrindinio skirstinio maksimumo poveikio srityje susiformuotų pailgos tuštuminių pažaidų sritys norima kryptimi, o gretimų impulsų šalutiniai maksimumai paveiktų ruošinį, sukurdami cheminio pobūdžio pokyčius tarp gretimų impulsų pažaidų. Iš sukurtų pažaidų sričių ir cheminio poveikio sričių suformuojama norimos formos pjūvio linija. Taip apdirbtas ruošinys patalpinamas agresyviame tirpale, kuriame paveiktos sritys tirpsta žymiai sparčiau, negu nepaveiktos, dėl ko ruošinio medžiagoje galima gauti pjūvius su pločio ir gylio santykiu, siekiančiu 1/50.
LT2019028A 2019-05-15 2019-05-15 Skaidrių medžiagų apdirbimo būdas ir įrenginys LT6791B (lt)

Priority Applications (7)

Application Number Priority Date Filing Date Title
LT2019028A LT6791B (lt) 2019-05-15 2019-05-15 Skaidrių medžiagų apdirbimo būdas ir įrenginys
KR1020217041040A KR102890510B1 (ko) 2019-05-15 2020-05-14 투명한 재료의 레이저 가공을 위한 방법 및 디바이스
JP2021568330A JP7640090B2 (ja) 2019-05-15 2020-05-14 透明材料のレーザ加工方法及び装置
US17/610,861 US12420356B2 (en) 2019-05-15 2020-05-14 Method and device for laser processing of transparent materials
PCT/IB2020/054549 WO2020230064A1 (en) 2019-05-15 2020-05-14 Method and device for laser processing of transparent materials
CN202080036224.1A CN113825585B (zh) 2019-05-15 2020-05-14 用于透明材料的激光加工的方法和装置
EP20726244.5A EP3969219B1 (en) 2019-05-15 2020-05-14 Method and device for laser processing of transparent materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LT2019028A LT6791B (lt) 2019-05-15 2019-05-15 Skaidrių medžiagų apdirbimo būdas ir įrenginys

Publications (2)

Publication Number Publication Date
LT2019028A true LT2019028A (lt) 2020-11-25
LT6791B LT6791B (lt) 2020-12-28

Family

ID=68461809

Family Applications (1)

Application Number Title Priority Date Filing Date
LT2019028A LT6791B (lt) 2019-05-15 2019-05-15 Skaidrių medžiagų apdirbimo būdas ir įrenginys

Country Status (7)

Country Link
US (1) US12420356B2 (lt)
EP (1) EP3969219B1 (lt)
JP (1) JP7640090B2 (lt)
KR (1) KR102890510B1 (lt)
CN (1) CN113825585B (lt)
LT (1) LT6791B (lt)
WO (1) WO2020230064A1 (lt)

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DE102021131811A1 (de) 2021-12-02 2023-06-07 Trumpf Laser- Und Systemtechnik Gmbh Vorrichtung und Verfahren zum Bearbeiten eines Werkstücks
CN114406448B (zh) * 2022-01-11 2023-01-24 北京理工大学 一种大尺寸光学元件裂纹损伤的飞秒激光修复方法
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CN117607068B (zh) * 2023-11-03 2024-07-23 宁波大学 一种光学材料激光损伤阈值准确测试方法
CN119387863A (zh) * 2024-12-18 2025-02-07 北京工业大学 一种用于透明材料低热损伤激光剥离与切割的装置与方法

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Also Published As

Publication number Publication date
CN113825585A (zh) 2021-12-21
JP2022532241A (ja) 2022-07-13
LT6791B (lt) 2020-12-28
KR102890510B1 (ko) 2025-11-24
EP3969219A1 (en) 2022-03-23
CN113825585B (zh) 2024-03-26
KR20220008335A (ko) 2022-01-20
EP3969219B1 (en) 2023-07-26
WO2020230064A1 (en) 2020-11-19
US20220258278A1 (en) 2022-08-18
US12420356B2 (en) 2025-09-23
JP7640090B2 (ja) 2025-03-05

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