MD2585G2 - Procedeu de obţinere a nanostructurilor semiconductoare - Google Patents

Procedeu de obţinere a nanostructurilor semiconductoare Download PDF

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Publication number
MD2585G2
MD2585G2 MDA20040137A MD20040137A MD2585G2 MD 2585 G2 MD2585 G2 MD 2585G2 MD A20040137 A MDA20040137 A MD A20040137A MD 20040137 A MD20040137 A MD 20040137A MD 2585 G2 MD2585 G2 MD 2585G2
Authority
MD
Moldova
Prior art keywords
obtaining
semiconductor
semiconductor nanostructures
carried out
ion implantation
Prior art date
Application number
MDA20040137A
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English (en)
Russian (ru)
Other versions
MD2585F1 (ro
Inventor
Эдуард МОНАЙКО
Ион ТИГИНЯНУ
Ала КОЖОКАРУ
Вячеслав УРСАКИ
Original Assignee
Ион ТИГИНЯНУ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Ион ТИГИНЯНУ filed Critical Ион ТИГИНЯНУ
Priority to MDA20040137A priority Critical patent/MD2585G2/ro
Publication of MD2585F1 publication Critical patent/MD2585F1/ro
Publication of MD2585G2 publication Critical patent/MD2585G2/ro

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Abstract

Invenţia se referă la tehnologia de producere a semiconductorilor, în special la procedeele de obţinere a nanostructurilor semiconductoare.Esenţa invenţiei constă în aceea că procedeul de obţinere a nanostructurilor semiconductoare include depunerea unei măşti pe una din suprafeţele unei plăci semiconductoare, implantarea ionilor, tratarea electrochimică şi înlăturarea măştii. Implantarea ionilor se efectueazălao energie a ionilor de cel puţin 30 keV, cu o doză de până la 1011 cm-2, iar tratarea electrochimică se efectuează la trecerea curentului cu o densitate de cel puţin 100 mA/cm2.
MDA20040137A 2004-06-01 2004-06-01 Procedeu de obţinere a nanostructurilor semiconductoare MD2585G2 (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MDA20040137A MD2585G2 (ro) 2004-06-01 2004-06-01 Procedeu de obţinere a nanostructurilor semiconductoare

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MDA20040137A MD2585G2 (ro) 2004-06-01 2004-06-01 Procedeu de obţinere a nanostructurilor semiconductoare

Publications (2)

Publication Number Publication Date
MD2585F1 MD2585F1 (ro) 2004-10-31
MD2585G2 true MD2585G2 (ro) 2005-05-31

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MDA20040137A MD2585G2 (ro) 2004-06-01 2004-06-01 Procedeu de obţinere a nanostructurilor semiconductoare

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MD (1) MD2585G2 (ro)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MD2982G2 (ro) * 2005-08-10 2006-10-31 Институт Прикладной Физики Академии Наук Молдовы Procedeu de obţinere a nanostructurilor semiconductoare
MD3811G2 (ro) * 2007-11-06 2009-08-31 Институт Прикладной Физики Академии Наук Молдовы Procedeu de obţinere a zonelor nanostructurale semiconductoare
MD193Z (ro) * 2009-06-04 2010-11-30 Институт Прикладной Физики Академии Наук Молдовы Procedeu de obţinere a peliculei polisulfidice
MD4063C1 (ro) * 2010-02-18 2011-03-31 Технический университет Молдовы Procedeu de obţinere a nanotuburilor din dioxid de titan pe suport de titan

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2192698C1 (ru) * 2001-07-05 2002-11-10 Омский государственный технический университет Устройство для защиты электродвигателей

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2192698C1 (ru) * 2001-07-05 2002-11-10 Омский государственный технический университет Устройство для защиты электродвигателей

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
I.M. Tiginyanu, C. Schwab, J.J. Grob, B. Prevot, H.L. Hartnagel, A. Vogt, G.Irmer, J.Monecke. Appl. Phys. Lett., vol. 71, nr. 26, 1997, p.3829-3831 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MD2982G2 (ro) * 2005-08-10 2006-10-31 Институт Прикладной Физики Академии Наук Молдовы Procedeu de obţinere a nanostructurilor semiconductoare
MD3811G2 (ro) * 2007-11-06 2009-08-31 Институт Прикладной Физики Академии Наук Молдовы Procedeu de obţinere a zonelor nanostructurale semiconductoare
MD193Z (ro) * 2009-06-04 2010-11-30 Институт Прикладной Физики Академии Наук Молдовы Procedeu de obţinere a peliculei polisulfidice
MD4063C1 (ro) * 2010-02-18 2011-03-31 Технический университет Молдовы Procedeu de obţinere a nanotuburilor din dioxid de titan pe suport de titan

Also Published As

Publication number Publication date
MD2585F1 (ro) 2004-10-31

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MM4A Patent for invention definitely lapsed due to non-payment of fees