MY175819A - Polishing composition, method for producing magnetic disk substrate,and magnetic disk substrate - Google Patents
Polishing composition, method for producing magnetic disk substrate,and magnetic disk substrateInfo
- Publication number
- MY175819A MY175819A MYPI2016702541A MYPI2016702541A MY175819A MY 175819 A MY175819 A MY 175819A MY PI2016702541 A MYPI2016702541 A MY PI2016702541A MY PI2016702541 A MYPI2016702541 A MY PI2016702541A MY 175819 A MY175819 A MY 175819A
- Authority
- MY
- Malaysia
- Prior art keywords
- magnetic disk
- disk substrate
- polishing composition
- polishing
- producing magnetic
- Prior art date
Links
- 238000005498 polishing Methods 0.000 title abstract 7
- 239000000758 substrate Substances 0.000 title abstract 5
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 238000000034 method Methods 0.000 abstract 1
- 239000011164 primary particle Substances 0.000 abstract 1
- 125000005372 silanol group Chemical group 0.000 abstract 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Provided are a polishing composition that uses a silica abrasive and is able to bring about a high polishing rate and excellent surface quality; and a method for producing magnetic disk substrates with the use of the polishing composition. This invention provides a polishing composition comprising a silica abrasive. The silica abrasive has an average primary particle diameter of 40 nm or larger and an average silanol group density of 1.25 group/nm2 or lower. This invention also provides a method for producing magnetic disk substrates, the method comprising a step (1) of polishing a magnetic disk substrate using the polishing composition.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015141291A JP6564638B2 (en) | 2015-07-15 | 2015-07-15 | Polishing composition, magnetic disk substrate manufacturing method, and magnetic disk substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| MY175819A true MY175819A (en) | 2020-07-10 |
Family
ID=57887685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MYPI2016702541A MY175819A (en) | 2015-07-15 | 2016-07-13 | Polishing composition, method for producing magnetic disk substrate,and magnetic disk substrate |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6564638B2 (en) |
| MY (1) | MY175819A (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7096714B2 (en) * | 2017-06-26 | 2022-07-06 | 花王株式会社 | Silica slurry for polishing liquid composition |
| WO2019004161A1 (en) * | 2017-06-26 | 2019-01-03 | 花王株式会社 | Silica slurry for polishing-liquid composition |
| JP7400209B2 (en) * | 2019-05-07 | 2023-12-19 | 三菱ケミカル株式会社 | Silica particles, silica sol, polishing composition, polishing method, semiconductor wafer manufacturing method, and semiconductor device manufacturing method |
| JP7638667B2 (en) | 2019-11-20 | 2025-03-04 | 株式会社フジミインコーポレーテッド | Polishing composition, polishing method and method for producing substrate |
| CN114106701A (en) * | 2021-12-03 | 2022-03-01 | 安徽光智科技有限公司 | Polishing solution for zinc sulfide and preparation method thereof |
| JP7587661B2 (en) * | 2022-11-17 | 2024-11-20 | 花王株式会社 | Polishing composition |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20100123678A (en) * | 2008-02-18 | 2010-11-24 | 제이에스알 가부시끼가이샤 | Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing method |
| WO2014007063A1 (en) * | 2012-07-06 | 2014-01-09 | 日立化成株式会社 | Polishing solution, preservation solution and polishing method for cmp |
-
2015
- 2015-07-15 JP JP2015141291A patent/JP6564638B2/en active Active
-
2016
- 2016-07-13 MY MYPI2016702541A patent/MY175819A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JP2017019978A (en) | 2017-01-26 |
| JP6564638B2 (en) | 2019-08-21 |
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