MY183298A - Method for manufacturing magnetic-disk substrate and method for manufacturing magnetic disk - Google Patents

Method for manufacturing magnetic-disk substrate and method for manufacturing magnetic disk

Info

Publication number
MY183298A
MY183298A MYPI2017701168A MYPI2017701168A MY183298A MY 183298 A MY183298 A MY 183298A MY PI2017701168 A MYPI2017701168 A MY PI2017701168A MY PI2017701168 A MYPI2017701168 A MY PI2017701168A MY 183298 A MY183298 A MY 183298A
Authority
MY
Malaysia
Prior art keywords
substrate
polishing pads
polishing
coolant
manufacturing magnetic
Prior art date
Application number
MYPI2017701168A
Inventor
Sayomphu Khamlar
Original Assignee
Hoya Corp
Hoya Lamphun Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp, Hoya Lamphun Ltd filed Critical Hoya Corp
Publication of MY183298A publication Critical patent/MY183298A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)

Abstract

A method for manufacturing a magnetic-disk substrate includes polishing processing in which a substrate is sandwiched between a pair of suede polishing pads, a slurry containing polishing abrasive particles is supplied between the polishing pads and the substrate, and both main surfaces of the substrate are polished by sliding the polishing pads and the substrate relative to each other. Before the polishing processing is performed on the substrate, dressing treatment for removing surfaces of the polishing pads is performed on the polishing pads by sliding a dresser and the polishing pads relative to each other while a coolant is supplied to the surfaces of the polishing pads provided on surface plates. In the dressing treatment, a temperature of the coolant or a coolant supply amount per unit time is controlled such that an amount of heat that the coolant draws from the polishing pads is made larger at the time at which the dressing treatment ends than at the time at which the dressing treatment starts.
MYPI2017701168A 2014-11-12 2015-11-12 Method for manufacturing magnetic-disk substrate and method for manufacturing magnetic disk MY183298A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014229717 2014-11-12
PCT/JP2015/081903 WO2016076404A1 (en) 2014-11-12 2015-11-12 Method for manufacturing magnetic disk substrate and method for manufacturing magnetic disk

Publications (1)

Publication Number Publication Date
MY183298A true MY183298A (en) 2021-02-18

Family

ID=55954481

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2017701168A MY183298A (en) 2014-11-12 2015-11-12 Method for manufacturing magnetic-disk substrate and method for manufacturing magnetic disk

Country Status (5)

Country Link
JP (1) JP6181325B2 (en)
CN (1) CN107077865B (en)
MY (1) MY183298A (en)
SG (1) SG11201702803SA (en)
WO (1) WO2016076404A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7370347B2 (en) * 2019-02-15 2023-10-27 東洋鋼鈑株式会社 Manufacturing method of hard disk substrate
JP7306234B2 (en) * 2019-11-19 2023-07-11 株式会社Sumco Wafer polishing method and silicon wafer
CN118605327A (en) * 2020-02-07 2024-09-06 大连富士冰山智控系统有限公司 Control system and control method
CN115284161B (en) * 2022-07-04 2024-03-01 上海中欣晶圆半导体科技有限公司 A grinding method to reduce wafer TTV
CN115256233A (en) * 2022-08-18 2022-11-01 福建晶安光电有限公司 Disc surface finishing process of double-sided grinding machine table
JP2024178702A (en) * 2023-06-13 2024-12-25 株式会社Sumco Method for setting dressing conditions for polishing pad, method for polishing one side of a wafer, method for manufacturing a wafer, device for setting dressing conditions for polishing pad, and device for polishing one side of a wafer
CN116749080B (en) * 2023-08-18 2023-11-14 浙江求是半导体设备有限公司 Trimming method

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007144564A (en) * 2005-11-28 2007-06-14 Ebara Corp Polishing equipment
CN102086095B (en) * 2006-03-24 2012-11-28 Hoya株式会社 Method for producing magnetic disk glass substrate and method for producing magnetic disk
JP2009154232A (en) * 2007-12-26 2009-07-16 Hoya Corp Method of manufacturing glass substrate for magnetic disk
JP5056961B2 (en) * 2010-02-01 2012-10-24 旭硝子株式会社 Glass substrate for magnetic recording medium and method for manufacturing the same
DE102011003006B4 (en) * 2011-01-21 2013-02-07 Siltronic Ag A method for providing each a level working layer on each of the two working wheels of a double-sided processing device
JP2012033265A (en) * 2011-11-14 2012-02-16 Asahi Glass Co Ltd Glass substrate for magnetic recording medium and manufacturing method thereof

Also Published As

Publication number Publication date
CN107077865B (en) 2018-10-02
CN107077865A (en) 2017-08-18
JPWO2016076404A1 (en) 2017-08-31
WO2016076404A1 (en) 2016-05-19
SG11201702803SA (en) 2017-06-29
JP6181325B2 (en) 2017-08-16

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