NL7010220A - Epitaxial single crystal film - Google Patents

Epitaxial single crystal film

Info

Publication number
NL7010220A
NL7010220A NL7010220A NL7010220A NL7010220A NL 7010220 A NL7010220 A NL 7010220A NL 7010220 A NL7010220 A NL 7010220A NL 7010220 A NL7010220 A NL 7010220A NL 7010220 A NL7010220 A NL 7010220A
Authority
NL
Netherlands
Prior art keywords
single crystal
crystal film
oxide
film
group
Prior art date
Application number
NL7010220A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7010220A publication Critical patent/NL7010220A/xx

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01Manufacture or treatment
    • H10D86/03Manufacture or treatment wherein the substrate comprises sapphire, e.g. silicon-on-sapphire [SOS]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/29Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
    • H10P14/2901Materials
    • H10P14/2921Materials being crystalline insulating materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34Deposited materials, e.g. layers
    • H10P14/3402Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3414Deposited materials, e.g. layers characterised by the chemical composition being group IIIA-VIA materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Junction Field-Effect Transistors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
NL7010220A 1969-10-01 1970-07-10 Epitaxial single crystal film NL7010220A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6483569A 1969-10-01 1969-10-01

Publications (1)

Publication Number Publication Date
NL7010220A true NL7010220A (en) 1971-04-05

Family

ID=22058538

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7010220A NL7010220A (en) 1969-10-01 1970-07-10 Epitaxial single crystal film

Country Status (2)

Country Link
BE (1) BE751978A (fr)
NL (1) NL7010220A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4136350A (en) * 1977-07-14 1979-01-23 Bell Telephone Laboratories, Incorporated Epitaxial growth of dissimilar materials

Also Published As

Publication number Publication date
BE751978A (fr) 1970-11-16

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