NL8900390A - Inrichting voor het stofarm houden van een ruimte en clean room voorzien van een dergelijke ruimte. - Google Patents
Inrichting voor het stofarm houden van een ruimte en clean room voorzien van een dergelijke ruimte. Download PDFInfo
- Publication number
- NL8900390A NL8900390A NL8900390A NL8900390A NL8900390A NL 8900390 A NL8900390 A NL 8900390A NL 8900390 A NL8900390 A NL 8900390A NL 8900390 A NL8900390 A NL 8900390A NL 8900390 A NL8900390 A NL 8900390A
- Authority
- NL
- Netherlands
- Prior art keywords
- filter
- space
- inlet
- air
- wall
- Prior art date
Links
- 239000006071 cream Substances 0.000 title 1
- 239000000428 dust Substances 0.000 claims abstract description 13
- 230000006835 compression Effects 0.000 claims description 14
- 238000007906 compression Methods 0.000 claims description 14
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000001914 filtration Methods 0.000 claims description 3
- 239000002245 particle Substances 0.000 description 17
- 238000011045 prefiltration Methods 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- 238000004377 microelectronic Methods 0.000 description 4
- 241000894006 Bacteria Species 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000010171 animal model Methods 0.000 description 1
- 230000001580 bacterial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001846 repelling effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
- B01D46/12—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces in multiple arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Jib Cranes (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL8900390A NL8900390A (nl) | 1989-02-17 | 1989-02-17 | Inrichting voor het stofarm houden van een ruimte en clean room voorzien van een dergelijke ruimte. |
| AT90200332T ATE83850T1 (de) | 1989-02-17 | 1990-02-14 | Einrichtung zum staubarmhalten von raeumen und reinraum, versehen mit dieser einrichtung. |
| DE9090200332T DE69000619D1 (de) | 1989-02-17 | 1990-02-14 | Einrichtung zum staubarmhalten von raeumen und reinraum, versehen mit dieser einrichtung. |
| EP90200332A EP0383402B1 (fr) | 1989-02-17 | 1990-02-14 | Dispositif pour maintenir une salle hors poussière et salle blanche munie d'un tel dispositif |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL8900390 | 1989-02-17 | ||
| NL8900390A NL8900390A (nl) | 1989-02-17 | 1989-02-17 | Inrichting voor het stofarm houden van een ruimte en clean room voorzien van een dergelijke ruimte. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL8900390A true NL8900390A (nl) | 1990-09-17 |
Family
ID=19854150
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL8900390A NL8900390A (nl) | 1989-02-17 | 1989-02-17 | Inrichting voor het stofarm houden van een ruimte en clean room voorzien van een dergelijke ruimte. |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0383402B1 (fr) |
| AT (1) | ATE83850T1 (fr) |
| DE (1) | DE69000619D1 (fr) |
| NL (1) | NL8900390A (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6869458B2 (en) * | 2003-05-05 | 2005-03-22 | Sanki Engineering Co., Ltd. | Bioclean room unit |
| DE102017124384A1 (de) * | 2017-10-19 | 2019-04-25 | Khs Gmbh | Einhausung für eine industrielle Anlage |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4412849A (en) * | 1981-04-09 | 1983-11-01 | Klenzaids Engineers Private Limited | Method and apparatus for control of gas-borne particulates |
-
1989
- 1989-02-17 NL NL8900390A patent/NL8900390A/nl not_active Application Discontinuation
-
1990
- 1990-02-14 AT AT90200332T patent/ATE83850T1/de not_active IP Right Cessation
- 1990-02-14 EP EP90200332A patent/EP0383402B1/fr not_active Expired - Lifetime
- 1990-02-14 DE DE9090200332T patent/DE69000619D1/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE69000619D1 (de) | 1993-02-04 |
| EP0383402A1 (fr) | 1990-08-22 |
| EP0383402B1 (fr) | 1992-12-23 |
| ATE83850T1 (de) | 1993-01-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A1B | A search report has been drawn up | ||
| BV | The patent application has lapsed |