NL8901590A - Halfgeleiderinrichting voor het opwekken van een elektronenstroom. - Google Patents
Halfgeleiderinrichting voor het opwekken van een elektronenstroom. Download PDFInfo
- Publication number
- NL8901590A NL8901590A NL8901590A NL8901590A NL8901590A NL 8901590 A NL8901590 A NL 8901590A NL 8901590 A NL8901590 A NL 8901590A NL 8901590 A NL8901590 A NL 8901590A NL 8901590 A NL8901590 A NL 8901590A
- Authority
- NL
- Netherlands
- Prior art keywords
- semiconductor device
- type
- semiconductor
- region
- thickness
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims description 69
- 230000001133 acceleration Effects 0.000 claims description 9
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 229910052792 caesium Inorganic materials 0.000 claims description 7
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 230000015556 catabolic process Effects 0.000 claims description 4
- 229910052788 barium Inorganic materials 0.000 claims description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 2
- 239000012535 impurity Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 25
- 230000000694 effects Effects 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000013139 quantization Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000001493 electron microscopy Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000005381 potential energy Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 101001053395 Arabidopsis thaliana Acid beta-fructofuranosidase 4, vacuolar Proteins 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- NIQCNGHVCWTJSM-UHFFFAOYSA-N Dimethyl phthalate Chemical compound COC(=O)C1=CC=CC=C1C(=O)OC NIQCNGHVCWTJSM-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/308—Semiconductor cathodes, e.g. cathodes with PN junction layers
Landscapes
- Cold Cathode And The Manufacture (AREA)
- Electrodes For Cathode-Ray Tubes (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL8901590A NL8901590A (nl) | 1989-06-23 | 1989-06-23 | Halfgeleiderinrichting voor het opwekken van een elektronenstroom. |
| EP19900201575 EP0404246B1 (fr) | 1989-06-23 | 1990-06-18 | Dispositif semiconducteur pour engendrer un courant d'électrons |
| DE1990609303 DE69009303T2 (de) | 1989-06-23 | 1990-06-18 | Halbleiteranordnung zum Erzeugen eines Elektronenstromes. |
| JP2160029A JPH0330230A (ja) | 1989-06-23 | 1990-06-20 | 電子流を発生する半導体デバイス |
| US07/970,437 US5243197A (en) | 1989-06-23 | 1992-11-02 | Semiconductor device for generating an electron current |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL8901590A NL8901590A (nl) | 1989-06-23 | 1989-06-23 | Halfgeleiderinrichting voor het opwekken van een elektronenstroom. |
| NL8901590 | 1989-06-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL8901590A true NL8901590A (nl) | 1991-01-16 |
Family
ID=19854892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL8901590A NL8901590A (nl) | 1989-06-23 | 1989-06-23 | Halfgeleiderinrichting voor het opwekken van een elektronenstroom. |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0404246B1 (fr) |
| JP (1) | JPH0330230A (fr) |
| DE (1) | DE69009303T2 (fr) |
| NL (1) | NL8901590A (fr) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8600676A (nl) * | 1986-03-17 | 1987-10-16 | Philips Nv | Halfgeleiderinrichting voor het opwekken van een elektronenstroom. |
| EP0257460B1 (fr) * | 1986-08-12 | 1996-04-24 | Canon Kabushiki Kaisha | Générateur de faisceau d'électrons à l'état solide |
-
1989
- 1989-06-23 NL NL8901590A patent/NL8901590A/nl not_active Application Discontinuation
-
1990
- 1990-06-18 EP EP19900201575 patent/EP0404246B1/fr not_active Expired - Lifetime
- 1990-06-18 DE DE1990609303 patent/DE69009303T2/de not_active Expired - Fee Related
- 1990-06-20 JP JP2160029A patent/JPH0330230A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0330230A (ja) | 1991-02-08 |
| DE69009303T2 (de) | 1994-12-08 |
| DE69009303D1 (de) | 1994-07-07 |
| EP0404246A1 (fr) | 1990-12-27 |
| EP0404246B1 (fr) | 1994-06-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A1B | A search report has been drawn up | ||
| BV | The patent application has lapsed |