NO20063222L - Skivemagasin for halvlederskiver eller skiveliknende gjenstander - Google Patents

Skivemagasin for halvlederskiver eller skiveliknende gjenstander

Info

Publication number
NO20063222L
NO20063222L NO20063222A NO20063222A NO20063222L NO 20063222 L NO20063222 L NO 20063222L NO 20063222 A NO20063222 A NO 20063222A NO 20063222 A NO20063222 A NO 20063222A NO 20063222 L NO20063222 L NO 20063222L
Authority
NO
Norway
Prior art keywords
base plate
disc
guide means
base
disc tray
Prior art date
Application number
NO20063222A
Other languages
English (en)
Norwegian (no)
Inventor
Heiko Killer
Original Assignee
Q Cells Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Q Cells Ag filed Critical Q Cells Ag
Publication of NO20063222L publication Critical patent/NO20063222L/no

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/12—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/17—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] specially adapted for supporting large square shaped substrates

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Packaging For Recording Disks (AREA)
  • Packaging Frangible Articles (AREA)
NO20063222A 2005-07-12 2006-07-11 Skivemagasin for halvlederskiver eller skiveliknende gjenstander NO20063222L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005033859A DE102005033859B3 (de) 2005-07-12 2005-07-12 Wafermagazin für Halbleiterwafer oder waferartige Gegenstände

Publications (1)

Publication Number Publication Date
NO20063222L true NO20063222L (no) 2007-01-15

Family

ID=37401026

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20063222A NO20063222L (no) 2005-07-12 2006-07-11 Skivemagasin for halvlederskiver eller skiveliknende gjenstander

Country Status (3)

Country Link
EP (1) EP1744355B1 (fr)
DE (1) DE102005033859B3 (fr)
NO (1) NO20063222L (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008030629A1 (de) 2008-06-20 2009-12-24 Aci-Ecotec Gmbh & Co. Kg Wafermagazin
DE202009014371U1 (de) 2009-10-23 2011-02-24 Aleo Solar Ag Bauelemente-Magazin und Solarzellen-Positioniervorrichtung
DE102010005202B4 (de) 2010-01-21 2020-04-09 Q-Cells Se Magazin für einen photovoltaischen Wafer- und/oder Zellstapel mit einem Magazineinsatz zur Aufnahme desselben
DE102011013511B4 (de) 2011-03-10 2017-01-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Plattenmagazin und Vorrichtung zum Abseparieren von plattenförmigen Gegenständen
CN114249086B (zh) * 2020-09-24 2024-11-01 深南电路股份有限公司 一种上板设备
CN116198822A (zh) * 2022-12-27 2023-06-02 沈阳农业大学 一种生物实验室用培养皿批量放置转移装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3915317A (en) * 1974-09-17 1975-10-28 Eastman Kodak Co Apparatus for collecting articles in separate stacks
JPH03106721A (ja) * 1989-09-21 1991-05-07 Mitsubishi Electric Corp 縦型ウエーハ搬送装置
JPH05116832A (ja) 1991-10-25 1993-05-14 Hitachi Electron Eng Co Ltd フレキシブルデイスクスタツク機構
JP3163884B2 (ja) * 1994-02-18 2001-05-08 株式会社ダイフク 荷保管設備
US5950643A (en) * 1995-09-06 1999-09-14 Miyazaki; Takeshiro Wafer processing system
US6427096B1 (en) * 1999-02-12 2002-07-30 Honeywell International Inc. Processing tool interface apparatus for use in manufacturing environment
KR100672634B1 (ko) * 2001-12-19 2007-02-09 엘지.필립스 엘시디 주식회사 액정표시소자의 기판 반송 장치 및 방법
US6886696B2 (en) * 2003-01-15 2005-05-03 Taiwan Semiconductor Manufacturing Co., Ltd Wafer container with removable sidewalls

Also Published As

Publication number Publication date
DE102005033859B3 (de) 2006-12-14
EP1744355B1 (fr) 2019-08-07
EP1744355A3 (fr) 2008-08-06
EP1744355A2 (fr) 2007-01-17

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Legal Events

Date Code Title Description
FC2A Withdrawal, rejection or dismissal of laid open patent application