NO902380L - Laminert halvlederfoeler med vibrerende element. - Google Patents

Laminert halvlederfoeler med vibrerende element.

Info

Publication number
NO902380L
NO902380L NO90902380A NO902380A NO902380L NO 902380 L NO902380 L NO 902380L NO 90902380 A NO90902380 A NO 90902380A NO 902380 A NO902380 A NO 902380A NO 902380 L NO902380 L NO 902380L
Authority
NO
Norway
Prior art keywords
wafer
vibrating element
semiconductor sensor
laminated semiconductor
resonant element
Prior art date
Application number
NO90902380A
Other languages
English (en)
Norwegian (no)
Other versions
NO902380D0 (no
Inventor
Phillip W Barth
Kurt E Petersen
Joseph R Mallon Jr
Original Assignee
Schlumberger Ind Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schlumberger Ind Inc filed Critical Schlumberger Ind Inc
Publication of NO902380D0 publication Critical patent/NO902380D0/no
Publication of NO902380L publication Critical patent/NO902380L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Semiconductor Integrated Circuits (AREA)
NO90902380A 1989-05-30 1990-05-29 Laminert halvlederfoeler med vibrerende element. NO902380L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/358,771 US5060526A (en) 1989-05-30 1989-05-30 Laminated semiconductor sensor with vibrating element

Publications (2)

Publication Number Publication Date
NO902380D0 NO902380D0 (no) 1990-05-29
NO902380L true NO902380L (no) 1990-12-03

Family

ID=23410972

Family Applications (1)

Application Number Title Priority Date Filing Date
NO90902380A NO902380L (no) 1989-05-30 1990-05-29 Laminert halvlederfoeler med vibrerende element.

Country Status (8)

Country Link
US (1) US5060526A (de)
EP (1) EP0400939B1 (de)
JP (1) JPH03148878A (de)
AT (1) ATE136117T1 (de)
BR (1) BR9002553A (de)
CA (1) CA2017704A1 (de)
DE (1) DE69026141T2 (de)
NO (1) NO902380L (de)

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US20030048036A1 (en) * 2001-08-31 2003-03-13 Lemkin Mark Alan MEMS comb-finger actuator
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US7605391B2 (en) * 2004-12-12 2009-10-20 Burns David W Optically coupled resonator
US7176048B1 (en) 2004-12-12 2007-02-13 Burns David W Optically coupled sealed-cavity resonator and process
US7443509B1 (en) 2004-12-12 2008-10-28 Burns David W Optical and electronic interface for optically coupled resonators
US7499604B1 (en) 2004-12-12 2009-03-03 Burns David W Optically coupled resonant pressure sensor and process
US7379629B1 (en) 2004-12-12 2008-05-27 Burns David W Optically coupled resonant pressure sensor
US7835598B2 (en) 2004-12-21 2010-11-16 Halliburton Energy Services, Inc. Multi-channel array processor
US7864329B2 (en) 2004-12-21 2011-01-04 Halliburton Energy Services, Inc. Fiber optic sensor system having circulators, Bragg gratings and couplers
US7037746B1 (en) 2004-12-27 2006-05-02 General Electric Company Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane
EP1869737B1 (de) 2005-03-16 2021-05-12 Davidson Instruments, Inc. Hochintensitäts-fabry-perot-sensor
US7884432B2 (en) * 2005-03-22 2011-02-08 Ametek, Inc. Apparatus and methods for shielding integrated circuitry
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DE102005043718B3 (de) * 2005-09-13 2007-04-19 Fachhochschule Kiel Verfahren zur Messung der Fliessgeschwindigkeit eines Mediums
US7684051B2 (en) 2006-04-18 2010-03-23 Halliburton Energy Services, Inc. Fiber optic seismic sensor based on MEMS cantilever
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US7876906B2 (en) 2006-05-30 2011-01-25 Sonitus Medical, Inc. Methods and apparatus for processing audio signals
US8115937B2 (en) 2006-08-16 2012-02-14 Davidson Instruments Methods and apparatus for measuring multiple Fabry-Perot gaps
US8291912B2 (en) 2006-08-22 2012-10-23 Sonitus Medical, Inc. Systems for manufacturing oral-based hearing aid appliances
US7787128B2 (en) 2007-01-24 2010-08-31 Halliburton Energy Services, Inc. Transducer for measuring environmental parameters
US8270638B2 (en) 2007-05-29 2012-09-18 Sonitus Medical, Inc. Systems and methods to provide communication, positioning and monitoring of user status
US8433080B2 (en) 2007-08-22 2013-04-30 Sonitus Medical, Inc. Bone conduction hearing device with open-ear microphone
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US8795172B2 (en) 2007-12-07 2014-08-05 Sonitus Medical, Inc. Systems and methods to provide two-way communications
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US20090226020A1 (en) 2008-03-04 2009-09-10 Sonitus Medical, Inc. Dental bone conduction hearing appliance
US8150075B2 (en) 2008-03-04 2012-04-03 Sonitus Medical, Inc. Dental bone conduction hearing appliance
DE102009001892A1 (de) * 2009-03-26 2010-09-30 Endress + Hauser Gmbh + Co. Kg Drucksensor
US8433082B2 (en) 2009-10-02 2013-04-30 Sonitus Medical, Inc. Intraoral appliance for sound transmission via bone conduction
JP2015503767A (ja) * 2012-01-16 2015-02-02 エイブラム サイエンティフィック，インコーポレーテッド 流体の物理的特性を測定するための方法、デバイス、およびシステム
RU2506549C1 (ru) * 2012-06-22 2014-02-10 Общество с ограниченной ответственностью "СибИС" Резонансный сенсор давления
US12584930B2 (en) 2019-02-04 2026-03-24 Abram Scientific, Inc. Fluid property measurement devices and methods
CN111732068B (zh) * 2020-08-26 2020-11-20 上海南麟集成电路有限公司 一种双悬臂梁波导耦合光电式mems触觉传感器及其制作方法

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Also Published As

Publication number Publication date
DE69026141T2 (de) 1996-10-02
NO902380D0 (no) 1990-05-29
US5060526A (en) 1991-10-29
ATE136117T1 (de) 1996-04-15
CA2017704A1 (en) 1990-11-30
EP0400939A3 (de) 1992-07-01
EP0400939A2 (de) 1990-12-05
BR9002553A (pt) 1991-08-13
JPH03148878A (ja) 1991-06-25
EP0400939B1 (de) 1996-03-27
DE69026141D1 (de) 1996-05-02

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