ATE136117T1 - Halbleiterwandler mit schwingelement - Google Patents

Halbleiterwandler mit schwingelement

Info

Publication number
ATE136117T1
ATE136117T1 AT90305777T AT90305777T ATE136117T1 AT E136117 T1 ATE136117 T1 AT E136117T1 AT 90305777 T AT90305777 T AT 90305777T AT 90305777 T AT90305777 T AT 90305777T AT E136117 T1 ATE136117 T1 AT E136117T1
Authority
AT
Austria
Prior art keywords
wafer
resonant element
vibration element
semiconductor transducer
defines
Prior art date
Application number
AT90305777T
Other languages
English (en)
Inventor
Phillip W Barth
Kurt E Petersen
Joseph R Mallon
Original Assignee
Solartron Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Solartron Group Ltd filed Critical Solartron Group Ltd
Application granted granted Critical
Publication of ATE136117T1 publication Critical patent/ATE136117T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Semiconductor Integrated Circuits (AREA)
AT90305777T 1989-05-30 1990-05-29 Halbleiterwandler mit schwingelement ATE136117T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/358,771 US5060526A (en) 1989-05-30 1989-05-30 Laminated semiconductor sensor with vibrating element

Publications (1)

Publication Number Publication Date
ATE136117T1 true ATE136117T1 (de) 1996-04-15

Family

ID=23410972

Family Applications (1)

Application Number Title Priority Date Filing Date
AT90305777T ATE136117T1 (de) 1989-05-30 1990-05-29 Halbleiterwandler mit schwingelement

Country Status (8)

Country Link
US (1) US5060526A (de)
EP (1) EP0400939B1 (de)
JP (1) JPH03148878A (de)
AT (1) ATE136117T1 (de)
BR (1) BR9002553A (de)
CA (1) CA2017704A1 (de)
DE (1) DE69026141T2 (de)
NO (1) NO902380L (de)

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US7492463B2 (en) 2004-04-15 2009-02-17 Davidson Instruments Inc. Method and apparatus for continuous readout of Fabry-Perot fiber optic sensor
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US7605391B2 (en) * 2004-12-12 2009-10-20 Burns David W Optically coupled resonator
US7176048B1 (en) 2004-12-12 2007-02-13 Burns David W Optically coupled sealed-cavity resonator and process
US7443509B1 (en) 2004-12-12 2008-10-28 Burns David W Optical and electronic interface for optically coupled resonators
US7499604B1 (en) 2004-12-12 2009-03-03 Burns David W Optically coupled resonant pressure sensor and process
US7379629B1 (en) 2004-12-12 2008-05-27 Burns David W Optically coupled resonant pressure sensor
US7835598B2 (en) 2004-12-21 2010-11-16 Halliburton Energy Services, Inc. Multi-channel array processor
US7864329B2 (en) 2004-12-21 2011-01-04 Halliburton Energy Services, Inc. Fiber optic sensor system having circulators, Bragg gratings and couplers
US7037746B1 (en) 2004-12-27 2006-05-02 General Electric Company Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane
EP1869737B1 (de) 2005-03-16 2021-05-12 Davidson Instruments, Inc. Hochintensitäts-fabry-perot-sensor
US7884432B2 (en) * 2005-03-22 2011-02-08 Ametek, Inc. Apparatus and methods for shielding integrated circuitry
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DE102005043718B3 (de) * 2005-09-13 2007-04-19 Fachhochschule Kiel Verfahren zur Messung der Fliessgeschwindigkeit eines Mediums
US7684051B2 (en) 2006-04-18 2010-03-23 Halliburton Energy Services, Inc. Fiber optic seismic sensor based on MEMS cantilever
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US7876906B2 (en) 2006-05-30 2011-01-25 Sonitus Medical, Inc. Methods and apparatus for processing audio signals
US8115937B2 (en) 2006-08-16 2012-02-14 Davidson Instruments Methods and apparatus for measuring multiple Fabry-Perot gaps
US8291912B2 (en) 2006-08-22 2012-10-23 Sonitus Medical, Inc. Systems for manufacturing oral-based hearing aid appliances
US7787128B2 (en) 2007-01-24 2010-08-31 Halliburton Energy Services, Inc. Transducer for measuring environmental parameters
US8270638B2 (en) 2007-05-29 2012-09-18 Sonitus Medical, Inc. Systems and methods to provide communication, positioning and monitoring of user status
US8433080B2 (en) 2007-08-22 2013-04-30 Sonitus Medical, Inc. Bone conduction hearing device with open-ear microphone
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US7682303B2 (en) 2007-10-02 2010-03-23 Sonitus Medical, Inc. Methods and apparatus for transmitting vibrations
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US8150075B2 (en) 2008-03-04 2012-04-03 Sonitus Medical, Inc. Dental bone conduction hearing appliance
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US8433082B2 (en) 2009-10-02 2013-04-30 Sonitus Medical, Inc. Intraoral appliance for sound transmission via bone conduction
JP2015503767A (ja) * 2012-01-16 2015-02-02 エイブラム サイエンティフィック，インコーポレーテッド 流体の物理的特性を測定するための方法、デバイス、およびシステム
RU2506549C1 (ru) * 2012-06-22 2014-02-10 Общество с ограниченной ответственностью "СибИС" Резонансный сенсор давления
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Also Published As

Publication number Publication date
DE69026141T2 (de) 1996-10-02
NO902380D0 (no) 1990-05-29
US5060526A (en) 1991-10-29
CA2017704A1 (en) 1990-11-30
EP0400939A3 (de) 1992-07-01
EP0400939A2 (de) 1990-12-05
BR9002553A (pt) 1991-08-13
JPH03148878A (ja) 1991-06-25
EP0400939B1 (de) 1996-03-27
NO902380L (no) 1990-12-03
DE69026141D1 (de) 1996-05-02

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Legal Events

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UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee