PL363131A1 - Układ do detekcji elektronów w skaningowym mikroskopie elektronowym - Google Patents

Układ do detekcji elektronów w skaningowym mikroskopie elektronowym

Info

Publication number
PL363131A1
PL363131A1 PL03363131A PL36313103A PL363131A1 PL 363131 A1 PL363131 A1 PL 363131A1 PL 03363131 A PL03363131 A PL 03363131A PL 36313103 A PL36313103 A PL 36313103A PL 363131 A1 PL363131 A1 PL 363131A1
Authority
PL
Poland
Prior art keywords
electron microscope
scanning electron
system designed
detect electrons
electrons
Prior art date
Application number
PL03363131A
Other languages
English (en)
Other versions
PL208151B1 (pl
Inventor
Witold Słówko
Original Assignee
Politechnika Wrocławska
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Politechnika Wrocławska filed Critical Politechnika Wrocławska
Priority to PL363131A priority Critical patent/PL208151B1/pl
Priority to PCT/PL2004/000079 priority patent/WO2005041243A1/en
Priority to EP04775185A priority patent/EP1678734A1/en
Publication of PL363131A1 publication Critical patent/PL363131A1/pl
Priority to US11/410,208 priority patent/US7531812B2/en
Publication of PL208151B1 publication Critical patent/PL208151B1/pl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24435—Microchannel plates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
PL363131A 2003-10-27 2003-10-27 Układ do detekcji elektronów w skaningowym mikroskopie elektronowym PL208151B1 (pl)

Priority Applications (4)

Application Number Priority Date Filing Date Title
PL363131A PL208151B1 (pl) 2003-10-27 2003-10-27 Układ do detekcji elektronów w skaningowym mikroskopie elektronowym
PCT/PL2004/000079 WO2005041243A1 (en) 2003-10-27 2004-10-06 Electron detection system for a scanning electron microscope
EP04775185A EP1678734A1 (en) 2003-10-27 2004-10-06 Electron detection system for a scanning electron microscope
US11/410,208 US7531812B2 (en) 2003-10-27 2006-04-25 Method and system for the directional detection of electrons in a scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL363131A PL208151B1 (pl) 2003-10-27 2003-10-27 Układ do detekcji elektronów w skaningowym mikroskopie elektronowym

Publications (2)

Publication Number Publication Date
PL363131A1 true PL363131A1 (pl) 2005-05-02
PL208151B1 PL208151B1 (pl) 2011-03-31

Family

ID=34511363

Family Applications (1)

Application Number Title Priority Date Filing Date
PL363131A PL208151B1 (pl) 2003-10-27 2003-10-27 Układ do detekcji elektronów w skaningowym mikroskopie elektronowym

Country Status (3)

Country Link
EP (1) EP1678734A1 (pl)
PL (1) PL208151B1 (pl)
WO (1) WO2005041243A1 (pl)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PL217173B1 (pl) * 2008-07-14 2014-06-30 Politechnika Wroclawska Układ detekcyjny elektronów i skaningowy mikroskop elektronowy

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5990483A (en) * 1997-10-06 1999-11-23 El-Mul Technologies Ltd. Particle detection and particle detector devices
JP2002507045A (ja) * 1998-03-10 2002-03-05 エッサーズ、エリック 走査型電子顕微鏡
DE60105199T2 (de) * 2000-12-22 2005-08-11 Fei Co., Hillsboro Sem mit einem sekundärelektronendetektor mit einer zentralelektrode

Also Published As

Publication number Publication date
EP1678734A1 (en) 2006-07-12
PL208151B1 (pl) 2011-03-31
WO2005041243A1 (en) 2005-05-06

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