PL409775A1 - Chemical extraction method of semiconductor structure and insulation layer from electronic components - Google Patents

Chemical extraction method of semiconductor structure and insulation layer from electronic components

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Publication number
PL409775A1
PL409775A1 PL409775A PL40977514A PL409775A1 PL 409775 A1 PL409775 A1 PL 409775A1 PL 409775 A PL409775 A PL 409775A PL 40977514 A PL40977514 A PL 40977514A PL 409775 A1 PL409775 A1 PL 409775A1
Authority
PL
Poland
Prior art keywords
insulation layer
electronic components
semiconductor structure
mixture
chemical extraction
Prior art date
Application number
PL409775A
Other languages
Polish (pl)
Other versions
PL227418B1 (en
Inventor
Wojciech Stęplewski
Konrad Futera
Grażyna Kozioł
Aneta Araźna
Kamil Janeczek
Original Assignee
Instytut Tele- I Radiotechniczny
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Instytut Tele- I Radiotechniczny filed Critical Instytut Tele- I Radiotechniczny
Priority to PL409775A priority Critical patent/PL227418B1/en
Publication of PL409775A1 publication Critical patent/PL409775A1/en
Publication of PL227418B1 publication Critical patent/PL227418B1/en

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Weting (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

Sposób chemicznej ekstrakcji struktury półprzewodnikowej i warstwy izolacyjnej z podzespołów elektronicznych polega na tym, że badany podzespół umieszcza się w zlewce na płycie grzejnej, nagrzanej do temperatury 90°C, po czym zalewa się go roztworem trawiącym z mieszaniny stężonego kwasu azotowego i kwasu siarkowego w proporcji 1 :1 z dodatkiem kwasu solnego w ilości od 10 do 20 ml na 1 dcm3 mieszaniny lub z mieszaniny stężonego kwasu azotowego i stężonego kwasu solnego w proporcji HCl:HNO3:H2O 1:1:1, a proces wydzielenia struktury wykonuje się manualnie od spodniej części podzespołu elektronicznego poprzez selektywne trawienie najpierw metalowego podłoża a następnie kolejnych warstw podzespołu wraz z obudową.The method of chemical extraction of the semiconductor structure and the insulation layer from electronic components consists in the fact that the tested component is placed in a beaker on a hot plate, heated to 90 ° C, after which it is flooded with an etching solution from a mixture of concentrated nitric acid and sulfuric acid in proportion 1: 1 with the addition of hydrochloric acid in an amount of 10 to 20 ml per 1 dcm3 of the mixture or from a mixture of concentrated nitric acid and concentrated hydrochloric acid in the proportion of HCl: HNO3: H2O 1: 1: 1, and the process of separating the structure is performed manually from the bottom electronic component parts by selective etching first of the metal substrate and then subsequent layers of the component together with the casing.

PL409775A 2014-10-13 2014-10-13 Chemical extraction method of semiconductor structure and insulation layer from electronic components PL227418B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL409775A PL227418B1 (en) 2014-10-13 2014-10-13 Chemical extraction method of semiconductor structure and insulation layer from electronic components

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL409775A PL227418B1 (en) 2014-10-13 2014-10-13 Chemical extraction method of semiconductor structure and insulation layer from electronic components

Publications (2)

Publication Number Publication Date
PL409775A1 true PL409775A1 (en) 2016-04-25
PL227418B1 PL227418B1 (en) 2017-11-30

Family

ID=55762066

Family Applications (1)

Application Number Title Priority Date Filing Date
PL409775A PL227418B1 (en) 2014-10-13 2014-10-13 Chemical extraction method of semiconductor structure and insulation layer from electronic components

Country Status (1)

Country Link
PL (1) PL227418B1 (en)

Also Published As

Publication number Publication date
PL227418B1 (en) 2017-11-30

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