PT906635E - Processo para a utilizacao de um absorvente de gases nao vaporizavel - Google Patents

Processo para a utilizacao de um absorvente de gases nao vaporizavel

Info

Publication number
PT906635E
PT906635E PT97929213T PT97929213T PT906635E PT 906635 E PT906635 E PT 906635E PT 97929213 T PT97929213 T PT 97929213T PT 97929213 T PT97929213 T PT 97929213T PT 906635 E PT906635 E PT 906635E
Authority
PT
Portugal
Prior art keywords
gas absorbent
vaporizable
vaporizable gas
metal wall
chamber
Prior art date
Application number
PT97929213T
Other languages
English (en)
Inventor
Cristoforo Benvenuti
Original Assignee
Organisation Europ Pour Rech N
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Organisation Europ Pour Rech N filed Critical Organisation Europ Pour Rech N
Publication of PT906635E publication Critical patent/PT906635E/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H01J7/183—Composition or manufacture of getters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/14—Vacuum chambers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • Fats And Perfumes (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
  • Physical Vapour Deposition (AREA)
  • Thermal Insulation (AREA)
  • Finger-Pressure Massage (AREA)
PT97929213T 1996-06-19 1997-06-18 Processo para a utilizacao de um absorvente de gases nao vaporizavel PT906635E (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9607625A FR2750248B1 (fr) 1996-06-19 1996-06-19 Dispositif de pompage par getter non evaporable et procede de mise en oeuvre de ce getter

Publications (1)

Publication Number Publication Date
PT906635E true PT906635E (pt) 2003-07-31

Family

ID=9493210

Family Applications (1)

Application Number Title Priority Date Filing Date
PT97929213T PT906635E (pt) 1996-06-19 1997-06-18 Processo para a utilizacao de um absorvente de gases nao vaporizavel

Country Status (14)

Country Link
US (1) US6468043B1 (pt)
EP (1) EP0906635B1 (pt)
JP (1) JP4620187B2 (pt)
AT (1) ATE233946T1 (pt)
AU (1) AU3340497A (pt)
CA (1) CA2258118C (pt)
DE (1) DE69719507T2 (pt)
DK (1) DK0906635T3 (pt)
ES (1) ES2193382T3 (pt)
FR (1) FR2750248B1 (pt)
NO (1) NO317454B1 (pt)
PT (1) PT906635E (pt)
RU (1) RU2193254C2 (pt)
WO (1) WO1997049109A1 (pt)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1312248B1 (it) * 1999-04-12 2002-04-09 Getters Spa Metodo per aumentare la produttivita' di processi di deposizione distrati sottili su un substrato e dispositivi getter per la
US7315115B1 (en) 2000-10-27 2008-01-01 Canon Kabushiki Kaisha Light-emitting and electron-emitting devices having getter regions
IT1319141B1 (it) * 2000-11-28 2003-09-23 Getters Spa Unita' di accelerazione e focalizzazione, a vuoto migliorato, diimpiantatori ionici per la produzione di dispositivi a semiconduttore
ITMI20012389A1 (it) * 2001-11-12 2003-05-12 Getters Spa Catodo cavo con getter integrato per lampade a scarica e metodi per la sua realizzazione
DE10209423A1 (de) * 2002-03-05 2003-09-18 Schwerionenforsch Gmbh Beschichtung aus einer Gettermetall-Legierung sowie Anordnung und Verfahren zur Herstellung derselben
ITMI20031178A1 (it) * 2003-06-11 2004-12-12 Getters Spa Depositi multistrato getter non evaporabili ottenuti per
US7810491B2 (en) 2004-01-22 2010-10-12 European Organization for Nuclear Research-CERN Evacuable flat panel solar collector
US7888891B2 (en) * 2004-03-29 2011-02-15 National Cerebral And Cardiovascular Center Particle beam accelerator
RU2269838C1 (ru) * 2004-12-28 2006-02-10 Общество с ограниченной ответственностью "Ядерные технологии" Способ удаления активных газов и их смесей из замкнутого объема
GB0523838D0 (en) * 2005-11-23 2006-01-04 Oxford Instr Analytical Ltd X-Ray detector and method
ITMI20070301A1 (it) * 2007-02-16 2008-08-17 Getters Spa Supporti comprendenti materiali getter e sorgenti di metalli alcalini o alcalino-terrosi per sistemi di termoregolazione basati su effetto tunnel
EP1983548A1 (en) * 2007-04-20 2008-10-22 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Emitter chamber, charged particle apparatus and method for operating same
EP2071188A1 (en) 2007-12-10 2009-06-17 VARIAN S.p.A. Device for the deposition of non-evaporable getters (NEGs) and method of deposition using said device
BRPI0822888A8 (pt) * 2008-06-11 2019-01-22 Srb Energy Res Sarl painel solar a vácuo de alta eficácia
CN102691640B (zh) * 2012-05-29 2015-12-02 储琦 一种抽气系统及工艺
RU2513563C2 (ru) * 2012-08-17 2014-04-20 Федеральное государственное унитарное предприятие "Научно-производственное предприятие "Исток" (ФГУП "НПП "Исток") Спеченный неиспаряющийся геттер
JP6835592B2 (ja) 2014-06-26 2021-02-24 サエス・ゲッターズ・エッセ・ピ・ア ゲッターポンプシステム
DE102016123146A1 (de) 2016-06-03 2017-12-07 Movatec Gmbh Vakuumgerät und Verfahren zur Beschichtung von Bauteilen
EP3546748B1 (en) * 2016-11-28 2021-06-30 Inter-University Research Institute Corporation High Energy Accelerator Research Organization Non-evaporative getter-coated component, chamber, manufacturing method, and manufacturing apparatus
FR3072788B1 (fr) 2017-10-24 2020-05-29 Commissariat A L'energie Atomique Et Aux Energies Alternatives Source de rayonnement infrarouge modulable
JP7837011B2 (ja) 2021-05-20 2026-03-30 大学共同利用機関法人 高エネルギー加速器研究機構 非蒸発型ゲッタコーティング装置、非蒸発型ゲッタコーティング容器・配管の製造方法、非蒸発型ゲッタコーティング容器・配管
FR3128307A1 (fr) 2021-10-14 2023-04-21 Safran Electronics & Defense Getter non evaporable activable a faible temperature, dispositif de pompage et enceinte contenant un tel getter
CN116575005B (zh) * 2023-05-10 2024-01-16 中国科学院近代物理研究所 一种TiZrCo真空吸气剂薄膜及其制备方法与应用

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA622379A (en) * 1961-06-20 Union Carbide Corporation Getters
NL52890C (pt) * 1936-06-21
US2175695A (en) * 1937-11-27 1939-10-10 Gen Electric Gettering
BE476526A (pt) * 1946-10-05
GB828982A (en) * 1956-12-28 1960-02-24 Gen Electric Improvements in evacuated and gas-filled devices and methods of manufacturing
US3544829A (en) * 1968-02-03 1970-12-01 Tokyo Shibaura Electric Co Low pressure mercury vapour discharge lamp
US4038738A (en) * 1975-01-10 1977-08-02 Uddeholms Aktiebolag Method and means for the production of bar stock from metal powder
US4097195A (en) * 1975-02-12 1978-06-27 Varian Associates, Inc. High vacuum pump
US4050914A (en) * 1976-07-26 1977-09-27 S.A.E.S. Getters S.P.A. Accelerator for charged particles
JPS5459662A (en) * 1977-10-20 1979-05-14 Nippon Oxygen Co Ltd Preparation of thermos in metal
DE3814389A1 (de) * 1988-04-28 1989-11-09 Kernforschungsanlage Juelich Verfahren zur restgasminderung in hochvakuumanlagen durch getterschichten und deren erzeugung sowie entsprechend beschichtete hochvakuumanlagen
JPH03147298A (ja) * 1989-11-01 1991-06-24 Mitsubishi Electric Corp 加速器用真空容器
JPH03239869A (ja) * 1990-02-13 1991-10-25 Japan Steel Works Ltd:The 真空チャンバー
JP2967785B2 (ja) * 1990-04-24 1999-10-25 株式会社日本製鋼所 ゲツターポンプ装置
SU1814818A3 (ru) * 1990-12-25 1995-05-10 Институт металлургии и обогащения АН КазССР Способ формирования металлических покрытий на поверхности диэлектрика
JP2561570Y2 (ja) * 1991-08-06 1998-01-28 株式会社日本製鋼所 高真空排気装置
JP2721602B2 (ja) * 1991-08-26 1998-03-04 株式会社日本製鋼所 水素吸蔵合金による水素排気方法及び装置
EP0563465B1 (en) * 1991-12-10 1997-11-05 Shell Internationale Researchmaatschappij B.V. Process and apparatus for generating a vacuum
JP3290697B2 (ja) * 1992-04-30 2002-06-10 株式会社東芝 真空排気装置
IT1255438B (it) * 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
IT1255439B (it) * 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
JPH07233785A (ja) * 1994-02-23 1995-09-05 Ishikawajima Harima Heavy Ind Co Ltd 非蒸発型ゲッターポンプ
JP3309193B2 (ja) * 1994-03-17 2002-07-29 株式会社日立製作所 真空ダクト内表面処理方法および真空ダクト内表面処理装置
US5688708A (en) * 1996-06-24 1997-11-18 Motorola Method of making an ultra-high vacuum field emission display

Also Published As

Publication number Publication date
EP0906635B1 (fr) 2003-03-05
ES2193382T3 (es) 2003-11-01
JP2001503830A (ja) 2001-03-21
FR2750248B1 (fr) 1998-08-28
US6468043B1 (en) 2002-10-22
ATE233946T1 (de) 2003-03-15
AU3340497A (en) 1998-01-07
NO985927L (no) 1998-12-17
JP4620187B2 (ja) 2011-01-26
DE69719507D1 (de) 2003-04-10
DE69719507T2 (de) 2004-02-19
CA2258118C (fr) 2010-08-17
CA2258118A1 (fr) 1997-12-24
DK0906635T3 (da) 2003-06-23
EP0906635A1 (fr) 1999-04-07
WO1997049109A1 (fr) 1997-12-24
FR2750248A1 (fr) 1997-12-26
NO317454B1 (no) 2004-11-01
NO985927D0 (no) 1998-12-17
RU2193254C2 (ru) 2002-11-20

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