RU92003019A - METHOD OF CLEANING THE INTERNAL SURFACE OF QUARTZ PRODUCTS - Google Patents

METHOD OF CLEANING THE INTERNAL SURFACE OF QUARTZ PRODUCTS

Info

Publication number
RU92003019A
RU92003019A RU92003019/26A RU92003019A RU92003019A RU 92003019 A RU92003019 A RU 92003019A RU 92003019/26 A RU92003019/26 A RU 92003019/26A RU 92003019 A RU92003019 A RU 92003019A RU 92003019 A RU92003019 A RU 92003019A
Authority
RU
Russia
Prior art keywords
cleaning
plasma
internal surface
quartz products
workpiece
Prior art date
Application number
RU92003019/26A
Other languages
Russian (ru)
Other versions
RU2061804C1 (en
Inventor
А.М. Раскевич
В.И. Соколов
В.И. Шумило
О.Б. Яценко
В.К. Ергаков
В.Г. Вивдюк
Original Assignee
Воронежский государственный университет
Filing date
Publication date
Application filed by Воронежский государственный университет filed Critical Воронежский государственный университет
Priority to RU92003019A priority Critical patent/RU2061804C1/en
Priority claimed from RU92003019A external-priority patent/RU2061804C1/en
Publication of RU92003019A publication Critical patent/RU92003019A/en
Application granted granted Critical
Publication of RU2061804C1 publication Critical patent/RU2061804C1/en

Links

Claims (1)

Предложен способ очистки внутренней поверхности кварцевых изделий, который заключается в ионноплазменной обработке этой поверхности. Из состава плазмообразующей смеси исключены фторсодержащие компоненты и устранен контакт электродов, возбуждающих плазму, с обрабатываемым изделием. Плазма подается внутрь обрабатываемого изделия из внешнего источника, формирующего плазменную струю, и содержит только аргон и кислород.A method is proposed for cleaning the inner surface of quartz products, which consists in ion-plasma treatment of this surface. Fluorine-containing components are excluded from the composition of the plasma-forming mixture and the contact of the electrodes, which excite the plasma, with the workpiece is eliminated. Plasma is fed into the workpiece from an external source that forms a plasma jet, and contains only argon and oxygen.
RU92003019A 1992-10-26 1992-10-26 Method for cleaning of internal surfaces of quartz products RU2061804C1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU92003019A RU2061804C1 (en) 1992-10-26 1992-10-26 Method for cleaning of internal surfaces of quartz products

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU92003019A RU2061804C1 (en) 1992-10-26 1992-10-26 Method for cleaning of internal surfaces of quartz products

Publications (2)

Publication Number Publication Date
RU92003019A true RU92003019A (en) 1996-01-27
RU2061804C1 RU2061804C1 (en) 1996-06-10

Family

ID=20131247

Family Applications (1)

Application Number Title Priority Date Filing Date
RU92003019A RU2061804C1 (en) 1992-10-26 1992-10-26 Method for cleaning of internal surfaces of quartz products

Country Status (1)

Country Link
RU (1) RU2061804C1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2706978C2 (en) * 2018-04-28 2019-11-21 Публичное акционерное общество "Нефтяная компания "Роснефть" (ПАО "НК "Роснефть") Polymer flooding method in a weakly cemented manifold

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