SE521533C2 - Förfarande för att tillverka en rörlig struktur för en ljusformande enhet - Google Patents

Förfarande för att tillverka en rörlig struktur för en ljusformande enhet

Info

Publication number: SE521533C2
Authority: SE; Sweden
Prior art keywords: light; lens; forming; forming unit; micromechanical structure
Prior art date: 2002-11-05

Application number

SE0203266A

Other languages

English (en)

Swedish (sv)

Other versions

SE0203266L (sv

SE0203266D0 (sv

Inventor

Gert Andersson

Stefan Bengtsson

Sverker Haard

Anders Larsson

Fredrik Nikolajeff

Henrik Roedjegaard

Original Assignee

Imego Ab

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-11-05

Filing date

2002-11-05

Publication date

2003-11-11

2002-11-05 Application filed by Imego Ab filed Critical Imego Ab

2002-11-05 Priority to SE0203266A priority Critical patent/SE521533C2/sv

2002-11-05 Publication of SE0203266D0 publication Critical patent/SE0203266D0/xx

2003-11-04 Priority to JP2004549778A priority patent/JP4463108B2/ja

2003-11-04 Priority to DE60316977T priority patent/DE60316977T2/de

2003-11-04 Priority to EP03770199A priority patent/EP1558954B1/de

2003-11-04 Priority to AU2003278666A priority patent/AU2003278666A1/en

2003-11-04 Priority to PCT/SE2003/001709 priority patent/WO2004042442A1/en

2003-11-04 Priority to AT03770199T priority patent/ATE376199T1/de

2003-11-04 Priority to US10/531,274 priority patent/US8298457B2/en

2003-11-11 Publication of SE0203266L publication Critical patent/SE0203266L/xx

2003-11-11 Publication of SE521533C2 publication Critical patent/SE521533C2/sv

Links

238000004519 manufacturing process Methods 0.000 title claims abstract description 15
239000000463 material Substances 0.000 claims abstract description 36
238000000034 method Methods 0.000 claims abstract description 25
229910052710 silicon Inorganic materials 0.000 claims description 14
239000010703 silicon Substances 0.000 claims description 14
238000005530 etching Methods 0.000 claims description 13
238000004049 embossing Methods 0.000 claims description 9
229920000642 polymer Polymers 0.000 claims description 5
230000015572 biosynthetic process Effects 0.000 claims 1
238000000151 deposition Methods 0.000 claims 1
239000010410 layer Substances 0.000 description 27
238000007493 shaping process Methods 0.000 description 16
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
230000003287 optical effect Effects 0.000 description 10
239000000758 substrate Substances 0.000 description 9
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
229910052751 metal Inorganic materials 0.000 description 6
239000002184 metal Substances 0.000 description 6
CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
229910052759 nickel Inorganic materials 0.000 description 4
238000000206 photolithography Methods 0.000 description 4
XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
239000013307 optical fiber Substances 0.000 description 3
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
238000010276 construction Methods 0.000 description 2
229920002120 photoresistant polymer Polymers 0.000 description 2
CIBMHJPPKCXONB-UHFFFAOYSA-N propane-2,2-diol Chemical compound CC(C)(O)O CIBMHJPPKCXONB-UHFFFAOYSA-N 0.000 description 2
238000009420 retrofitting Methods 0.000 description 2
229910052814 silicon oxide Inorganic materials 0.000 description 2
238000009987 spinning Methods 0.000 description 2
238000005507 spraying Methods 0.000 description 2
VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
238000004026 adhesive bonding Methods 0.000 description 1
229910052782 aluminium Inorganic materials 0.000 description 1
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
238000005234 chemical deposition Methods 0.000 description 1
239000003795 chemical substances by application Substances 0.000 description 1
239000013078 crystal Substances 0.000 description 1
238000007598 dipping method Methods 0.000 description 1
230000008020 evaporation Effects 0.000 description 1
238000001704 evaporation Methods 0.000 description 1
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
239000010931 gold Substances 0.000 description 1
229910052737 gold Inorganic materials 0.000 description 1
238000001465 metallisation Methods 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
238000001020 plasma etching Methods 0.000 description 1
229920000052 poly(p-xylylene) Polymers 0.000 description 1
229920006254 polymer film Polymers 0.000 description 1
239000002861 polymer material Substances 0.000 description 1
239000011241 protective layer Substances 0.000 description 1
210000001525 retina Anatomy 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
239000002210 silicon-based material Substances 0.000 description 1
238000004544 sputter deposition Methods 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/00142—Bridges
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12102—Lens

Landscapes

Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Manufacturing & Machinery (AREA)
Microelectronics & Electronic Packaging (AREA)
Micromachines (AREA)
Eyeglasses (AREA)
Optical Couplings Of Light Guides (AREA)

SE0203266A 2002-11-05 2002-11-05 Förfarande för att tillverka en rörlig struktur för en ljusformande enhet SE521533C2 (sv)

Priority Applications (8)

Application Number	Priority Date	Filing Date	Title
SE0203266A SE521533C2 (sv)	2002-11-05	2002-11-05	Förfarande för att tillverka en rörlig struktur för en ljusformande enhet
JP2004549778A JP4463108B2 (ja)	2002-11-05	2003-11-04	光造形ユニットの可動構造の製造方法
DE60316977T DE60316977T2 (de)	2002-11-05	2003-11-04	Verfahren zur herstellung einer beweglichen linsenstruktur für eine lichtformungseinheit
EP03770199A EP1558954B1 (de)	2002-11-05	2003-11-04	Verfahren zur herstellung einer beweglichen linsenstruktur für eine lichtformungseinheit
AU2003278666A AU2003278666A1 (en)	2002-11-05	2003-11-04	Method of producing a movable lens structure for a light shaping unit
PCT/SE2003/001709 WO2004042442A1 (en)	2002-11-05	2003-11-04	Method of producing a movable lens structure for a light shaping unit
AT03770199T ATE376199T1 (de)	2002-11-05	2003-11-04	Verfahren zur herstellung einer beweglichen linsenstruktur für eine lichtformungseinheit
US10/531,274 US8298457B2 (en)	2002-11-05	2003-11-04	Method of producing a movable lens structure for a light shaping unit

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
SE0203266A SE521533C2 (sv)	2002-11-05	2002-11-05	Förfarande för att tillverka en rörlig struktur för en ljusformande enhet

Publications (3)

Publication Number	Publication Date
SE0203266D0 SE0203266D0 (sv)	2002-11-05
SE0203266L SE0203266L (sv)	2003-11-11
SE521533C2 true SE521533C2 (sv)	2003-11-11

Family

ID=20289471

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
SE0203266A SE521533C2 (sv)	2002-11-05	2002-11-05	Förfarande för att tillverka en rörlig struktur för en ljusformande enhet

Country Status (8)

Country	Link
US (1)	US8298457B2 (de)
EP (1)	EP1558954B1 (de)
JP (1)	JP4463108B2 (de)
AT (1)	ATE376199T1 (de)
AU (1)	AU2003278666A1 (de)
DE (1)	DE60316977T2 (de)
SE (1)	SE521533C2 (de)
WO (1)	WO2004042442A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP5035188B2 (ja) *	2008-09-10	2012-09-26	コニカミノルタホールディングス株式会社	撮像装置の製造方法および撮像装置
US8675293B2 (en) *	2010-01-25	2014-03-18	Axsun Technologies, Inc.	SOI lens structure for medical probe
US10281715B2 (en) *	2015-06-16	2019-05-07	Young Optics Inc.	Imaging displacement module

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE4423396C2 (de) *	1994-07-04	2001-10-25	Fraunhofer Ges Forschung	Verfahren zum Herstellen einer mikromechanischen Oberflächenstruktur
FR2734065B1 (fr) *	1995-05-12	1997-06-06	Commissariat Energie Atomique	Composants microoptiques et microdeflecteurs optomecaniques a deplacement de microlentilles
DE19600399C1 (de) *	1996-01-08	1997-08-21	Siemens Ag	Herstellverfahren für ein mikromechanisches Bauteil mit einer beweglichen Struktur
FR2747802B1 (fr) *	1996-04-18	1998-05-15	Commissariat Energie Atomique	Microdispositif optomecanique, et application a un microdeflecteur optomecanique
US6446467B1 (en) *	1997-07-29	2002-09-10	Physical Optics Corporation	Monolithic glass light shaping diffuser and method for its production
JPH1172723A (ja)	1997-08-29	1999-03-16	Omron Corp	マイクロ光学素子，機能素子ユニット，およびこれらの製造方法
US6054335A (en) *	1997-12-12	2000-04-25	Xerox Corporation	Fabrication of scanning III-V compound light emitters integrated with Si-based actuators
US6074888A (en) *	1998-08-18	2000-06-13	Trw Inc.	Method for fabricating semiconductor micro epi-optical components
US6091537A (en) *	1998-12-11	2000-07-18	Xerox Corporation	Electro-actuated microlens assemblies
JP2001155201A (ja) *	1999-11-25	2001-06-08	Yazaki Corp	運行記録計用記録紙

2002
- 2002-11-05 SE SE0203266A patent/SE521533C2/sv not_active IP Right Cessation
2003
- 2003-11-04 US US10/531,274 patent/US8298457B2/en not_active Expired - Fee Related
- 2003-11-04 DE DE60316977T patent/DE60316977T2/de not_active Expired - Lifetime
- 2003-11-04 EP EP03770199A patent/EP1558954B1/de not_active Expired - Lifetime
- 2003-11-04 WO PCT/SE2003/001709 patent/WO2004042442A1/en not_active Ceased
- 2003-11-04 AU AU2003278666A patent/AU2003278666A1/en not_active Abandoned
- 2003-11-04 JP JP2004549778A patent/JP4463108B2/ja not_active Expired - Fee Related
- 2003-11-04 AT AT03770199T patent/ATE376199T1/de not_active IP Right Cessation

Also Published As

Publication number	Publication date
WO2004042442A1 (en)	2004-05-21
DE60316977T2 (de)	2008-07-31
AU2003278666A1 (en)	2004-06-07
SE0203266L (sv)	2003-11-11
JP4463108B2 (ja)	2010-05-12
US20060012849A1 (en)	2006-01-19
ATE376199T1 (de)	2007-11-15
EP1558954A1 (de)	2005-08-03
SE0203266D0 (sv)	2002-11-05
JP2006505428A (ja)	2006-02-16
DE60316977D1 (de)	2007-11-29
EP1558954B1 (de)	2007-10-17
US8298457B2 (en)	2012-10-30

Legal Events

Date	Code	Title	Description
2008-07-15	NUG	Patent has lapsed

Publication	Publication Date	Title
US5447600A (en)	1995-09-05	Polymeric coatings for micromechanical devices
US6275320B1 (en)	2001-08-14	MEMS variable optical attenuator
US4943032A (en)	1990-07-24	Integrated, microminiature electric to fluidic valve and pressure/flow regulator
EP0261972A2 (de)	1988-03-30	Integriertes, elektrisch ansteuerbares, fluidisches Mikrominiaturventil und Druck-/Durchflussregulator sowie Verfahren zu dessen Herstellung
Niklaus et al.	2003	Arrays of monocrystalline silicon micromirrors fabricated using CMOS compatible transfer bonding
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