ATE376199T1 - Verfahren zur herstellung einer beweglichen linsenstruktur für eine lichtformungseinheit - Google Patents

Verfahren zur herstellung einer beweglichen linsenstruktur für eine lichtformungseinheit

Info

Publication number
ATE376199T1
ATE376199T1 AT03770199T AT03770199T ATE376199T1 AT E376199 T1 ATE376199 T1 AT E376199T1 AT 03770199 T AT03770199 T AT 03770199T AT 03770199 T AT03770199 T AT 03770199T AT E376199 T1 ATE376199 T1 AT E376199T1
Authority
AT
Austria
Prior art keywords
producing
lens
forming
movable lens
lens structure
Prior art date
Application number
AT03770199T
Other languages
English (en)
Inventor
Gert Andersson
Stefan Bengtsson
Sverker Hard
Anders Larsson
Fredrik Nikolajeff
Henrik Roedjegard
Original Assignee
Imego Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imego Ab filed Critical Imego Ab
Application granted granted Critical
Publication of ATE376199T1 publication Critical patent/ATE376199T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00142—Bridges
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12102—Lens

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Eyeglasses (AREA)
  • Optical Couplings Of Light Guides (AREA)
AT03770199T 2002-11-05 2003-11-04 Verfahren zur herstellung einer beweglichen linsenstruktur für eine lichtformungseinheit ATE376199T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0203266A SE521533C2 (sv) 2002-11-05 2002-11-05 Förfarande för att tillverka en rörlig struktur för en ljusformande enhet

Publications (1)

Publication Number Publication Date
ATE376199T1 true ATE376199T1 (de) 2007-11-15

Family

ID=20289471

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03770199T ATE376199T1 (de) 2002-11-05 2003-11-04 Verfahren zur herstellung einer beweglichen linsenstruktur für eine lichtformungseinheit

Country Status (8)

Country Link
US (1) US8298457B2 (de)
EP (1) EP1558954B1 (de)
JP (1) JP4463108B2 (de)
AT (1) ATE376199T1 (de)
AU (1) AU2003278666A1 (de)
DE (1) DE60316977T2 (de)
SE (1) SE521533C2 (de)
WO (1) WO2004042442A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5035188B2 (ja) * 2008-09-10 2012-09-26 コニカミノルタホールディングス株式会社 撮像装置の製造方法および撮像装置
US8675293B2 (en) * 2010-01-25 2014-03-18 Axsun Technologies, Inc. SOI lens structure for medical probe
US10281715B2 (en) * 2015-06-16 2019-05-07 Young Optics Inc. Imaging displacement module

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4423396C2 (de) * 1994-07-04 2001-10-25 Fraunhofer Ges Forschung Verfahren zum Herstellen einer mikromechanischen Oberflächenstruktur
FR2734065B1 (fr) * 1995-05-12 1997-06-06 Commissariat Energie Atomique Composants microoptiques et microdeflecteurs optomecaniques a deplacement de microlentilles
DE19600399C1 (de) * 1996-01-08 1997-08-21 Siemens Ag Herstellverfahren für ein mikromechanisches Bauteil mit einer beweglichen Struktur
FR2747802B1 (fr) * 1996-04-18 1998-05-15 Commissariat Energie Atomique Microdispositif optomecanique, et application a un microdeflecteur optomecanique
US6446467B1 (en) * 1997-07-29 2002-09-10 Physical Optics Corporation Monolithic glass light shaping diffuser and method for its production
JPH1172723A (ja) 1997-08-29 1999-03-16 Omron Corp マイクロ光学素子，機能素子ユニット，およびこれらの製造方法
US6054335A (en) * 1997-12-12 2000-04-25 Xerox Corporation Fabrication of scanning III-V compound light emitters integrated with Si-based actuators
US6074888A (en) * 1998-08-18 2000-06-13 Trw Inc. Method for fabricating semiconductor micro epi-optical components
US6091537A (en) * 1998-12-11 2000-07-18 Xerox Corporation Electro-actuated microlens assemblies
JP2001155201A (ja) * 1999-11-25 2001-06-08 Yazaki Corp 運行記録計用記録紙

Also Published As

Publication number Publication date
WO2004042442A1 (en) 2004-05-21
DE60316977T2 (de) 2008-07-31
AU2003278666A1 (en) 2004-06-07
SE0203266L (sv) 2003-11-11
JP4463108B2 (ja) 2010-05-12
SE521533C2 (sv) 2003-11-11
US20060012849A1 (en) 2006-01-19
EP1558954A1 (de) 2005-08-03
SE0203266D0 (sv) 2002-11-05
JP2006505428A (ja) 2006-02-16
DE60316977D1 (de) 2007-11-29
EP1558954B1 (de) 2007-10-17
US8298457B2 (en) 2012-10-30

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