SG155990A1 - Method and system for packaging a mems device - Google Patents

Method and system for packaging a mems device

Info

Publication number
SG155990A1
SG155990A1 SG200906434-6A SG2009064346A SG155990A1 SG 155990 A1 SG155990 A1 SG 155990A1 SG 2009064346 A SG2009064346 A SG 2009064346A SG 155990 A1 SG155990 A1 SG 155990A1
Authority
SG
Singapore
Prior art keywords
backplate
packaging
array
transparent substrate
mems device
Prior art date
Application number
SG200906434-6A
Other languages
English (en)
Inventor
Mark W Miles
Jeffrey B Sampsell
Lauren Palmateer
Brian W Arbuckle
Philip D Floyd
Original Assignee
Idc Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idc Llc filed Critical Idc Llc
Publication of SG155990A1 publication Critical patent/SG155990A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00222—Integrating an electronic processing unit with a micromechanical structure
    • B81C1/0023—Packaging together an electronic processing unit die and a micromechanical structure die
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3406—Control of illumination source
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Nonlinear Science (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
SG200906434-6A 2004-09-27 2005-07-20 Method and system for packaging a mems device SG155990A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US61327504P 2004-09-27 2004-09-27
US61348904P 2004-09-27 2004-09-27
US61349304P 2004-09-27 2004-09-27
US61347704P 2004-09-27 2004-09-27
US11/045,800 US7184202B2 (en) 2004-09-27 2005-01-28 Method and system for packaging a MEMS device

Publications (1)

Publication Number Publication Date
SG155990A1 true SG155990A1 (en) 2009-10-29

Family

ID=35478377

Family Applications (2)

Application Number Title Priority Date Filing Date
SG200906434-6A SG155990A1 (en) 2004-09-27 2005-07-20 Method and system for packaging a mems device
SG200504524A SG121038A1 (en) 2004-09-27 2005-07-20 Method and system for packaging a mems device

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG200504524A SG121038A1 (en) 2004-09-27 2005-07-20 Method and system for packaging a mems device

Country Status (11)

Country Link
US (4) US7184202B2 (fr)
EP (2) EP2202559A3 (fr)
JP (4) JP4813840B2 (fr)
KR (3) KR20060087381A (fr)
CN (2) CN1755473B (fr)
AU (1) AU2005203319A1 (fr)
BR (1) BRPI0503869A (fr)
CA (1) CA2513030A1 (fr)
MX (1) MXPA05010092A (fr)
MY (1) MY146848A (fr)
SG (2) SG155990A1 (fr)

Families Citing this family (171)

* Cited by examiner, † Cited by third party
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JP4813840B2 (ja) 2011-11-09
US20120140312A1 (en) 2012-06-07
US20070247693A1 (en) 2007-10-25
JP2013080235A (ja) 2013-05-02
KR20120046130A (ko) 2012-05-09
US20090257109A1 (en) 2009-10-15
CN102169229A (zh) 2011-08-31
MY146848A (en) 2012-09-28
CN1755473B (zh) 2011-05-18
JP2015156025A (ja) 2015-08-27
JP5356333B2 (ja) 2013-12-04
EP2202559A3 (fr) 2012-08-01
KR20120114192A (ko) 2012-10-16
KR101406744B1 (ko) 2014-06-17
CA2513030A1 (fr) 2006-03-27
KR20060087381A (ko) 2006-08-02
US20060077533A1 (en) 2006-04-13
JP2006091849A (ja) 2006-04-06
EP2202559A2 (fr) 2010-06-30
SG121038A1 (en) 2006-04-26
US8115983B2 (en) 2012-02-14
EP1640774A1 (fr) 2006-03-29
US7184202B2 (en) 2007-02-27
JP2011018054A (ja) 2011-01-27
CN1755473A (zh) 2006-04-05
US7518775B2 (en) 2009-04-14
AU2005203319A1 (en) 2006-04-13
MXPA05010092A (es) 2006-04-27
BRPI0503869A (pt) 2006-05-16

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