SG55295A1 - Apparatus and method for shaping polishing pads - Google Patents

Apparatus and method for shaping polishing pads

Info

Publication number
SG55295A1
SG55295A1 SG1997001022A SG1997001022A SG55295A1 SG 55295 A1 SG55295 A1 SG 55295A1 SG 1997001022 A SG1997001022 A SG 1997001022A SG 1997001022 A SG1997001022 A SG 1997001022A SG 55295 A1 SG55295 A1 SG 55295A1
Authority
SG
Singapore
Prior art keywords
polishing pads
shaping polishing
shaping
pads
polishing
Prior art date
Application number
SG1997001022A
Other languages
English (en)
Inventor
Robert J Walsh
Original Assignee
Memc Electronic Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Memc Electronic Materials filed Critical Memc Electronic Materials
Publication of SG55295A1 publication Critical patent/SG55295A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
SG1997001022A 1996-04-26 1997-04-01 Apparatus and method for shaping polishing pads SG55295A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/639,185 US5840202A (en) 1996-04-26 1996-04-26 Apparatus and method for shaping polishing pads

Publications (1)

Publication Number Publication Date
SG55295A1 true SG55295A1 (en) 1998-12-21

Family

ID=24563073

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1997001022A SG55295A1 (en) 1996-04-26 1997-04-01 Apparatus and method for shaping polishing pads

Country Status (8)

Country Link
US (1) US5840202A (ja)
EP (1) EP0803327A3 (ja)
JP (1) JPH1071558A (ja)
KR (1) KR970072158A (ja)
CN (1) CN1076249C (ja)
MY (1) MY133665A (ja)
SG (1) SG55295A1 (ja)
TW (1) TW330881B (ja)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10235552A (ja) 1997-02-24 1998-09-08 Ebara Corp ポリッシング装置
US6120350A (en) * 1999-03-31 2000-09-19 Memc Electronic Materials, Inc. Process for reconditioning polishing pads
US6135863A (en) * 1999-04-20 2000-10-24 Memc Electronic Materials, Inc. Method of conditioning wafer polishing pads
US6293139B1 (en) 1999-11-03 2001-09-25 Memc Electronic Materials, Inc. Method of determining performance characteristics of polishing pads
US6432823B1 (en) * 1999-11-04 2002-08-13 International Business Machines Corporation Off-concentric polishing system design
KR100383324B1 (ko) * 2000-11-24 2003-05-12 삼성전자주식회사 반도체 장치의 제조에서 연마 패드 검사 방법과 이를 수행하기 위한 검사 장치 및 이를 채용한 연마 장치.
JP4058904B2 (ja) * 2000-12-19 2008-03-12 株式会社Ｓｕｍｃｏ 研磨布のドレッシング方法、半導体ウェーハの研磨方法及び研磨装置
CN1792553B (zh) * 2005-12-30 2010-05-12 广东工业大学 抛光垫修整装置及修整方法
CN100441377C (zh) * 2006-12-05 2008-12-10 中国科学院上海光学精密机械研究所 用于环行抛光机的校正板
KR102211533B1 (ko) * 2013-10-23 2021-02-03 어플라이드 머티어리얼스, 인코포레이티드 국소 영역 레이트 제어를 구비하는 폴리싱 시스템
US9751189B2 (en) 2014-07-03 2017-09-05 Applied Materials, Inc. Compliant polishing pad and polishing module
WO2017165046A1 (en) * 2016-03-25 2017-09-28 Applied Materials, Inc. Polishing system with local area rate control and oscillation mode
KR102666494B1 (ko) * 2016-03-25 2024-05-17 어플라이드 머티어리얼스, 인코포레이티드 국부 영역 연마 시스템 및 연마 시스템용 연마 패드 조립체들
CN106078413B (zh) * 2016-06-28 2018-12-25 东莞捷荣技术股份有限公司 一种平面打磨无动力辅助转动装置及打磨机
US9802293B1 (en) * 2016-09-29 2017-10-31 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Method to shape the surface of chemical mechanical polishing pads
CN106392884B (zh) * 2016-12-14 2019-10-18 北京中电科电子装备有限公司 一种砂轮的修整控制系统及方法
JP6924710B2 (ja) * 2018-01-09 2021-08-25 信越半導体株式会社 研磨装置および研磨方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH640766A5 (en) * 1981-07-16 1984-01-31 Raymond Ansermoz Lapping machine
JPS59129663A (ja) * 1983-01-18 1984-07-26 Toshiba Corp ウエハラツピング装置
JPS6190868A (ja) * 1984-10-08 1986-05-09 Toshiba Corp 研磨装置
US4720938A (en) * 1986-07-31 1988-01-26 General Signal Corp. Dressing fixture
JPS63283859A (ja) * 1987-05-13 1988-11-21 Hitachi Ltd ウェハ研磨用治具
DE3926673A1 (de) * 1989-08-11 1991-02-14 Wacker Chemitronic Verfahren und vorrichtung zur poliertuchaufbereitung beim chemomechanischen polieren, insbesondere von halbleiterscheiben
US5081051A (en) * 1990-09-12 1992-01-14 Intel Corporation Method for conditioning the surface of a polishing pad
JP3173041B2 (ja) * 1991-05-15 2001-06-04 不二越機械工業株式会社 ドレッサー付きウェハー研磨装置及びその研磨布表面のドレッシング方法
JPH05228829A (ja) * 1992-02-19 1993-09-07 Mitsubishi Materials Corp ウェーハ研磨装置
US5216843A (en) * 1992-09-24 1993-06-08 Intel Corporation Polishing pad conditioning apparatus for wafer planarization process
US5384986A (en) * 1992-09-24 1995-01-31 Ebara Corporation Polishing apparatus
JP2622069B2 (ja) * 1993-06-30 1997-06-18 三菱マテリアル株式会社 研磨布のドレッシング装置
US5456627A (en) * 1993-12-20 1995-10-10 Westech Systems, Inc. Conditioner for a polishing pad and method therefor
US5486131A (en) * 1994-01-04 1996-01-23 Speedfam Corporation Device for conditioning polishing pads
US5650039A (en) * 1994-03-02 1997-07-22 Applied Materials, Inc. Chemical mechanical polishing apparatus with improved slurry distribution
JPH07299738A (ja) * 1994-05-11 1995-11-14 Mitsubishi Materials Corp ウエハ研磨装置
US5534106A (en) * 1994-07-26 1996-07-09 Kabushiki Kaisha Toshiba Apparatus for processing semiconductor wafers
JP3637977B2 (ja) * 1995-01-19 2005-04-13 株式会社荏原製作所 ポリッシングの終点検知方法

Also Published As

Publication number Publication date
TW330881B (en) 1998-05-01
EP0803327A3 (en) 1998-08-19
US5840202A (en) 1998-11-24
CN1167667A (zh) 1997-12-17
JPH1071558A (ja) 1998-03-17
CN1076249C (zh) 2001-12-19
EP0803327A2 (en) 1997-10-29
MY133665A (en) 2007-11-30
KR970072158A (ko) 1997-11-07

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