SU1056815A1 - Способ изготовления защитных свинцово-силикатных пленок на поверхности кремния - Google Patents
Способ изготовления защитных свинцово-силикатных пленок на поверхности кремнияInfo
- Publication number
- SU1056815A1 SU1056815A1 SU3443384/25A SU3443384A SU1056815A1 SU 1056815 A1 SU1056815 A1 SU 1056815A1 SU 3443384/25 A SU3443384/25 A SU 3443384/25A SU 3443384 A SU3443384 A SU 3443384A SU 1056815 A1 SU1056815 A1 SU 1056815A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- silicon surface
- silicate films
- protective lead
- making protective
- lead
- Prior art date
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract 3
- 229910052710 silicon Inorganic materials 0.000 title abstract 3
- 239000010703 silicon Substances 0.000 title abstract 3
- 230000001681 protective effect Effects 0.000 title abstract 2
- 229910000464 lead oxide Inorganic materials 0.000 abstract 2
- 238000002844 melting Methods 0.000 abstract 2
- 230000008018 melting Effects 0.000 abstract 2
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 abstract 2
- 239000000843 powder Substances 0.000 abstract 2
- 238000000137 annealing Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
Landscapes
- Formation Of Insulating Films (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Способ изготовления защитных свинцово-силикатных пленок на поверхности кремния, включающий нанесение на поверхность кремния слоя порошка окиси свинца, оплавление порошка и последующий отжиг пленки при 500C, отличающийся тем, что, с целью повышения надежности свойств пленок путем управления их составом, порошок окиси свинца наносят слоем толщиной 0,06 - 0,5 мм, а оплавление проводят при 750 - 900C в течение не менее одного часа.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU3443384/25A SU1056815A1 (ru) | 1982-02-10 | 1982-02-10 | Способ изготовления защитных свинцово-силикатных пленок на поверхности кремния |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU3443384/25A SU1056815A1 (ru) | 1982-02-10 | 1982-02-10 | Способ изготовления защитных свинцово-силикатных пленок на поверхности кремния |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU1056815A1 true SU1056815A1 (ru) | 2000-06-20 |
Family
ID=60518643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU3443384/25A SU1056815A1 (ru) | 1982-02-10 | 1982-02-10 | Способ изготовления защитных свинцово-силикатных пленок на поверхности кремния |
Country Status (1)
| Country | Link |
|---|---|
| SU (1) | SU1056815A1 (ru) |
-
1982
- 1982-02-10 SU SU3443384/25A patent/SU1056815A1/ru active
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