TW200413270A - Ceramic and method for production thereof - Google Patents

Ceramic and method for production thereof Download PDF

Info

Publication number
TW200413270A
TW200413270A TW092124961A TW92124961A TW200413270A TW 200413270 A TW200413270 A TW 200413270A TW 092124961 A TW092124961 A TW 092124961A TW 92124961 A TW92124961 A TW 92124961A TW 200413270 A TW200413270 A TW 200413270A
Authority
TW
Taiwan
Prior art keywords
weight
patent application
scope
oxide
item
Prior art date
Application number
TW092124961A
Other languages
English (en)
Chinese (zh)
Inventor
Yoshiharu Okiyama
Ryo Yamaguchi
Original Assignee
Sodick Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sodick Co Ltd filed Critical Sodick Co Ltd
Publication of TW200413270A publication Critical patent/TW200413270A/zh

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • C04B35/111Fine ceramics
    • C04B35/117Composites
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3201Alkali metal oxides or oxide-forming salts thereof
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3206Magnesium oxides or oxide-forming salts thereof
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3208Calcium oxide or oxide-forming salts thereof, e.g. lime
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3208Calcium oxide or oxide-forming salts thereof, e.g. lime
    • C04B2235/3212Calcium phosphates, e.g. hydroxyapatite
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3217Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3217Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
    • C04B2235/3222Aluminates other than alumino-silicates, e.g. spinel (MgAl2O4)
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3232Titanium oxides or titanates, e.g. rutile or anatase
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3232Titanium oxides or titanates, e.g. rutile or anatase
    • C04B2235/3234Titanates, not containing zirconia
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3262Manganese oxides, manganates, rhenium oxides or oxide-forming salts thereof, e.g. MnO
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/327Iron group oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3272Iron oxides or oxide forming salts thereof, e.g. hematite, magnetite
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/34Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3418Silicon oxide, silicic acids or oxide forming salts thereof, e.g. silica sol, fused silica, silica fume, cristobalite, quartz or flint
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/34Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3427Silicates other than clay, e.g. water glass
    • C04B2235/3463Alumino-silicates other than clay, e.g. mullite
    • C04B2235/3481Alkaline earth metal alumino-silicates other than clay, e.g. cordierite, beryl, micas such as margarite, plagioclase feldspars such as anorthite, zeolites such as chabazite
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/34Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/349Clays, e.g. bentonites, smectites such as montmorillonite, vermiculites or kaolines, e.g. illite, talc or sepiolite
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74Physical characteristics
    • C04B2235/77Density
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/80Phases present in the sintered or melt-cast ceramic products other than the main phase
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/963Surface properties, e.g. surface roughness
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/9646Optical properties

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Composite Materials (AREA)
  • Compositions Of Oxide Ceramics (AREA)
TW092124961A 2002-09-12 2003-09-10 Ceramic and method for production thereof TW200413270A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002267186A JP4248833B2 (ja) 2002-09-12 2002-09-12 セラミックス及びその製造方法

Publications (1)

Publication Number Publication Date
TW200413270A true TW200413270A (en) 2004-08-01

Family

ID=31986693

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092124961A TW200413270A (en) 2002-09-12 2003-09-10 Ceramic and method for production thereof

Country Status (7)

Country Link
US (1) US7091146B2 (de)
EP (1) EP1538132B1 (de)
JP (1) JP4248833B2 (de)
KR (1) KR100961629B1 (de)
CN (1) CN1296313C (de)
TW (1) TW200413270A (de)
WO (1) WO2004024649A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI554484B (zh) * 2014-04-15 2016-10-21 瑞法克托瑞智產股份有限公司 耐火性陶瓷批料、此種批料之用途及冶金熔融容器

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1309681C (zh) * 2005-08-10 2007-04-11 武汉科技大学 一种合成锰铝尖晶石及其制备方法
JP2010177415A (ja) * 2009-01-29 2010-08-12 Kyocera Corp 保持用治具およびこれを備えた吸着装置
WO2010095719A1 (ja) 2009-02-23 2010-08-26 株式会社ソディック 着色セラミック真空チャックおよびその製造方法
JP5396353B2 (ja) * 2009-09-17 2014-01-22 日本碍子株式会社 静電チャック及びその製法
CN101962287B (zh) * 2010-09-14 2012-10-17 石家庄铁道大学 可加工的氧化铝基复合陶瓷材料及其制备方法
JP4989792B2 (ja) * 2010-11-01 2012-08-01 昭和電工株式会社 アルミナ質焼結体の製造方法、アルミナ質焼結体、砥粒、及び砥石
JP4976602B2 (ja) 2010-11-01 2012-07-18 昭和電工株式会社 アルミナ質焼結体、砥粒、及び砥石
EP2636655B1 (de) * 2010-11-01 2016-07-20 Showa Denko K.K. Tonerde-sinterkörper, schleifkörner und schleifstein
JP6056312B2 (ja) * 2011-12-02 2017-01-11 Toto株式会社 半導電性セラミックス焼結体
JP5998787B2 (ja) * 2011-12-02 2016-09-28 Toto株式会社 半導電性セラミックス焼結体
JP6017895B2 (ja) * 2012-09-03 2016-11-02 日本特殊陶業株式会社 アルミナ質焼結体の製造方法、真空チャックの製造方法、及び静電チャックの製造方法
JP6088346B2 (ja) * 2013-05-09 2017-03-01 新光電気工業株式会社 静電チャック及び半導体製造装置
CN107663080B (zh) * 2016-07-27 2020-05-08 北京华卓精科科技股份有限公司 应用于j-r型静电卡盘的氧化铝陶瓷及其制备方法
RU2633463C1 (ru) * 2016-07-29 2017-10-12 Общество с ограниченной ответственностью "АЛОКС" СПОСОБ ПРИГОТОВЛЕНИЯ ШИХТЫ ДЛЯ КОРУНДОВОЙ КЕРАМИКИ (варианты)
WO2018124024A1 (ja) * 2016-12-26 2018-07-05 京セラ株式会社 耐食性部材
US10585358B2 (en) * 2017-09-19 2020-03-10 Corning Incorpotated Method for manufacturing a flat polymer coated electrostatic chuck
CN108395222B (zh) * 2018-03-15 2021-09-17 江苏瓷光光电有限公司 一种反射式激光显示用光转换、散热一体化陶瓷材料及其制备方法
CN108649148B (zh) * 2018-06-20 2021-05-14 上海定向材料科技有限公司 一种瘠性钛酸铝复合材料匣钵的制备方法
KR102188831B1 (ko) * 2018-12-12 2020-12-09 한국세라믹기술원 산화티탄-산화망간 복합 세라믹스의 제조방법
JP7194306B1 (ja) 2022-07-27 2022-12-21 黒崎播磨株式会社 アルミナ焼結体及び静電チャック
TWI882549B (zh) * 2022-11-29 2025-05-01 日商京瓷股份有限公司 陶瓷燒結體

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5424118B1 (de) * 1968-10-18 1979-08-18
JPS60176966A (ja) * 1984-02-20 1985-09-11 日本特殊陶業株式会社 着色アルミナ磁器組成物
JPH0697675B2 (ja) 1985-10-21 1994-11-30 東陶機器株式会社 静電チャック基盤
US4714640A (en) * 1986-02-04 1987-12-22 General Electric Co. (Alumina electrically conductive) guide article
JPS6422225A (en) 1987-07-17 1989-01-25 Matsushita Electric Industrial Co Ltd Electric cleaner equipped with rotary brush
DE68909665T2 (de) * 1988-04-26 1994-02-10 Toto Ltd Verfahren zur Herstellung dielektrischer Keramik für elektrostatische Haltevorrichtungen.
JPH0867553A (ja) * 1994-08-29 1996-03-12 Kyocera Corp 電子銃用アルミナ質焼結体
US5830819A (en) * 1994-04-20 1998-11-03 Kyocera Corporation Alumina sintered product
JPH08262090A (ja) 1995-03-18 1996-10-11 Tokyo Electron Ltd 液晶表示体用基板の検査装置
JPH08139168A (ja) 1994-11-10 1996-05-31 Toto Ltd 露光用保持治具
US5658838A (en) * 1995-03-17 1997-08-19 Norton Desmarquest Fine Ceramics Alumina-based ceramic for sintering, method of manufacture and sliding parts obtained thereby
JP3769081B2 (ja) 1996-09-24 2006-04-19 新日本製鐵株式会社 黒色AlN系セラミックスの製造方法
JPH11189458A (ja) 1997-12-26 1999-07-13 Kyocera Corp 半導電性セラミックス及びその製造方法
JPH11245133A (ja) 1998-02-27 1999-09-14 Alps Electric Co Ltd スライダ製造用治具
JP3133302B2 (ja) 1999-06-29 2001-02-05 新日本製鐵株式会社 黒色低熱膨張セラミックス焼結体及びその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI554484B (zh) * 2014-04-15 2016-10-21 瑞法克托瑞智產股份有限公司 耐火性陶瓷批料、此種批料之用途及冶金熔融容器
US10239791B2 (en) 2014-04-15 2019-03-26 Refractory Intellectual Property Gmbh & Co. Kg Refractory ceramic batch composition, use of a batch composition of this type, and metallurgical melting vessel

Also Published As

Publication number Publication date
JP2004099413A (ja) 2004-04-02
EP1538132B1 (de) 2013-07-24
CN1622924A (zh) 2005-06-01
KR100961629B1 (ko) 2010-06-09
US7091146B2 (en) 2006-08-15
EP1538132A4 (de) 2009-09-02
WO2004024649A1 (ja) 2004-03-25
KR20050052489A (ko) 2005-06-02
CN1296313C (zh) 2007-01-24
EP1538132A1 (de) 2005-06-08
JP4248833B2 (ja) 2009-04-02
US20040266606A1 (en) 2004-12-30

Similar Documents

Publication Publication Date Title
TW200413270A (en) Ceramic and method for production thereof
KR101344594B1 (ko) 스퍼터링 타겟, 그것을 이용한 비정질 산화물 박막의 형성 방법, 및 박막 트랜지스터의 제조 방법
CN102639463B (zh) 陶瓷材料、半导体制造装置用构件、溅射靶材及陶瓷材料的制造方法
KR101346472B1 (ko) 산화물 박막용 스퍼터링 타겟 및 그의 제조 방법
US8598578B2 (en) Sputtering target and thin film transistor equipped with same
JP5096250B2 (ja) 酸化物焼結体の製造方法、酸化物焼結体、スパッタリングタ−ゲット、酸化物薄膜、薄膜トランジスタの製造方法及び半導体装置
JPWO2009142289A6 (ja) スパッタリングターゲット、それを用いたアモルファス酸化物薄膜の形成方法、及び薄膜トランジスタの製造方法
CN102194561B (zh) 一种软磁铁氧体材料及其制备工艺
CN110683856B (zh) 导电性多孔陶瓷基板及其制造方法
CN106554202A (zh) 一种铋层状结构钛酸铋钠高温压电陶瓷材料及其制备方法
EP1464723A3 (de) Wärmedämmschicht mit nanometrischen Eigenschaften
CN101541709A (zh) 电介体瓷器及电容器
JP2005314215A (ja) 緻密質コーディエライト焼結体及びその製造方法
JPH04305054A (ja) アルミニウムチタネート構造体とその製造方法
JP5188898B2 (ja) セラミックス溶射膜及びそれを用いた耐食性部材
CN108409321B (zh) 一种掺杂LaMnO3的钛酸铋铁高温压电陶瓷及其制备方法
KR100948557B1 (ko) SnO₂계 스퍼터링 타깃 및 그 제조 방법
Kamseu et al. Microstuctural evolution during thermal treatment of three kaolinitic clays from Cameroon
Wang et al. Enhanced energy-storage performance of an all-inorganic, antiferroelectric, thin-film via orientation adjustments
JPH0227284B2 (de)
JP2010034032A (ja) 透明導電膜の製造方法
TWI579255B (zh) A ceramic material, a laminated body, a member for a semiconductor manufacturing apparatus, and a sputtering ring target member
Kil et al. had strong cytotoxicity. The Effect of Grain Boundary Diffusion on the Boun-dary Structure and Electrical Characteristics of Sem-iconductive Sr’I ‘iOs CeramicszTae-Gyun kim and Nam-Hee Cho, Department of Ceramic Engineering, Inha Univ
XiaoJing Enhancement of electrical properties of ZnO: Al thin films on transparent TPT substrates by SiO2 buffer layers
Wang Enhancement of Electrical Properties of ZnO: Al Thin Films on Transparent TPT Substrates by SiO2 Buffer Layers