TW200533728A - Wax for temporarily bonding material to be etched - Google Patents
Wax for temporarily bonding material to be etched Download PDFInfo
- Publication number
- TW200533728A TW200533728A TW93139841A TW93139841A TW200533728A TW 200533728 A TW200533728 A TW 200533728A TW 93139841 A TW93139841 A TW 93139841A TW 93139841 A TW93139841 A TW 93139841A TW 200533728 A TW200533728 A TW 200533728A
- Authority
- TW
- Taiwan
- Prior art keywords
- wax
- viscosity
- etched
- rosin
- etching
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L93/00—Compositions of natural resins; Compositions of derivatives thereof
- C08L93/04—Rosin
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/02—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Drying Of Semiconductors (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003433300A JP4617080B2 (ja) | 2003-12-26 | 2003-12-26 | 被エッチング材の仮接着用ワックス |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200533728A true TW200533728A (en) | 2005-10-16 |
| TWI292429B TWI292429B (da) | 2008-01-11 |
Family
ID=34736510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW93139841A TW200533728A (en) | 2003-12-26 | 2004-12-21 | Wax for temporarily bonding material to be etched |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4617080B2 (da) |
| TW (1) | TW200533728A (da) |
| WO (1) | WO2005063915A1 (da) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114634793A (zh) * | 2022-03-23 | 2022-06-17 | 福州硕榕光电有限公司 | 一种光学上盘蜡及其制备方法与应用 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54123148A (en) * | 1978-03-17 | 1979-09-25 | Nippon Telegr & Teleph Corp <Ntt> | Bonding method of specimen to be polished |
| JPH0726087B2 (ja) * | 1989-12-29 | 1995-03-22 | 日化精工株式会社 | ウエハーの仮着用接着剤およびその洗浄剤 |
| JP2741362B2 (ja) * | 1995-12-05 | 1998-04-15 | 日化精工株式会社 | ウエハ−の仮着用接着剤 |
| JPH11293224A (ja) * | 1998-04-07 | 1999-10-26 | The Inctec Inc | シリコンウエハー用仮着接着剤及びその精製方法 |
| JP2000087004A (ja) * | 1998-09-17 | 2000-03-28 | Nitta Ind Corp | 被加工物用保持剤およびそれを用いた被加工物の脱着方法 |
-
2003
- 2003-12-26 JP JP2003433300A patent/JP4617080B2/ja not_active Expired - Fee Related
-
2004
- 2004-12-21 TW TW93139841A patent/TW200533728A/zh not_active IP Right Cessation
- 2004-12-24 WO PCT/JP2004/019343 patent/WO2005063915A1/ja not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO2005063915A1 (ja) | 2005-07-14 |
| JP4617080B2 (ja) | 2011-01-19 |
| TWI292429B (da) | 2008-01-11 |
| JP2005187740A (ja) | 2005-07-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20260018559A1 (en) | Sintering materials and attachment methods using same | |
| TW200527579A (en) | Substrate supporting plate and striping method for supporting plate | |
| CN106660120A (zh) | 烧结材料和使用其的固定方法 | |
| JP2012012573A (ja) | 仮接着材組成物、及び薄型ウエハの製造方法 | |
| CN102061474B (zh) | 一种半导体晶圆的超厚度化学减薄方法 | |
| JP2001351966A (ja) | サセプタ及びサセプタの製造方法 | |
| CN114643651B (zh) | 一种碳化硅晶片贴蜡方法和辅助贴蜡装置 | |
| JP2018142630A (ja) | ウェーハ仮止め用ワックス及びウェーハの仮止め方法 | |
| JP2000005982A (ja) | スライスドウエ−ハの基準面形成方法 | |
| TW200533728A (en) | Wax for temporarily bonding material to be etched | |
| CN107665835B (zh) | 装置封装设施及方法及利用deht的装置处理设备 | |
| JP2018142631A (ja) | ウェーハの仮止め用サポート基板及びウェーハの仮止め処理方法 | |
| CN103692337A (zh) | 一种采用混合果糖粘贴硅片的硅抛光方法 | |
| CN114315424B (zh) | 一种耐高温涂层的制备方法及其在石墨制品中的应用 | |
| JP2020009982A (ja) | 半導体チップの研磨方法 | |
| CN110556331B (zh) | 一种复合材料及使用该材料的静电卡盘的制造方法 | |
| CN107877270B (zh) | 一种用于介质基片片内均匀减薄的方法 | |
| JP2007243082A (ja) | ディンプルレスのGaAsウエハ−貼付方法 | |
| JP2004228556A (ja) | 貼り合わせ部材、その製造方法およびその製造装置 | |
| CN112521876A (zh) | 用于湿式、高温制程的可热剥离感压黏着片 | |
| JPH01287268A (ja) | 浸漬ボンディング方法及び装置 | |
| CN106601589A (zh) | 一种柔性石墨薄膜的制备方法 | |
| JPH0929149A (ja) | 枚葉型塗布装置 | |
| JP2020088027A (ja) | はんだキャップを備えた電子部品及びその製造方法ならびにはんだペースト組成物 | |
| TW202115211A (zh) | 用於溼式、高溫製程之可熱剝離感壓黏著片 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |